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1. 发明授权

US5955660A Method of controlling probe microscope 失效
标题翻译：控制探针显微镜的方法
公开(公告)号：US5955660A
公开(公告)日：1999-09-21
申请号：US763674
申请日：1996-12-06
申请人： Akihiko Honma
发明人： Akihiko Honma
IPC分类号： G01B21/30 , G01B11/30 , G01N37/00 , G01Q20/02 , G01Q60/24 , G01Q60/32 , G01Q60/38 , H01J37/28
CPC分类号： G01Q10/065 , B82Y35/00 , G01Q60/32 , Y10S977/851
摘要： An improved stable feedback control circuit for a scanning probe microscope has a vibrationally driven cantilever having a probe mounted at a distal end thereof at a frequency near the resonance frequency thereof and a light detector for measuring deflection of the cantilever in response to a repulsive force acting between the probe and a surface of a sample and producing a pair of output signals which vary depending upon deflection of the cantilever and a detected signal having the vibrating frequency of the cantilever as a fundamental frequency component thereof, a method for controlling the probe microscope comprising the steps of: producing a plurality of input signals for the feedback control circuit comprising a first input signal equivalent to the root-mean-square value of the detected signal and a second input signal equivalent to a difference between, or the sum of, the pair of output signals of the light detector, and adding the first and second input signals to produce a feedback control signal used for maintaining a constant distance between the probe and the sample surface.
摘要翻译：用于扫描探针显微镜的改进的稳定反馈控制电路具有振动驱动的悬臂，其具有以其接近谐振频率的频率安装在其远端处的探头和用于响应于作用的排斥力来测量悬臂的偏转的光检测器在探针和样品的表面之间产生一对根据悬臂的偏转而变化的输出信号和具有作为其基本频率分量的悬臂的振动频率的检测信号，用于控制探针显微镜的方法包括：步骤：产生反馈控制电路的多个输入信号，该输入信号包括与检测信号的均方根值相当的第一输入信号和等于或小于或等于光检测器的一对输出信号，并且添加第一和第二输入信号以产生费用 dback控制信号用于保持探头和样品表面之间的恒定距离。

2. 发明授权

US06904791B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06904791B2
公开(公告)日：2005-06-14
申请号：US10438038
申请日：2003-05-14
申请人： Akihiko Honma
发明人： Akihiko Honma
IPC分类号： G01B21/30 , G01Q30/04 , G01Q60/24 , G21K7/00 , G01N23/00
CPC分类号： G01Q30/06 , Y10S977/852
摘要： A scanning probe microscope simply and accurately confirms whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart from each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1 on a screen so that a sample shape line profile fits between the reference line profiles Lref1 and Lref2 of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved and rotated, it is determined that the sample shape is out of spec.
摘要翻译：扫描探针显微镜简单准确地确认样品形状是否满足规定的条件。伪参考图像Sref 1包括彼此平行布置的一对参考线轮廓Lref 1和Lref 2。操作者将伪参考图像Sref 1的位置移动并旋转到屏幕上，使得样本形状线轮廓拟合在伪参考图像Sref 1的参考线轮廓Lref 1和Lref 2之间。如果可以将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，则确定样品形状是规格的，而如果不可能将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，无论伪参考图像Sref 1如何被移动和旋转，都确定样本形状不合格。

3. 发明授权

US06734426B2 Probe scanning device 失效
标题翻译：探头扫描装置
公开(公告)号：US06734426B2
公开(公告)日：2004-05-11
申请号：US10167538
申请日：2002-06-12
申请人： Ryuichi Matsuzaki , Akihiko Honma , Yukihiro Sato
发明人： Ryuichi Matsuzaki , Akihiko Honma , Yukihiro Sato
IPC分类号： H01J3700
CPC分类号： G01Q70/04
摘要： A probe scanning device has a first tubular member extending in a z direction. A second tubular member has a rear end portion extending into the first tubular member to define a space between an inner peripheral surface portion of the first tubular member and an outer peripheral surface portion of the second tubular member. A probe tip is mounted on a front end portion of the second tubular member. A viscous material is disposed in the space between the first tubular member and the second tubular member. A moving mechanism reciprocally moves the first tubular member in an xy direction, and a voice coil motor drives the second tubular member towards the first tubular member in the z direction. A drive mechanism has a coarse adjustment mode for coarsely moving the probe tip toward a surface of a sample and a measurement mode for fine movement of the probe tip in the z direction to maintain a given relationship between relative positions of the probe tip and the sample surface after coarse movement. A connecting mechanism selectively integrally connects the first tubular member and the second tubular member to one another.
摘要翻译：探针扫描装置具有沿z方向延伸的第一管状构件。第二管状构件具有延伸到第一管状构件中的后端部分，以在第一管状构件的内周表面部分和第二管状构件的外周表面部分之间限定空间。探针尖端安装在第二管状构件的前端部分上。粘性材料设置在第一管状构件和第二管状构件之间的空间中。移动机构使第一管状部件沿xy方向往复移动，音圈马达在z方向上朝第一管状部件驱动第二管状部件。驱动机构具有用于将探针尖端朝向样品的表面粗略移动的粗调方式和用于在z方向上精细移动探针尖端的测量模式，以保持探针尖端和样品的相对位置之间的给定关系表面粗动。连接机构选择性地将第一管状部件和第二管状部件一体地连接在一起。

