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1. 发明授权

US07334477B1 Apparatus and methods for the detection of an arc in a plasma processing system 有权
标题翻译：用于在等离子体处理系统中检测电弧的装置和方法
公开(公告)号：US07334477B1
公开(公告)日：2008-02-26
申请号：US11023174
申请日：2004-12-22
申请人： David Pirkle
发明人： David Pirkle
IPC分类号： G01H1/12 , G01N29/14
CPC分类号： H01J37/32935 , H01J2237/0206
摘要： In a plasma processing system, a method for detecting an arc event on a substrate in a plasma chamber having a chuck is disclosed. The method includes positioning a substrate on the chuck. The method also includes providing a vibration-sensing arrangement in the plasma chamber, the vibration-sensing arrangement being configured for measuring arc-induced vibrations on the substrate, the arc-induced vibrations being generated when an arc strikes the substrate during plasma processing of the substrate in the plasma processing chamber.
摘要翻译：在等离子体处理系统中，公开了一种用于检测具有卡盘的等离子体室中的基板上的电弧事件的方法。该方法包括将基板定位在卡盘上。该方法还包括在等离子体室中提供振动感测装置，所述振动感测装置被配置成用于测量基板上的电弧感应振动，当在等离子体处理期间电弧撞击基板时产生电弧致振动衬底在等离子体处理室中。

2. 发明授权

US07319316B2 Apparatus for measuring a set of electrical characteristics in a plasma 有权
标题翻译：用于测量等离子体中的一组电特性的装置
公开(公告)号：US07319316B2
公开(公告)日：2008-01-15
申请号：US11172014
申请日：2005-06-29
申请人： Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
发明人： Christopher Kimball , Eric Hudson , Douglas Keil , Alexei Marakhtanov
IPC分类号： C02F1/00
CPC分类号： H01J37/32431 , H01J37/32935 , H05H1/0081 , Y10T29/49002
摘要： A probe apparatus configured to measure a set of electrical characteristics in a plasma processing chamber, the plasma processing chamber including a set of plasma chamber surfaces configured to be exposed to a plasma is disclosed. The probe apparatus includes a collection disk structure configured to be exposed to the plasma, whereby the collection disk structure is coplanar with at least one of the set of plasma chamber surfaces. The probe apparatus also includes a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers, wherein the set of electrical characteristics is generated by an ion flux of the plasma. The probe apparatus further includes an insulation barrier configured to substantially electrically separate the collection disk and the conductive path from the set of plasma chamber surfaces.
摘要翻译：公开了一种被配置为测量等离子体处理室中的一组电特性的探针装置，所述等离子体处理室包括被配置为暴露于等离子体的一组等离子体室表面。探针装置包括构造成暴露于等离子体的收集盘结构，由此收集盘结构与等离子体腔表面中的至少一个共面。探针装置还包括导电路径，该导电路径被配置为将该组特征从收集盘结构发送到一组换能器，其中该组电特性由等离子体的离子通量产生。探针装置还包括绝缘屏障，其被配置为基本上将采集盘和导电路径与该组等离子体腔表面电分离。

3. 发明授权

US07272660B1 Architecture for general purpose near real-time business intelligence system and methods therefor 有权
标题翻译：一般用途的建筑物近实时商业智能系统及其方法
公开(公告)号：US07272660B1
公开(公告)日：2007-09-18
申请号：US10289131
申请日：2002-11-05
申请人： Craig R. Powers , Kenneth C. Gardner , Tim J. Beauchamp , Tana Christine Netsch , Geoffrey Deane Owen Nicholls
发明人： Craig R. Powers , Kenneth C. Gardner , Tim J. Beauchamp , Tana Christine Netsch , Geoffrey Deane Owen Nicholls
IPC分类号： G06F15/173
CPC分类号： G06Q10/00 , G06Q30/06
摘要： A method of optimizing the delivery of a set of data elements to a device, the set of data elements further comprising a metadata portion. The method further includes determining a source of each element of the set of data elements, and creating a set of rules for transforming the set of data elements from a first representation to a second representation, based in part on the metadata. The method further includes transferring the set of data elements from the source to a first computer, transforming the set of data elements, based in part on the set of rules, and delivering the second representation to the device. Thereafter, the method includes monitoring the source for a change to the set of data elements. And, if required, the method further includes transferring the change from the source to the first computer.
摘要翻译：一种优化一组数据元素到设备的传送的方法，该组数据元素还包括元数据部分。该方法还包括确定数据元素集合中的每个元素的源，以及部分地基于元数据，创建用于将数据元素集合从第一表示转换为第二表示的一组规则。该方法还包括将该组数据元素从源传输到第一计算机，部分地基于规则集转换数据元素集合，并将第二表示传递给设备。此后，该方法包括监视源以改变该组数据元素。而且，如果需要，该方法还包括将来自源的更改传送到第一台计算机。

