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1. 发明申请

US20110306159A1 METHOD FOR PROCESSING SOLAR CELL SUBSTRATES 有权
标题翻译：用于处理太阳能电池基板的方法
公开(公告)号：US20110306159A1
公开(公告)日：2011-12-15
申请号：US12814899
申请日：2010-06-14
申请人： de Chris G. M. Ridder , Klaas P. Boonstra , Adriaan Garssen , Frank Huussen
发明人： de Chris G. M. Ridder , Klaas P. Boonstra , Adriaan Garssen , Frank Huussen
IPC分类号： H01L21/30
CPC分类号： H01L21/67303 , C23C16/45546 , C23C16/4587 , F27B17/0025 , F27D5/0037 , H01L21/67109 , H01L21/67313 , H01L21/67757 , H01L31/1864 , H01L31/1876 , Y02E10/547 , Y02P70/521
摘要： A method for processing solar cells comprising: providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing; composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber, loading the solar cell substrates into the process chamber; subjecting the solar cell substrates to a process in the process chamber.
摘要翻译：一种用于处理太阳能电池的方法，包括：提供垂直炉以接收用于集成电路处理的相互间隔开的圆形半导体晶片阵列; 构成用于太阳能电池基板的处理室装载构造，其中沿着待处理的第一表面延伸的太阳能电池基板的尺寸小于圆形半导体晶片的对应尺寸，使得相互间隔开的太阳能电池基板的多个阵列可以容纳在处理室中，将太阳能电池基板装载到处理室中; 对太阳能电池基板进行处理室中的处理。

2. 发明申请

US20050035313A1 Method and apparatus for mapping of wafers located inside a closed wafer cassette 有权
标题翻译：用于映射位于封闭晶片盒内的晶片的方法和装置
公开(公告)号：US20050035313A1
公开(公告)日：2005-02-17
申请号：US10641806
申请日：2003-08-15
申请人： Adriaan Garssen , Joost Van Groen , Christianus Gerardus De Ridder
发明人： Adriaan Garssen , Joost Van Groen , Christianus Gerardus De Ridder
IPC分类号： H01L21/67 , G01V8/10 , G01V8/00 , G01N21/86
CPC分类号： H01L21/67265 , G01V8/10
摘要： Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
摘要翻译：磁带盒中的晶片被映射，而不必打开磁带盒。该盒对于特定类型的辐射至少部分透明。辐射源通过盒的透明或半透明部分被引导到盒中，并且对辐射敏感的成像传感器检测从盒内的晶片反射的辐射。第二辐射源和第二照相机优选地从不同的角度提供晶片的附加图像。通过处理这些图像，可以确定晶片的空间取向和盒的装载状态。

3. 发明申请

US20060131521A1 Method for sensing wafers located inside a closed wafer cassette 有权
标题翻译：用于感测位于封闭晶片盒内的晶片的方法
公开(公告)号：US20060131521A1
公开(公告)日：2006-06-22
申请号：US11343476
申请日：2006-01-30
申请人： Adriaan Garssen , Joost Groen , Christianus Ridder
发明人： Adriaan Garssen , Joost Groen , Christianus Ridder
IPC分类号： G01N21/86
CPC分类号： H01L21/67265 , G01V8/10
摘要： Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
摘要翻译：磁带盒中的晶片被映射，而不必打开磁带盒。该盒对于特定类型的辐射至少部分透明。辐射源通过盒的透明或半透明部分被引导到盒中，并且对辐射敏感的成像传感器检测从盒内的晶片反射的辐射。第二辐射源和第二照相机优选地从不同的角度提供晶片的附加图像。通过处理这些图像，可以确定晶片的空间取向和盒的装载状态。

4. 发明授权

US08338210B2 Method for processing solar cell substrates 有权
标题翻译：太阳能电池基板的处理方法
公开(公告)号：US08338210B2
公开(公告)日：2012-12-25
申请号：US12814899
申请日：2010-06-14
申请人： de Chris G. M. Ridder , Klaas P. Boonstra , Adriaan Garssen , Frank Huussen
发明人： de Chris G. M. Ridder , Klaas P. Boonstra , Adriaan Garssen , Frank Huussen
IPC分类号： H01L21/00
CPC分类号： H01L21/67303 , C23C16/45546 , C23C16/4587 , F27B17/0025 , F27D5/0037 , H01L21/67109 , H01L21/67313 , H01L21/67757 , H01L31/1864 , H01L31/1876 , Y02E10/547 , Y02P70/521
摘要： A method for processing solar cells comprising: providing a vertical furnace to receive an array of mutually spaced circular semiconductor wafers for integrated circuit processing; composing a process chamber loading configuration for solar cell substrates, wherein a size of the solar cell substrates that extends along a first surface to be processed is smaller than a corresponding size of the circular semiconductor wafers, such that multiple arrays of mutually spaced solar cell substrates can be accommodated in the process chamber, loading the solar cell substrates into the process chamber; subjecting the solar cell substrates to a process in the process chamber.
摘要翻译：一种用于处理太阳能电池的方法，包括：提供垂直炉以接收用于集成电路处理的相互间隔开的圆形半导体晶片阵列; 构成用于太阳能电池基板的处理室装载构造，其中沿着待处理的第一表面延伸的太阳能电池基板的尺寸小于圆形半导体晶片的对应尺寸，使得相互间隔开的太阳能电池基板的多个阵列可以容纳在处理室中，将太阳能电池基板装载到处理室中; 对太阳能电池基板进行处理室中的处理。

