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81. 发明授权

US08430234B2 Solar cell transport 失效
标题翻译：太阳能电池运输
公开(公告)号：US08430234B2
公开(公告)日：2013-04-30
申请号：US13625992
申请日：2012-09-25
申请人： KLA-Tencor Corporation
发明人： Carolus Truyens
IPC分类号： B65G23/00 , B65G25/00
CPC分类号： H01L21/67721 , H01L21/67706
摘要： A transport system for substrates, the transport system having at least one belt for receiving the substrates thereon, retainers disposed at spaced distances on the belt, the spaced distances being at least as wide as a width of the substrates, the retainers rising to an elevation above the belt that is sufficient to stop the substrates from sliding when the substrates bump against the retainers, a motor for moving the belt, and a motion controller for providing acceleration and deceleration of the belt, thereby aligning the substrates against the retainers through successive acceleration and deceleration cycles.
摘要翻译：用于基底的输送系统，所述输送系统具有用于在其上接收基底的至少一个带，保持器，其间隔距离设置在所述带上，所述间隔距离至少与所述基底的宽度一样宽，所述保持器升高到高度在足够的位置上，当基板撞击保持器时，足以阻止基板滑动，用于移动带的马达和用于提供带的加速和减速的运动控制器，从而通过连续加速将基板抵靠保持器对准和减速循环。

82. 发明授权

US08428448B2 Walking beam type heat treatment apparatus 失效
标题翻译：步行式热处理装置
公开(公告)号：US08428448B2
公开(公告)日：2013-04-23
申请号：US12588587
申请日：2009-10-20
申请人： Takashi Iwata , Yoshizumi Ito , Katsuhiro Kano
发明人： Takashi Iwata , Yoshizumi Ito , Katsuhiro Kano
IPC分类号： A21B2/00
CPC分类号： B65G25/02 , F27B17/0025 , H01L21/67115 , H01L21/67706 , H01L21/6776 , H01L31/1864 , Y02P70/521
摘要： A walking beam type heat treatment apparatus including a heating furnace having a heating body to heat a substrate by radiation, a pair of first beams that are rod-like and provided in the heating furnace and a second beam disposed between the pair of the first beams, one of the pair of the first beams and the second beam relatively moving alternately in longitudinal and vertical directions repeatedly to the other of the pair of the first beams and the second beam, to cause to deliver and receive the substrate between the pair of the first beams and the second beam, and accordingly, to convey the substrate through the heating furnace, includes a side edge support protrusion that protrudes from each of the pair of the first beams such that the side edge support protrusion can horizontally support the substrate in abutting contact with a side edge of the substrate; and a front edge support protrusion and a rear edge support protrusion that protrude from the second beam such that the front edge support protrusion and the rear edge support protrusion can horizontally support the substrate in abutting contact with a front edge and a rear edge of the substrate.
摘要翻译：一种步进梁式热处理装置，包括：加热炉，具有加热体，用于通过辐射加热基板;一对第一梁，其杆状并设置在加热炉中，第二梁设置在所述一对第一梁之间所述一对第一光束和所述第二光束中的一个在所述一对第一光束和所述第二光束中反复相对于所述一对第一光束和所述第二光束中的另一个反复相对地在纵向和垂直方向上交替移动，从而在所述一对第一梁和第二梁，因此，通过加热炉输送基板，包括从所述一对第一梁中的每一个突出的侧边缘支撑突起，使得侧边缘支撑突起能够将基板水平地支撑在邻接与基板的侧边缘接触; 以及从所述第二梁突出的前边缘支撑突起和后边缘支撑突起，使得所述前边缘支撑突起和所述后边缘支撑突起可水平地支撑所述基板，所述基板与所述基板的前边缘和后边缘抵接。