4. 发明授权

US07234222B1 Methods and apparatus for optimizing the delivery of a set of gases in a plasma processing system 有权
标题翻译：用于优化等离子体处理系统中的一组气体的输送的方法和装置
公开(公告)号：US07234222B1
公开(公告)日：2007-06-26
申请号：US10672085
申请日：2003-09-26
申请人： Fangli Hao , John Daugherty
发明人： Fangli Hao , John Daugherty
IPC分类号： B23P25/00 , B21D39/00
CPC分类号： H01J37/3244 , H01J37/32495 , Y10T29/49428 , Y10T29/49885 , Y10T29/49911
摘要： A method for configuring a gas distribution channel, the gas distribution channel being configured for introducing a plasma source gas into a plasma processing chamber of a plasma processing system is disclosed. The method includes providing a metal conduit, providing a thermo-plastic tubular structure, and disposing the thermoplastic tubular structure within the metal conduit. The method also includes applying heat and pressure to the thermo-plastic tubular structure, thereby causing the thermo-plastic tubular structure to mechanically couple with the metal conduit wherein an outer surface of the thermo-plastic tubular structure is longitudinally coupled with an inner surface of the metal conduit.
摘要翻译：公开了一种配置气体分配通道的方法，该气体分配通道用于将等离子体源气体引入等离子体处理系统的等离子体处理室。该方法包括提供金属管道，提供热塑性管状结构，并将热塑性管状结构设置在金属管道内。该方法还包括向热塑性管状结构施加热和压力，从而使热塑性管状结构与金属管道机械耦合，其中热塑性管状结构的外表面纵向与金属导管。

5. 发明授权

US07138067B2 Methods and apparatus for tuning a set of plasma processing steps 有权
标题翻译：调整一组等离子体处理步骤的方法和装置
公开(公告)号：US07138067B2
公开(公告)日：2006-11-21
申请号：US10951552
申请日：2004-09-27
申请人： Vahid Vahedi , John Daugherty , Harmeet Singh , Anthony Chen
发明人： Vahid Vahedi , John Daugherty , Harmeet Singh , Anthony Chen
IPC分类号： B44C1/22 , H01L21/00
CPC分类号： C03C15/00 , C03C23/006 , H01J37/32623 , H01J37/32642 , H01L21/32136
摘要： In a plasma processing system, a method of tuning of a set of plasma processing steps is disclosed. The method includes striking a first plasma comprising neutrals and ions in a plasma reactor of the plasma processing system. The method also includes etching in a first etching step a set of layers on a substrate; positioning a movable uniformity ring around the substrate, wherein a bottom surface of the uniformity ring is about the same height as a top surface of the substrate; and striking a second plasma consisting essentially of neutrals in the plasma reactor of the plasma processing system. The method further includes etching in a second etching step the set of layers on the substrate; and wherein the etching in the first step and the etching in the second step are substantially uniform.
摘要翻译：在等离子体处理系统中，公开了一组等离子体处理步骤的调谐方法。该方法包括在等离子体处理系统的等离子体反应器中击打包含中性粒子和离子的第一等离子体。该方法还包括在第一蚀刻步骤中蚀刻在衬底上的一组层; 将可移动均匀环定位在基底周围，其中均匀环的底表面与基底的顶表面大致相同的高度; 并且在等离子体处理系统的等离子体反应器中击打基本上由中性体组成的第二等离子体。该方法还包括在第二蚀刻步骤中蚀刻衬底上的这组层; 并且其中第一步骤中的蚀刻和第二步骤中的蚀刻基本上是均匀的。

