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1. 发明授权

US07608933B2 Method and structure for kinetic energy based generator for portable electronic devices 有权
标题翻译：用于便携式电子设备的基于动能的发电机的方法和结构
公开(公告)号：US07608933B2
公开(公告)日：2009-10-27
申请号：US11555101
申请日：2006-10-31
申请人： Xiao Yang
发明人： Xiao Yang
IPC分类号： H02K7/18 , H02K7/10 , F02B63/04
CPC分类号： H02K7/1853
摘要： An asymmetric flywheel is coupled to an input gear that is attached to a lever or alike. The input gear and flywheel gear are engaged as the user rotates the lever. As a result, the flywheel spins and electricity is generated by the micro electromagnetic generator. When there is no direct user manual input, the input gear and the flywheel gear are disengaged. The flywheel is an unbalanced pivoted mass that rotates with inertial forces from physical accelerations by user's movement and gravitational forces, similar to a self-winding mechanism automatic watch. AC electricity is generated as a result of the flywheel's movement.
摘要翻译：不对称的飞轮耦合到连接到杠杆或类似物的输入齿轮。当使用者旋转杠杆时，输入齿轮和飞轮齿轮接合。结果，飞轮旋转，微电磁发电机产生电力。当没有直接的用户手册输入时，输入齿轮和飞轮齿轮脱开。飞轮是一种不平衡的枢转质量，它通过用户的运动和重力的物理加速度的惯性力旋转，类似于自动上链机构自动手表。由于飞轮的运动而产生交流电。

2. 发明申请

US20070105320A1 Method and Structure of Multi-Surface Transistor Device 审中-公开
标题翻译：多面晶体管器件的方法与结构
公开(公告)号：US20070105320A1
公开(公告)日：2007-05-10
申请号：US11469329
申请日：2006-08-31
申请人： Xiao (Charles) Yang
发明人： Xiao (Charles) Yang
IPC分类号： H01L21/336 , H01L29/76
CPC分类号： H01L21/8221 , H01L21/76275 , H01L21/84 , H01L27/0688 , H01L27/1203 , H01L29/78648
摘要： A double gated MOS transistor structure and method of manufacture. Fabricating transistor devices on both top and bottom surfaces of the silicon layer creates vertical double gate transistor devices. The presented double gate transistor devices do not require alignment of the top and bottom gates. In addition to double gate transistor devices, it is possible to fabricate two layers of independent transistor devices using a similar process. The two layers transistor devices can be interconnected by short VIAs thru the thin silicon layer.
摘要翻译：双门控MOS晶体管结构及其制造方法。在硅层的顶表面和底表面上制造晶体管器件产生垂直双栅极晶体管器件。所提出的双栅极晶体管器件不需要顶部和底部栅极的对准。除了双栅极晶体管器件之外，可以使用类似的工艺来制造两层独立的晶体管器件。两层晶体管器件可以通过短VIA通过薄硅层互连。

3. 发明申请

US20070224548A1 METHOD AND APPARATUS FOR PATTERNING MICRO AND NANO STRUCTURES USING A MASK-LESS PROCESS 有权
标题翻译：使用无掩模过程绘制微米和纳米结构的方法和装置
公开(公告)号：US20070224548A1
公开(公告)日：2007-09-27
申请号：US11558441
申请日：2006-11-09
申请人： Xiao (Charles) Yang
发明人： Xiao (Charles) Yang
IPC分类号： C23C16/00
CPC分类号： G03F7/203 , B82Y10/00 , B82Y40/00 , G03F7/70383 , G03F7/70391 , H01J37/3174 , H01J2237/20228 , H01J2237/20235
摘要： According to a specific embodiment of the present invention, a mask-less lithography method and apparatus is provided. The apparatus includes an integrated write head on a slider with an air bearing that creates a lift force that allows that write head to fly over a spinning wafer substrate in nanometer distance without physical contact. The short distance between the write head and substrate prevents the light from diffracting. As a result, micro and nanometer structures can be patterned without being limited by light diffraction in conventional lithography methods.
摘要翻译：根据本发明的具体实施例，提供了一种无掩模光刻方法和装置。该装置包括具有空气轴承的滑块上的集成写头，其产生提升力，该提升力允许写头在纳米距离上飞过旋转晶片衬底而没有物理接触。写头和基板之间的短距离防止光线衍射。结果，微型和纳米结构可以被图案化，而不受传统光刻方法中的光衍射的限制。

