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1. 发明授权

US07841820B2 Universal modular wafer transport system 有权
标题翻译：通用模块化晶圆输送系统
公开(公告)号：US07841820B2
公开(公告)日：2010-11-30
申请号：US11938236
申请日：2007-11-09
申请人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
发明人： Anthony C. Bonora , Richard H. Gould , Roger G. Hine , Michael Krolak , Jerry A. Speasl
IPC分类号： B65G54/02
CPC分类号： H01L21/67778 , H01L21/67766 , H01L21/67775 , H01L21/68707 , Y10S414/139
摘要： The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要翻译：本发明是一种晶片传送系统，其在隔离环境中的室之间输送各个晶片。在一个实施例中，晶片由在运输箱内行进的晶片梭运送。运输箱的内部与周围的晶片制造设备的大气条件隔离。因此，单个晶片可以在整个晶片制造设备中运输，而不必为整个设备保持洁净室环境。晶片梭可以通过各种技术来推动，例如但不限于磁悬浮或空气轴承。晶片梭可能同时传送多于一个晶片。运输箱的内部也可以在真空下，充满气体，或经过过滤的空气。

2. 发明授权

US07737567B2 Method and apparatus for wafer marking 有权
标题翻译：晶圆标记方法及装置
公开(公告)号：US07737567B2
公开(公告)日：2010-06-15
申请号：US12143197
申请日：2008-06-20
申请人： Anthony C. Bonora , Raymond S. Martin , Michael Krolak
发明人： Anthony C. Bonora , Raymond S. Martin , Michael Krolak
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译：提供半导体衬底。衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。还提供了系统，运输和标记的方法以及用于读取基板标记的装置。

3. 发明申请

US20120000816A1 Port Door Positioning Apparatus and Associated Methods 有权
标题翻译：端口门定位装置及相关方法
公开(公告)号：US20120000816A1
公开(公告)日：2012-01-05
申请号：US12828236
申请日：2010-06-30
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B65D85/30 , E05F15/10 , E06B3/32 , E05F11/00
CPC分类号： H01L21/67772 , E06B3/50 , E06B3/5009 , E06B5/00 , E06B7/32 , H01L21/67763 , H01L21/67766 , Y10S414/135
摘要： A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.
摘要翻译：装载端口具有端口门和具有开口的框架，端口门通过该开口与用于保持半导体工件的容器的容器门相连接。在一个实施例中，可移动关闭机构连接到端口门并且被限定为可相对于端口门和框架以受控的方式移动。在该实施例中，固定的封闭机构设置在靠近开口的框架上。在另一个实施例中，固定的闭合机构连接到端口门，并且可移动的闭合机构设置在靠近开口的框架上。在两个实施例中，可动闭合机构限定为与静止闭合机构接合，使得可动闭合机构与静止闭合机构接合的运动在端口门和容器门之间施加关闭力。

4. 发明申请

US20100290873A1 INTEGRATED SYSTEMS FOR INTERFACING WITH SUBSTRATE CONTAINER STORAGE SYSTEMS 有权
标题翻译：用于与基底容器存储系统接口的集成系统
公开(公告)号：US20100290873A1
公开(公告)日：2010-11-18
申请号：US12780846
申请日：2010-05-14
申请人： Anthony C. Bonora , Richard H. Gould , Michael Krolak
发明人： Anthony C. Bonora , Richard H. Gould , Michael Krolak
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67766 , B65G2201/0297 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop. Example configurations of the storage system can include one or more of stationary shelves, extended horizontal tracks for hoists, conveyors at the level of the storage system assembly, and a manual loading station. The hoist, with an extended horizontal track can therefore interface with the manual loading station.
摘要翻译：公开了一种用于操作存储系统的存储系统和方法。存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。存储系统本地存储一个或多个基板容器。存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。存储系统的示例配置可以包括一个或多个固定架，用于起重机的延伸水平轨道，存储系统组件的水平面处的输送机以及手动装载站。具有延伸水平轨道的起重机因此可与手动装载站接口。

5. 发明申请

US20050194096A1 Method and apparatus for semiconductor processing 审中-公开
标题翻译：用于半导体处理的方法和装置
公开(公告)号：US20050194096A1
公开(公告)日：2005-09-08
申请号：US10927703
申请日：2004-08-27
申请人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： J.B. Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： C23F1/00 , H01L20060101 , H01L21/00 , H01L21/677
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

6. 发明申请

US20120301260A1 Horizontal Displacement Mechanism for Cleanroom Material Transfer Systems 有权
标题翻译：无尘室物料输送系统水平位移机构
公开(公告)号：US20120301260A1
公开(公告)日：2012-11-29
申请号：US13457278
申请日：2012-04-26
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： F16H25/12 , B23P11/00 , H01L21/677
CPC分类号： H01L21/67775 , F16H25/186 , H01L21/6773 , Y10T29/49826 , Y10T74/18312
摘要： A spiral cam has a tubular shaped portion defined by an interior cavity and an exterior surface that includes a cam contour. A linear slide assembly having a length defined along a rotational axis is defined to slide lengthwise into the interior cavity of the spiral cam. The linear slide assembly allows for movement of the spiral cam along the rotational axis and prevents rotation of the spiral cam relative to the linear slide assembly. A cam roller is fixed at a position proximate to the exterior surface of the spiral cam. The cam roller is disposed separate from the linear slide assembly and within the cam contour of the spiral cam. The cam roller engages the cam contour to move of the spiral cam along the rotational axis when the linear slide assembly and spiral cam are rotated in unison about the rotational axis relative to the cam roller.
摘要翻译：螺旋凸轮具有由内腔和包括凸轮轮廓的外表面限定的管状部分。具有沿着旋转轴线限定的长度的直线滑动组件被限定为纵向滑动到螺旋凸轮的内部空腔中。线性滑动组件允许螺旋凸轮沿着旋转轴线移动并且防止螺旋凸轮相对于线性滑块组件的旋转。凸轮辊固定在靠近螺旋凸轮的外表面的位置。凸轮辊与线性滑动组件分离并且在螺旋凸轮的凸轮轮廓内。当线性滑块组件和螺旋凸轮围绕旋转轴线相对于凸轮辊一致地旋转时，凸轮滚子接合凸轮轮廓以沿着旋转轴线移动螺旋凸轮。