6. 发明授权

US07020160B1 Interface circuits for modularized data optimization engines and methods therefor 有权
标题翻译：用于模块化数据优化引擎的接口电路及其方法
公开(公告)号：US07020160B1
公开(公告)日：2006-03-28
申请号：US10026679
申请日：2001-12-17
申请人： Isaac Achler
发明人： Isaac Achler
IPC分类号： H04J3/22
CPC分类号： H04J3/0602 , H03M7/30 , H03M7/3088
摘要： A data optimization engine for optimizing selected frames of a first stream of data. The data optimization engine includes a transmit interface circuit coupled to an optimization processor, the transmit interface circuit being configured for receiving the first stream of data. The transmit interface circuit includes a traffic controller circuit for separating frames in the first stream of data into a first optimizable frame and a first non-optimizable frame, and an optimization front-end circuit coupled to the traffic controller circuit to receive at least a first portion of the first optimizable frame. The optimization front-end circuit includes a protocol conversion circuit configured to convert data in the first portion of the first optimizable frame from a first protocol to a second protocol suitable for processing by the optimization processor, the first protocol specifies a first word length, the second protocol specifies a second word length different from the first word length. The optimization front-end circuit further includes an end-of-optimization-file processing circuit, the end-of-optimization-file processing circuit flagging an end of the first portion of the first optimizable frame to the optimization processor, wherein the optimization processor is configured to optimize the first portion of the first optimizable frame by performing at least one of compression and encryption on the first portion of the first optimizable frame.
摘要翻译：一种用于优化第一数据流的所选帧的数据优化引擎。数据优化引擎包括耦合到优化处理器的发射接口电路，所述发射接口电路被配置用于接收第一数据流。发射接口电路包括用于将第一数据流中的帧分离为第一可优化帧和第一不可优化帧的业务控制器电路，以及耦合到业务控制器电路的优化前端电路，以接收至少第一第一个可优化框架的一部分。优化前端电路包括协议转换电路，其被配置为将第一可优化帧的第一部分中的数据从第一协议转换成适于由优化处理器处理的第二协议，第一协议指定第一字长，第二协议规定与第一字长不同的第二字长度。优化前端电路还包括最终优化文件处理电路，最终优化文件处理电路将第一可优化帧的第一部分的一端标记到优化处理器，其中优化处理器被配置为通过在第一可优化帧的第一部分上执行压缩和加密中的至少一个来优化第一可优化帧的第一部分。

7. 发明授权

US06981014B2 Systems and methods for high speed data transmission using TCP/IP 有权
标题翻译：使用TCP / IP进行高速数据传输的系统和方法
公开(公告)号：US06981014B2
公开(公告)日：2005-12-27
申请号：US10233302
申请日：2002-08-30
申请人： Ramkumar Jayam , Anil Kapatkar , Sivakumar Munnangi , Srinivasan Venkataraman
发明人： Ramkumar Jayam , Anil Kapatkar , Sivakumar Munnangi , Srinivasan Venkataraman
IPC分类号： H04L1/18 , H04L12/56 , H04L29/06 , H04L29/08 , G06F13/00
CPC分类号： H04L67/06 , H04L1/1832 , H04L1/1841 , H04L1/187 , H04L1/1883 , H04L29/06 , H04L47/10 , H04L47/193 , H04L69/10 , H04L69/16 , H04L69/161 , H04L69/163 , H04L69/166 , H04L69/22 , H04L69/24 , H04L69/329
摘要： A method for exchanging data in a first host computer coupled to a network. The network is also coupled to a second host computer. The method includes employing a first Transmit Control Block (Tx TCB) to facilitate transmitting first data associated with a bi-directional data flow from the first host computer to the second host computer. The first data is transmitted using the TCP protocol. The first Tx TCB is associated with the first host computer and is configured for storing transmit-facilitating parameters associated with the transmitting the first data using the TCP protocol. The method also includes employing a first Receive Control Block (Rx TCB) to facilitate receiving second data associated with the bi-directional data flow. The second data is transmitted from the second host computer to the first host computer using the TCP protocol. The first Rx TCB is associated with the first host computer and is configured for storing receive-facilitating parameters associated with the receiving the second data using the TCP protocol. In accordance with this embodiment of the invention, the first Tx TCB and the first Rx TCB are employed to simultaneously service a transmit request pertaining the first data and a receive request pertaining the second data.
摘要翻译：一种用于在耦合到网络的第一主计算机中交换数据的方法。网络还耦合到第二主计算机。该方法包括采用第一传输控制块（Tx TCB）来促进将与双向数据流相关联的第一数据从第一主计算机发送到第二主计算机。第一个数据使用TCP协议传输。第一Tx TCB与第一主计算机相关联，并被配置为存储与使用TCP协议发送第一数据相关联的发送便利参数。该方法还包括采用第一接收控制块（Rx TCB）以便于接收与双向数据流相关联的第二数据。使用TCP协议将第二数据从第二主计算机发送到第一主计算机。第一Rx TCB与第一主计算机相关联，并且被配置为存储与使用TCP协议接收第二数据相关联的接收促进参数。根据本发明的该实施例，采用第一Tx TCB和第一Rx TCB来同时服务关于第一数据的发送请求和与第二数据有关的接收请求。