4. 发明申请

US20070103009A1 Method and Structure for Integrated Energy Storage Device 审中-公开
标题翻译：集成储能装置的方法与结构
公开(公告)号：US20070103009A1
公开(公告)日：2007-05-10
申请号：US11554515
申请日：2006-10-30
申请人： Xiao (Charles) Yang
发明人： Xiao (Charles) Yang
IPC分类号： H02K5/00 , H02K7/02 , H02K21/22
CPC分类号： H02K7/025 , H02N1/004 , H02N13/00 , Y02E60/16
摘要： The present invention relates to a method and device for fabricating an integrated flywheel device using semiconductor materials and IC/MEMS processes. Single crystal silicon has high energy storage/weight ratio and no defects. Single crystal silicon flywheel can operate at much higher speed than conventional flywheel. The integrated silicon flywheel is operated by electrostatic motor and supported by electrostatic bearings, which consume much less power than magnetic actuation in conventional flywheel energy storage systems. The silicon flywheel device is fabricated by IC and MEMS processes to achieve high device integration and low manufacturing cost. For the integrated silicon flywheel, high vacuum can be achieved using hermetic bonding methods such as eutectic, fusion, glass frit, SOG, anodic, covalent, etc. To achieve larger energy capacity, an array of silicon flywheels is fabricated on one substrate. Multiple layers of flywheel energy storage devices are stacked.
摘要翻译：本发明涉及使用半导体材料和IC / MEMS工艺制造集成飞轮装置的方法和装置。单晶硅具有高能量存储/重量比，无缺陷。单晶硅飞轮可以以比传统飞轮高得多的速度运行。集成的硅飞轮由静电电动机驱动并由静电轴承支撑，在传统的飞轮储能系统中消耗的功率远低于磁力驱动。硅飞轮器件由IC和MEMS工艺制造，以实现高器件集成度和低制造成本。对于集成硅飞轮，可以使用诸如共晶，熔合，玻璃料，SOG，阳极，共价等的密封接合方法实现高真空。为了实现更大的能量容量，在一个基板上制造了硅飞轮阵列。堆叠多层飞轮储能装置。

5. 发明申请

US20100007238A1 METHOD AND STRUCTURE FOR AN OUT-OF-PLANE COMPLIANT MICRO ACTUATOR 有权
标题翻译：非平面配合微致动器的方法和结构
公开(公告)号：US20100007238A1
公开(公告)日：2010-01-14
申请号：US12353969
申请日：2009-01-15
申请人： XIAO (CHARLES) YANG
发明人： XIAO (CHARLES) YANG
IPC分类号： H02N11/00
CPC分类号： H02N1/004
摘要： This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.
摘要翻译：本发明一般涉及制造物体。更具体地说，本发明涉及一种用于制造面外兼容微型致动器的方法和结构。柔性致动器在垂直和水平平面中具有大的致动范围，而不与基板物理接触。由于边缘场致动，顺应性致动器没有拉入现象，与传统的平行板静电致动器相比，通过“拉伸”运动需要低电压。该方法和装置可以应用于微致动器以及其他装置，例如微机电传感器，检测器，流体和光学系统。

6. 发明申请

US20100171153A1 METHOD AND STRUCTURE OF MONOLITHICALLY INTEGRATED PRESSURE SENSOR USING IC FOUNDRY-COMPATIBLE PROCESSES 有权
标题翻译：使用集成电路兼容过程的单组合压力传感器的方法和结构
公开(公告)号：US20100171153A1
公开(公告)日：2010-07-08
申请号：US12499027
申请日：2009-07-07
申请人： Xiao (Charles) Yang
发明人： Xiao (Charles) Yang
IPC分类号： H01L29/84 , H01L21/30
CPC分类号： G01L9/0073 , B81B2201/0264 , B81C1/00246 , B81C2201/0192 , G01L9/0042 , G01L9/0054
摘要： A monolithically integrated MEMS pressure sensor and CMOS substrate using IC-Foundry compatible processes. The CMOS substrate is completed first using standard IC processes. A diaphragm is then added on top of the CMOS. In one embodiment, the diaphragm is made of deposited thin films with stress relief corrugated structure. In another embodiment, the diaphragm is made of a single crystal silicon material that is layer transferred to the CMOS substrate. In an embodiment, the integrated pressure sensor is encapsulated by a thick insulating layer at the wafer level. The monolithically integrated pressure sensor that adopts IC foundry-compatible processes yields the highest performance, smallest form factor, and lowest cost.
摘要翻译：使用IC-Foundry兼容工艺的单片集成MEMS压力传感器和CMOS衬底。 CMOS基板首先使用标准IC工艺完成。然后将膜片添加到CMOS的顶部。在一个实施例中，隔膜由具有应力消除波纹结构的沉积薄膜制成。在另一个实施例中，膜片由层转移到CMOS衬底的单晶硅材料制成。在一个实施例中，集成压力传感器由晶圆级的厚绝缘层封装。采用IC代工兼容工艺的单片式压力传感器产生最高性能，最小的外形尺寸和最低的成本。