4. 发明授权

US06242736B1 Scanning probe microscope 失效
标题翻译：扫描探头显微镜
公开(公告)号：US06242736B1
公开(公告)日：2001-06-05
申请号：US09116319
申请日：1998-07-15
申请人： Akihiko Honma , Takeshi Umemoto , Akira Inoue
发明人： Akihiko Honma , Takeshi Umemoto , Akira Inoue
IPC分类号： G01N1312
CPC分类号： G01Q30/04 , Y10S977/85
摘要： A scanning probe microscope for scanning a probe needle in proximity to a surface of a sample in XY-axis directions while moving at least one of the probe and the sample in a Z-axis direction has a plurality of band-pass filters for passing a plurality of band-pass signals by extracting predetermined frequency bands different one another from a surface geometry signal output by a probe. An image memory stores the respective band-pass signals and corresponding positions on the sample surface, and a color image outputting device outputs a color image by treating each of the respective band-pass signals stored as image data in the image memory as different color data and combining the data. The plurality of band-pass signals includes a first band-pass signal having a first frequency range set to include only abrupt transitions in the sample surface and a second band-pass signal having a second frequency range set to include frequencies slightly outside the first frequency range so that abrupt transitions in geometry on the sample surface are represented by a first color in response to the first band-pass signal and areas directly adjacent the abrupt transitions on the sample surface are represented by a second color different from the first color.
摘要翻译：扫描探针显微镜，用于在沿Z轴方向移动探头和样本中的至少一个的同时沿XY轴方向扫描样品表面附近的探针，具有多个带通滤波器，用于使通过从由探针输出的表面几何信号中提取彼此不同的预定频带，来产生多个带通信号。图像存储器将各个带通信号和相应的位置存储在样本表面上，并且彩色图像输出装置通过将作为图像数据存储的各个带通信号中的每一个作为不同的颜色数据进行处理来输出彩色图像并组合数据。多个带通信号包括具有第一频率范围的第一带通信号，其中第一频率范围被设置为仅包括采样表面中的突变，以及具有第二频率范围的第二带通信号，第二频带设置为包括稍微在第一频率之外的频率范围，使得样品表面上的几何形状的突变过渡由第一颜色响应于第一带通信号表示，并且与样品表面上的突然跃迁直接相邻的区域由不同于第一颜色的第二颜色表示。

5. 发明申请

US20050217354A1 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US20050217354A1
公开(公告)日：2005-10-06
申请号：US11136970
申请日：2005-05-25
申请人： Akihiko Honma
发明人： Akihiko Honma
IPC分类号： G01B21/30 , G01Q30/04 , G01Q60/24 , G21K7/00 , G01N13/10
CPC分类号： G01Q30/06 , Y10S977/852
摘要： There is provided a scanning probe microscope capable of simply and accurately confirming whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart form each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1 on a screen so that a sample shape line profile fits between the reference line profiles Lref1 and Lref2 of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved and rotated, it is determined that the sample shape is out of spec.
摘要翻译：提供了能够简单准确地确认样品形状是否满足规定条件的扫描探针显微镜。伪参考图像Sref 1包括彼此并行布置的一对参考线轮廓Lref 1和Lref 2。操作者将伪参考图像Sref 1的位置移动并旋转到屏幕上，使得样本形状线轮廓拟合在伪参考图像Sref 1的参考线轮廓Lref 1和Lref 2之间。如果可以将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，则确定样品形状是规格的，而如果不可能将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，无论伪参考图像Sref 1如何被移动和旋转，都确定样本形状不合格。

6. 发明授权

US07066015B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US07066015B2
公开(公告)日：2006-06-27
申请号：US11136970
申请日：2005-05-25
申请人： Akihiko Honma
发明人： Akihiko Honma
IPC分类号： G01N13/16
CPC分类号： G01Q30/06 , Y10S977/852
摘要： There is provided a scanning probe microscope capable of simply and accurately confirming whether or not a sample shape satisfies specified conditions. A pseudo reference image Sref1 comprises a pair of reference line profiles Lref1 and Lref2 arranged apart form each other in parallel. An operator moves and rotates the position of the pseudo reference image Sref1 on a screen so that a sample shape line profile fits between the reference line profiles Lref1 and Lref2 of the pseudo reference image Sref1. If it is possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lref1 and Lref2, no matter how the pseudo reference image Sref1 is moved and rotated, it is determined that the sample shape is out of spec.
摘要翻译：提供了能够简单准确地确认样品形状是否满足规定条件的扫描探针显微镜。伪参考图像Sref 1包括彼此并行布置的一对参考线轮廓Lref 1和Lref 2。操作者将伪参考图像Sref 1的位置移动并旋转到屏幕上，使得样本形状线轮廓拟合在伪参考图像Sref 1的参考线轮廓Lref 1和Lref 2之间。如果可以将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，则确定样品形状是规格的，而如果不可能将样品形状的线轮廓拟合在参考线轮廓Lref 1和Lref 2之间，无论伪参考图像Sref 1如何被移动和旋转，都确定样本形状不合格。

7. 发明授权

US5506400A Scanning type probe microscope 失效
标题翻译：扫描型探针显微镜
公开(公告)号：US5506400A
公开(公告)日：1996-04-09
申请号：US220103
申请日：1994-03-30
申请人： Akihiko Honma , Kazutoshi Watanabe
发明人： Akihiko Honma , Kazutoshi Watanabe
IPC分类号： G01B21/30 , G01J1/32 , G01Q20/02 , G01Q30/02 , G01Q60/24 , G01Q60/38 , H01J37/28
CPC分类号： G01Q20/02 , B82Y35/00 , Y10S977/87
摘要： In a scanning type probe microscope, a semiconductor laser LD is driven by a current having a value not more than an oscillation threshold value using a constant current circuit for weak light, and weak light is used to perform positional adjustment of the position of the laser beam on a cantilever.
摘要翻译：在扫描型探针显微镜中，使用弱光用恒流电路，利用具有不大于振荡阈值的电流来驱动半导体激光器LD，并且使用弱光进行激光的位置的位置调整在悬臂梁上。

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