83. 发明申请

US20130085002A1 Wafer transport system 有权
标题翻译：晶圆输送系统
公开(公告)号：US20130085002A1
公开(公告)日：2013-04-04
申请号：US13573475
申请日：2012-09-17
申请人： Persimmon Technologies Corporation
发明人： Martin Hosek
IPC分类号： F16D3/00
CPC分类号： H01L21/67709 , F16D3/00 , H01L21/67706 , Y10T464/30
摘要： A transport system includes, in a first environment, a driving screw having threads with a thread pitch. In a second environment, a driven member has a magnetic coupling with a driven member pitch substantially corresponding to the thread pitch. The magnetic coupling is coupled to a portion of threads and rotation of the driving screw displaces the magnetic coupling with respect to the driving screw.
摘要翻译：传送系统在第一环境中包括具有螺距的螺纹的驱动螺杆。在第二环境中，从动构件具有基本对应于螺距的从动构件间距的磁耦合。磁耦合器连接到螺纹的一部分并且驱动螺杆的旋转使磁耦合器相对于驱动螺杆移位。

84. 发明申请

US20130056333A1 TRANSPORTING DEVICE, IN PARTICULAR FOR TRANSPORTING SHEET-LIKE SUBSTRATES THROUGH A COATING INSTALLATION 有权
标题翻译：运输设备，特别是通过涂装安装运输类似基板的运输设备
公开(公告)号：US20130056333A1
公开(公告)日：2013-03-07
申请号：US13606050
申请日：2012-09-07
申请人： Hubertus Von Der Waydbrink , Georg Laimer , Siegfried Scheibe , Ricky C. Powell , James Ernest Hinkle , James B. Foote
发明人： Hubertus Von Der Waydbrink , Georg Laimer , Siegfried Scheibe , Ricky C. Powell , James Ernest Hinkle , James B. Foote
IPC分类号： B65G13/06 , B65G13/00
CPC分类号： H01L21/67706 , C23C14/56 , C23C16/54 , H01L21/6776
摘要： A transport device and method of transporting a substrate using a rotatable shaft and baffles may be used to extend cleaning intervals for the transport device and reduce deposition of a vapour deposition material upon the transport device.
摘要翻译：可以使用使用可旋转的轴和挡板输送基板的输送装置和方法来延长输送装置的清洁间隔并减少气相沉积材料在输送装置上的沉积。

85. 发明授权

US08382965B2 Tools and methods for mounting transport rails in a substrate processing system 有权
标题翻译：将输送轨道安装在基板处理系统中的工具和方法
公开(公告)号：US08382965B2
公开(公告)日：2013-02-26
申请号：US12263369
申请日：2008-10-31
申请人： Stuart Scollay
发明人： Stuart Scollay
IPC分类号： C23C14/00 , C25B11/00 , C25B13/00
CPC分类号： H01L21/68 , H01L21/67126 , H01L21/67706 , Y10T29/49895
摘要： Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.
摘要翻译：描述了用于将输送轨道安装和对准基板处理系统的处理室的装置和方法。对准特征内置于运输轨道中，并且相应的对准特征被添加到分离处理室的阀门。对准特征可以是针槽布置。

86. 发明授权

US08348588B2 Article transport facility 有权
标题翻译：物品运输设施
公开(公告)号：US08348588B2
公开(公告)日：2013-01-08
申请号：US11983768
申请日：2007-11-09
申请人： Mitsuru Yoshida , Yoshitaka Inui
发明人： Mitsuru Yoshida , Yoshitaka Inui
IPC分类号： B66C1/02
CPC分类号： B65G37/02 , B65G2201/0297 , H01L21/67706 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67775 , H01L21/68707
摘要： An article transport facility includes an article transporting mobile body configured to move along a path and having an article holder; an article support for storing an article, the article support is configured to be moved between an article transfer position and an article storage position; a lock device provided on the article support to be switchable between a locking state for locking the article support in the article storage position, and an unlocking position for releasing the locking state; and an operating device provided on the mobile body for moving the article support and switching the lock device.
摘要翻译：物品输送设备包括物品输送移动体，其构造成沿着路径移动并具有物品保持器; 用于存储物品的物品支撑件，所述物品支撑构造成在物品转移位置和物品存储位置之间移动; 设置在所述物品支撑件上以在用于将所述物品支撑件锁定在所述物品收纳位置的锁定状态之间切换的锁定装置和用于释放所述锁定状态的解锁位置; 以及设置在移动体上用于移动物品支撑并切换锁定装置的操作装置。