7. 发明申请

US20100075481A1 METHOD AND STRUCTURE OF MONOLITHICALLY INTEGRATED IC-MEMS OSCILLATOR USING IC FOUNDRY-COMPATIBLE PROCESSES 审中-公开
标题翻译：使用集成电路兼容过程的单个集成IC-MEMS振荡器的方法和结构
公开(公告)号：US20100075481A1
公开(公告)日：2010-03-25
申请号：US12499029
申请日：2009-07-07
申请人： Xiao (Charles) Yang
发明人： Xiao (Charles) Yang
IPC分类号： H01L21/30
CPC分类号： B81C1/00246
摘要： The present invention relates to integrating an inertial mechanical device on top of an IC substrate monolithically using IC-foundry compatible processes. The IC substrate is completed first using standard IC processes. A thick silicon layer is added on top of the IC substrate. A subsequent patterning step defines a mechanical structure for inertial sensing. Finally, the mechanical device is encapsulated by a thick insulating layer at the wafer level. Compared with the incumbent bulk or surface micromachined MEMS inertial sensors, vertically monolithically integrated inertial sensors provided by embodiments of the present invention have one or more of the following advantages: smaller chip size, lower parasitics, higher sensitivity, lower power, and lower cost.
摘要翻译：本发明涉及使用IC代工厂兼容的工艺将惯性机械装置整体集成在IC基板上。首先使用标准IC工艺完成IC基板。将厚硅层添加到IC基板的顶部。随后的图案化步骤限定了用于惯性感测的机械结构。最后，机械装置由晶圆级的厚绝缘层封装。与现有的本体或表面微加工MEMS惯性传感器相比，本发明实施例提供的垂直单片集成惯性传感器具有以下一个或多个优点：较小的芯片尺寸，较低的寄生效应，更高的灵敏度，更低的功率和更低的成本。

8. 发明申请

US20070103264A1 Method and Structure for an Out-of-Plane Compliant Micro Actuator 有权
标题翻译：超平面微型执行器的方法和结构
公开(公告)号：US20070103264A1
公开(公告)日：2007-05-10
申请号：US11555063
申请日：2006-10-31
申请人： Xiao Yang
发明人： Xiao Yang
IPC分类号： H01F7/08
CPC分类号： H02N1/004
摘要： This present invention relates generally to manufacturing objects. More particularly, the invention relates to a method and structure for fabricating an out-of-plane compliant micro actuator. The compliant actuator has large actuation range in both vertical and horizontal planes without physical contact to the substrate. Due to fringe field actuation, the compliant actuator has no pull-in phenomenon and requires low voltage by a ‘zipping’ movement compared to conventional parallel plate electrostatic actuators. The method and device can be applied to micro actuators as well as other devices, for example, micro-electromechanical sensors, detectors, fluidic, and optical systems.
摘要翻译：本发明一般涉及制造物体。更具体地说，本发明涉及一种用于制造面外兼容微型致动器的方法和结构。柔性致动器在垂直和水平平面中具有大的致动范围，而不与基板物理接触。由于边缘场致动，顺应性致动器没有拉入现象，与传统的平行板静电致动器相比，通过“拉伸”运动需要低电压。该方法和装置可以应用于微致动器以及其他装置，例如微机电传感器，检测器，流体和光学系统。

9. 发明申请

US20070102928A1 Method and Structure for Kinetic Energy Based Generator for Portable Electronic Devices 有权
标题翻译：便携式电子设备动能发电机的方法与结构
公开(公告)号：US20070102928A1
公开(公告)日：2007-05-10
申请号：US11555101
申请日：2006-10-31
申请人： Xiao Yang
发明人： Xiao Yang
IPC分类号： H02K7/18 , H02K7/10 , F02B63/04
CPC分类号： H02K7/1853
摘要： An asymmetric flywheel is coupled to an input gear that is attached to a lever or alike. The input gear and flywheel gear are engaged as the user rotates the lever. As a result, the flywheel spins and electricity is generated by the micro electromagnetic generator. When there is no direct user manual input, the input gear and the flywheel gear are disengaged. The flywheel is an unbalanced pivoted mass that rotates with inertial forces from physical accelerations by user's movement and gravitational forces, similar to a self-winding mechanism automatic watch. AC electricity is generated as a result of the flywheel's movement.
摘要翻译：不对称的飞轮耦合到连接到杠杆或类似物的输入齿轮。当使用者旋转杠杆时，输入齿轮和飞轮齿轮接合。结果，飞轮旋转，微电磁发电机产生电力。当没有直接的用户手册输入时，输入齿轮和飞轮齿轮脱开。飞轮是一种不平衡的枢转质量，它通过用户的运动和重力的物理加速度的惯性力旋转，类似于自动上链机构自动手表。由于飞轮的运动而产生交流电。

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