8. 发明授权

US07028069B1 Dynamic circuit using exclusive states 失效
标题翻译：动态电路采用独占状态
公开(公告)号：US07028069B1
公开(公告)日：2006-04-11
申请号：US09996865
申请日：2001-11-27
申请人： Edward T. Pak , Sivakumar Doraiswamy
发明人： Edward T. Pak , Sivakumar Doraiswamy
IPC分类号： G06F7/50
CPC分类号： H03K3/356147
摘要： The invention provides a dynamic domino circuit that is robust under noisy condition. The invention also provides a dynamic adder that contains nodes that can produce true dynamic inversion without compromising area or speed. The invention further improves speed of the adders by cutting the latch delay while not requiring complex clocking.
摘要翻译：本发明提供了一种在噪声条件下稳健的动态多米诺骨牌电路。本发明还提供了一种动态加法器，其包含可以在不损害面积或速度的情况下产生真实动态反演的节点。本发明通过在不需要复杂时钟的情况下切断锁存延迟来进一步提高加法器的速度。

9. 发明授权

US07020715B2 Protocol stack for linking storage area networks over an existing LAN, MAN, or WAN 有权
标题翻译：用于通过现有LAN，MAN或WAN链接存储区域网络的协议栈
公开(公告)号：US07020715B2
公开(公告)日：2006-03-28
申请号：US09934977
申请日：2001-08-21
申请人： Srinivasan Venkataraman , Ramkumar Jayam , Anil Kapatkar , Sivakumar Munnangi
发明人： Srinivasan Venkataraman , Ramkumar Jayam , Anil Kapatkar , Sivakumar Munnangi
IPC分类号： G06F15/16
CPC分类号： H04L67/1097 , H04L67/1002 , H04L69/08 , H04L69/329
摘要： The present invention provides for a method and protocol for high bandwidth, low-latency and reliable transfer of variable length FC Frames over the Gigabit Ethernet.
摘要翻译：本发明提供了通过千兆以太网进行可变长度FC帧的高带宽，低延迟和可靠传输的方法和协议。

10. 发明授权

US06976782B1 Methods and apparatus for in situ substrate temperature monitoring 有权
标题翻译：用于原位底物温度监测的方法和装置
公开(公告)号：US06976782B1
公开(公告)日：2005-12-20
申请号：US10720839
申请日：2003-11-24
申请人： Robert J. Steger
发明人： Robert J. Steger
IPC分类号： G01J5/00 , G01K15/00 , H01L20060101
CPC分类号： G01J5/0003 , G01J5/0007
摘要： In a plasma processing system, a method of determining the temperature of a substrate is disclosed. The method includes positioning the substrate on a substrate support structure, wherein the substrate support structure includes a chuck. The method further includes creating a temperature calibration curve for the substrate, the temperature calibration curve being created by measuring at least a first substrate temperature with an electromagnetic measuring device, and measuring a first chuck temperature with a physical measuring device during a first isothermal state. The method also includes employing a measurement from the electromagnetic measurement device and the temperature calibration curve to determine a temperature of the substrate during plasma processing.
摘要翻译：在等离子体处理系统中，公开了一种确定衬底温度的方法。该方法包括将衬底定位在衬底支撑结构上，其中衬底支撑结构包括卡盘。该方法进一步包括为衬底创建温度校准曲线，通过用电磁测量装置测量至少第一衬底温度并在第一等温状态下用物理测量装置测量第一夹具温度来产生温度校准曲线。该方法还包括采用来自电磁测量装置和温度校准曲线的测量来确定等离子体处理期间的衬底的温度。

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