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    • 9. 发明申请
    • PARTICLE COLLECTOR SYSTEM AND DUST COLLECTION METHOD
    • 颗粒收集系统和粉尘收集方法
    • US20160207051A1
    • 2016-07-21
    • US14915335
    • 2014-08-02
    • CREATIVE TECHNOLOGY CORPORATION
    • Yoshiaki TatsumiYu SaitoToshifumi Sugawara
    • B03C3/47B03C3/49B03C3/68
    • B03C3/47B03C3/06B03C3/41B03C3/49B03C3/68B03C2201/24B03C2201/32
    • Provided are a particle collector system and a dust collection method whereby particles can be almost completely removed without periodic performance of a particle removal operation. A particle collector system (1-1) is provided with a dust collection unit (2), a power source unit (3), and a capacitance measurement unit (4). The dust collection unit (2) comprises first and second electrodes (21, 22) a second electrode (22), and a dielectric body (20) covering the electrodes. The power source unit (3) is a component for supplying power source voltage to the first and second electrodes (21, 22). The capacitance measurement unit (1), which is a component for measuring the capacitance of the dust collection unit (2), measures the capacitance between the first and second electrodes (21, 22).
    • 提供了一种颗粒收集器系统和集尘方法,其中可以几乎完全去除颗粒,而不需要定期执行颗粒去除操作。 颗粒收集器系统(1-1)设置有灰尘收集单元(2),电源单元(3)和电容测量单元(4)。 集尘单元(2)包括第一和第二电极(21,22),第二电极(22)和覆盖电极的电介质体(20)。 电源单元(3)是用于向第一和第二电极(21,22)提供电源电压的组件。 作为用于测量灰尘收集单元(2)的电容的分量的电容测量单元(1)测量第一和第二电极(21,22)之间的电容。
    • 10. 发明申请
    • ELECTROSTATIC CHUCK AND POWER SUPPLY SYSTEM
    • 静电卡盘和电源系统
    • US20150295521A1
    • 2015-10-15
    • US14441957
    • 2013-09-24
    • CREATIVE TECHNOLOGY CORPORATION
    • Yoshiaki TatsumiToshifumi Sugawara
    • H02N13/00
    • H02N13/00H01L21/6833
    • In an electrostatic chuck and a power supply system, high-voltage drive is performed without generating electrical discharge even in a vacuum atmosphere, and a structure of the power supply system for the electrostatic chuck is simplified. This power supply system includes: an electrostatic chuck (2) having a booster circuit (3); and an electric contact mechanism (4). Terminals (31a, 32a) of the booster circuit (3) are exposed to the outside. The terminals (31b, 32b) are connected to an attraction electrode (23). The electric contact mechanism (4) is configured from rails (41, 42), and flexible contacts (43, 44) in contact with the rails. The rails (41, 42) are connected to an external power supply (40), and the flexible contacts (43, 44) are provided on conductive plates (45, 46) of the electrostatic chuck (2). The conductive plates (45, 46) are connected to the terminals (31a, 32a) of the booster circuit (3).
    • 在静电卡盘和电源系统中,即使在真空环境中也不产生放电而进行高压驱动,并且简化了用于静电卡盘的电源系统的结构。 该电源系统包括:具有升压电路(3)的静电卡盘(2); 和电接触机构(4)。 升压电路(3)的端子(31a,32a)暴露在外部。 端子(31b,32b)与吸引电极(23)连接。 电接触机构(4)由轨道(41,42)和与轨道接触的柔性触点(43,44)构成。 轨道(41,42)连接到外部电源(40),柔性触点(43,44)设置在静电卡盘(2)的导电板(45,46)上。 导电板(45,46)连接到升压电路(3)的端子(31a,32a)。