5. 发明申请

US20090188874A1 Wafer boat 有权
标题翻译：晶圆船
公开(公告)号：US20090188874A1
公开(公告)日：2009-07-30
申请号：US12011981
申请日：2008-01-30
申请人： Christianus Gerardus Maria De Ridder , Adriaan Garssen
发明人： Christianus Gerardus Maria De Ridder , Adriaan Garssen
IPC分类号： H01L21/683
CPC分类号： H01L21/67303 , H01L21/67309
摘要： Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and supporting said wafers in a substantially horizontal orientation, wherein the holding positions can be accessed from a front side of the wafer boat to allow for insertion and removal of a wafer, wherein at least one holding position comprises a back support for engaging a back side portion of a wafer and two lateral supports for engaging opposite lateral side portions of the wafer, and wherein the back support is disposed at a lower position than said two lateral supports such that sagging of a front side portion of an inserted wafer near the front side of the wafer boat due to gravity is at least partially compensated for.
摘要翻译：用于在处理过程中以间隔垂直布置保持半导体晶片的晶片舟，所述晶片舟包括多个垂直间隔的保持位置，用于以基本上水平的方向接收和支撑所述晶片，其中保持位置可以从晶片舟以允许插入和移除晶片，其中至少一个保持位置包括用于接合晶片的后侧部分的后支撑件和用于接合晶片的相对横向侧部分的两个侧向支撑件，并且其中后支撑件被布置在比所述两个侧向支撑件更低的位置处，使得由于重力而在晶片舟皿的前侧附近的插入晶片的前侧部分的下垂至少部分地被补偿。

6. 发明授权

US07202491B2 Method for sensing wafers located inside a closed wafer cassette 有权
标题翻译：用于感测位于封闭晶片盒内的晶片的方法
公开(公告)号：US07202491B2
公开(公告)日：2007-04-10
申请号：US11343476
申请日：2006-01-30
申请人： Adriaan Garssen , Joost van Groen , Christianus Gerardus Maria de Ridder
发明人： Adriaan Garssen , Joost van Groen , Christianus Gerardus Maria de Ridder
IPC分类号： G01N21/86 , G01N21/88 , G01B11/02
CPC分类号： H01L21/67265 , G01V8/10
摘要： Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
摘要翻译：磁带盒中的晶片被映射，而不必打开磁带盒。该盒对于特定类型的辐射至少部分透明。辐射源通过盒的透明或半透明部分被引导到盒中，并且对辐射敏感的成像传感器检测从盒内的晶片反射的辐射。第二辐射源和第二照相机优选地从不同的角度提供晶片的附加图像。通过处理这些图像，可以确定晶片的空间取向和盒的装载状态。

7. 发明授权

US07971734B2 Wafer boat 有权
标题翻译：晶圆船
公开(公告)号：US07971734B2
公开(公告)日：2011-07-05
申请号：US12011981
申请日：2008-01-30
申请人： Christianus Gerardus Maria De Ridder , Adriaan Garssen
发明人： Christianus Gerardus Maria De Ridder , Adriaan Garssen
IPC分类号： A47G19/08
CPC分类号： H01L21/67303 , H01L21/67309
摘要： Wafer boat for holding semiconductor wafers in a spaced vertical arrangement during processing, said wafer boat comprising a plurality of vertically spaced holding positions for receiving and supporting said wafers in a substantially horizontal orientation, wherein the holding positions can be accessed from a front side of the wafer boat to allow for insertion and removal of a wafer, wherein at least one holding position comprises a back support for engaging a back side portion of a wafer and two lateral supports for engaging opposite lateral side portions of the wafer, and wherein the back support is disposed at a lower position than said two lateral supports such that sagging of a front side portion of an inserted wafer near the front side of the wafer boat due to gravity is at least partially compensated for.
摘要翻译：用于在处理过程中以间隔垂直布置保持半导体晶片的晶片舟，所述晶片舟包括多个垂直间隔的保持位置，用于以基本上水平的方向接收和支撑所述晶片，其中保持位置可从晶片舟以允许插入和移除晶片，其中至少一个保持位置包括用于接合晶片的后侧部分的后支撑件和用于接合晶片的相对横向侧部分的两个侧向支撑件，并且其中后支撑件被布置在比所述两个侧向支撑件更低的位置处，使得由于重力而在晶片舟皿的前侧附近的插入晶片的前侧部分的下垂至少部分地被补偿。

8. 发明授权

US07015492B2 Method and apparatus for mapping of wafers located inside a closed wafer cassette 有权
标题翻译：用于映射位于封闭晶片盒内的晶片的方法和装置
公开(公告)号：US07015492B2
公开(公告)日：2006-03-21
申请号：US10641806
申请日：2003-08-15
申请人： Adriaan Garssen , Joost van Groen , Christianus Gerardus Maria de Ridder
发明人： Adriaan Garssen , Joost van Groen , Christianus Gerardus Maria de Ridder
IPC分类号： G01N21/86
CPC分类号： H01L21/67265 , G01V8/10
摘要： Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.
摘要翻译：磁带盒中的晶片被映射，而不必打开磁带盒。该盒对于特定类型的辐射至少部分透明。辐射源通过盒的透明或半透明部分被引导到盒中，并且对辐射敏感的成像传感器检测从盒内的晶片反射的辐射。第二辐射源和第二照相机优选地从不同的角度提供晶片的附加图像。通过处理这些图像，可以确定晶片的空间取向和盒的装载状态。

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