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    • 1. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US06995038B2
    • 2006-02-07
    • US10892269
    • 2004-07-16
    • Yoshimi EgawaAkira Sugai
    • Yoshimi EgawaAkira Sugai
    • H01L21/50
    • H01L21/566H01L21/565H01L23/3114H01L2924/0002H01L2924/00
    • A method of manufacturing a semiconductor device includes preparing a semiconductor wafer including a first main surface having a semiconductor device forming region and a peripheral region, and a second main surface; preparing first and second dies defining a cavity; holding the semiconductor wafer by the first die so that the first main surface is exposed; placing a film member on the second die; supplying a predetermined amount of resin to a predetermined region on a resin layout region of the film member; heating the first die and the second die; bringing the first die and the second die into contact with each other through the film member to form the cavity, thereby the first main surface and the resin are placed in the cavity; and pressure-reducing the interior of the cavity and reducing the capacity of the cavity to cause the molten resin obtained by melting the resin to contact the first main surface, thereby forming an encapsulating portion on the first main surface.
    • 一种制造半导体器件的方法包括:制备包括具有半导体器件形成区域和周边区域的第一主表面和第二主表面的半导体晶片; 制备限定腔的第一和第二模具; 通过第一模具保持半导体晶片,使得第一主表面露出; 将膜构件放置在第二模具上; 将预定量的树脂供应到所述薄膜构件的树脂布局区域上的预定区域; 加热第一模具和第二模具; 使第一模具和第二模具通过膜构件彼此接触以形成空腔,从而将第一主表面和树脂放置在空腔中; 并且减小空腔的内部并降低空腔的容量,使得通过熔化树脂获得的熔融树脂与第一主表面接触,从而在第一主表面上形成封装部分。
    • 2. 发明申请
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US20050026418A1
    • 2005-02-03
    • US10892269
    • 2004-07-16
    • Yoshimi EgawaAkira Sugai
    • Yoshimi EgawaAkira Sugai
    • H01L23/12H01L21/44H01L21/56H01L23/31
    • H01L21/566H01L21/565H01L23/3114H01L2924/0002H01L2924/00
    • A method of manufacturing a semiconductor device includes preparing a semiconductor wafer including a first main surface having a semiconductor device forming region and a peripheral region, and a second main surface; preparing first and second dies defining a cavity; holding the semiconductor wafer by the first die so that the first main surface is exposed; placing a film member on the second die; supplying a predetermined amount of resin to a predetermined region on a resin layout region of the film member; heating the first die and the second die; bringing the first die and the second die into contact with each other through the film member to form the cavity, thereby the first main surface and the resin are placed in the cavity; and pressure-reducing the interior of the cavity and reducing the capacity of the cavity to cause the molten resin obtained by melting the resin to contact the first main surface, thereby forming an encapsulating portion on the first main surface.
    • 一种制造半导体器件的方法包括:制备包括具有半导体器件形成区域和周边区域的第一主表面和第二主表面的半导体晶片; 制备限定腔的第一和第二模具; 通过第一模具保持半导体晶片,使得第一主表面露出; 将膜构件放置在第二模具上; 将预定量的树脂供应到所述薄膜构件的树脂布局区域上的预定区域; 加热第一模具和第二模具; 使第一模具和第二模具通过膜构件彼此接触以形成空腔,从而将第一主表面和树脂放置在空腔中; 并且减小空腔的内部并降低空腔的容量,使得通过熔化树脂获得的熔融树脂与第一主表面接触,从而在第一主表面上形成封装部分。
    • 8. 发明授权
    • Mold resin sealing device and molding method
    • 模具树脂密封装置及成型方法
    • US08236621B2
    • 2012-08-07
    • US12929304
    • 2011-01-13
    • Akira Sugai
    • Akira Sugai
    • H01L21/56H01L21/00
    • B29C43/18B29C43/361B29C2043/181H01L21/565H01L2924/0002H01L2924/00
    • A mold resin sealing device for sealing a surface of a semiconductor wafer with a mold resin, includes: a first mold die; and a second mold die disposed opposite to the first mold die, the second mold die having a second surface; wherein the first mold die includes a first part having a first surface facing the second surface of the second mold die and having an opening in a central region of the first surface; and a first step-like movable part capable of moving in the opening in both directions so that the first step-like movable part moves toward and away from the second mold die.
    • 一种用模具树脂密封半导体晶片的表面的模制树脂密封装置,包括:第一模具; 和与第一模具模具相对设置的第二模具模具,第二模具模具具有第二表面; 其中所述第一模具包括具有面向所述第二模具模具的第二表面的第一表面并且在所述第一表面的中心区域中具有开口的第一部分; 以及能够沿两个方向在开口中移动的第一阶梯状可动部,使得第一阶梯状可动部朝向和远离第二模具移动。