7. 发明申请

US20100290872A1 SUBSTRATE CONTAINER STORAGE SYSTEM 有权
标题翻译：基板容器存储系统
公开(公告)号：US20100290872A1
公开(公告)日：2010-11-18
申请号：US12780761
申请日：2010-05-14
申请人： Anthony C. Bonora , Richard H. Gould , Michael Krolak
发明人： Anthony C. Bonora , Richard H. Gould , Michael Krolak
IPC分类号： B65G1/133 , B65G1/00 , B65G1/06 , H01L21/673 , H01L21/677
CPC分类号： H01L21/6773 , H01L21/67769 , Y10S414/14
摘要： A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
摘要翻译：公开了一种用于操作存储系统的存储系统和方法。存储系统包括存储系统组件，该存储系统组件位于高于用于装载和卸载待处理衬底的工具的高度的高度。存储系统本地存储一个或多个基板容器。存储系统组件包括多个存放架，并且多个存放架中的每一个具有用于支撑容器的具有搁板特征的搁板。多个存放架中的每一个都联接到链条以实现水平移动，并且每个存储架都进一步联接到轨道以使得能够引导到一个或多个位置。电动机联接到用于移动链条的驱动链轮，使得多个存放架中的每一个沿着轨道一起移动到一个或多个位置。轨道具有至少一些是线性的部分，并且一些部分是非线性的，并且这些部分被布置成循环。

8. 发明授权

US07748944B2 Method and apparatus for semiconductor processing 有权
标题翻译：用于半导体处理的方法和装置
公开(公告)号：US07748944B2
公开(公告)日：2010-07-06
申请号：US11929357
申请日：2007-10-30
申请人： JB Price , Jed Keller , Laurence Dulmage , David Cheng
发明人： JB Price , Jed Keller , Laurence Dulmage , David Cheng
IPC分类号： B65G49/07
CPC分类号： H01L21/67178 , H01L21/67161 , H01L21/67167 , H01L21/67742 , H01L21/67766 , Y10S414/139
摘要： A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
摘要翻译：公开了一种用于半导体处理的方法和装置。在一个实施例中，一种在群集工具内传送晶片的方法包括将晶片放置在真空封壳的第一段中，真空外壳附接到处理室和工厂接口。使用垂直传送机构将晶片传送到真空外壳的第二部分，其中第二部分在第一部分之上或之下。

9. 发明申请

US20140068753A1 Access Arbitration Module and System for Semiconductor Fabrication Equipment and Methods for Using and Operating the Same 有权
标题翻译：半导体制造设备的访问仲裁模块和系统及其使用和操作方法
公开(公告)号：US20140068753A1
公开(公告)日：2014-03-06
申请号：US13605941
申请日：2012-09-06
申请人： Pablo Gonzalez , Gary Roy Watts
发明人： Pablo Gonzalez , Gary Roy Watts
IPC分类号： G06F21/44
CPC分类号： G05B19/4189 , G05B2219/45031 , G06F21/44 , Y02P90/14 , Y02P90/18 , Y02P90/28
摘要： An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.
摘要翻译：访问仲裁模块包括用于与多个活动组件通信的多个活动组件通信端口，并且包括用于与被动组件进行通信的无源组件通信端口。访问仲裁模块还包括被定义为控制多个有源组件通信端口和无源组件通信端口中的每一个之间的接入通信协议信号的传输的交换逻辑，使得多个有源组件通信端口中的授权的一个连接在在给定时间与无源组件通信端口进行通信，并且使得在给定时间，防止多个活动组件通信端口中的未授权的有源组件通信端口与无源组件通信端口通信。

10. 发明申请

US20120321423A1 Dynamic Storage and Transfer System Integrated with Autonomous Guided/Roving Vehicle 有权
标题翻译：动态存储和转移系统与自主引导/流动车集成
公开(公告)号：US20120321423A1
公开(公告)日：2012-12-20
申请号：US13475723
申请日：2012-05-18
申请人： Robert B. MacKnight , Anthony C. Bonora
发明人： Robert B. MacKnight , Anthony C. Bonora
IPC分类号： B66F9/12 , B65G1/06 , B66F9/06
CPC分类号： H01L21/67276 , B65G2201/0297 , H01L21/67724 , H01L21/67736
摘要： A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.
摘要翻译：工件容器储存和处理系统包括基座，连接到基座的多个轮子以及连接到基座的容器处理系统。轮子提供底座的运动。容器处理系统被定义成相对于彼此保持至少两个容器的垂直方向。容器处理系统被定义为提供至少两个容器相对于底座一致的受控垂直行进。此外，容器处理系统被定义为提供所述至少两个容器中的每一个相对于底座的受控和独立的水平行进。

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