87. 发明申请

US20120298298A1 FLEXIBLE SUBSTRATE CONVEYING DEVICE 有权
标题翻译：柔性底板输送装置
公开(公告)号：US20120298298A1
公开(公告)日：2012-11-29
申请号：US13512231
申请日：2010-12-02
申请人： Masanori Nishizawa , Shoji Yokoyama , Takanori Yamada
发明人： Masanori Nishizawa , Shoji Yokoyama , Takanori Yamada
IPC分类号： B65H20/02 , B32B37/20
CPC分类号： B65H20/02 , B65H2301/323 , B65H2801/87 , H01L21/67706 , H01L21/67721 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
摘要翻译：输送装置具有用于输送柔性基板的基板输送装置，同时将柔性基板保持直立，柔性基板的宽度方向上的一个端部位于上侧; 和基板保持装置。基板保持装置具有一对夹持辊; 可旋转地支撑所述一对夹持辊的支撑机构; 传递机构，其传递力以与所述另一夹持辊压力接触所述夹持辊之一; 配置为调节所述一对夹持辊的压力接触力的第一驱动装置; 角度调节机构，其构造成相对于所述柔性基板的输送方向倾斜所述一对夹持辊; 以及第二驱动装置，其构造成调整所述一对夹持辊相对于柔性基板的输送方向的倾斜角度。

88. 发明申请

US20120234793A1 Method and Device for Treating a Substrate Surface of a Substrate 有权
标题翻译：用于处理基板的基板表面的方法和装置
公开(公告)号：US20120234793A1
公开(公告)日：2012-09-20
申请号：US13502648
申请日：2010-07-28
申请人： Christian Schmid
发明人： Christian Schmid
IPC分类号： B05C11/00 , B44C1/22
CPC分类号： H01L21/67706 , H01L21/67051 , H01L21/67086 , H01L21/6776
摘要： In a method for the treatment of a substrate surface of a flat substrate with a process medium at the substrate underside, the process medium has a removing or etching effect on the substrate surface. The substrates are wetted with the process medium from below in a manner lying horizontally. The upwardly facing substrate top side is wetted or covered with water or a corresponding protective liquid over a large area or over the whole area as protection against the process medium acting on the substrate top side.
摘要翻译：在基板底面用处理介质处理平坦基板的基板表面的方法中，处理介质对基板表面具有去除或蚀刻效果。用水平方式从下方用处理介质润湿基板。面向上的基板顶侧在大面积或整个区域上被润湿或覆盖有水或相应的保护液体，作为对作用在基板顶侧上的处理介质的保护。

89. 发明授权

US08256605B2 Holding means, device and method for transporting substrates, in particular printed circuit boards 有权
标题翻译：用于输送基板的保持装置，装置和方法，特别是印刷电路板
公开(公告)号：US08256605B2
公开(公告)日：2012-09-04
申请号：US12696654
申请日：2010-01-29
申请人： Laurent Nicolet
发明人： Laurent Nicolet
IPC分类号： B65G17/38
CPC分类号： H01L21/67706 , B65G49/064 , B65G2249/04 , H01L21/67057 , H01L21/67086 , H01L21/67721 , H05K13/0061
摘要： In order to transport printed circuit boards (30) through a processing system (12), printed circuit boards (30) lying one behind another can be connected by means of holding clips (22) to form a type of chain. The outer ends of the holding clips (22) are suspended on two spaced-apart transport chains (16) which provide for transport and mounting. The holding clips are formed in two parts with a lower holding part (22) and an upper holding part (40), between which a printed circuit board (30) is mounted.
摘要翻译：为了通过处理系统（12）传送印刷电路板（30），可以通过夹持夹（22）连接一个位于其后的印刷电路板（30），以形成一种链条。保持夹（22）的外端悬挂在提供运输和安装的两个间隔开的输送链（16）上。保持夹在下部保持部分（22）和上部保持部分（40）的两部分中形成，其间安装有印刷电路板（30）。

90. 发明授权

US08197172B2 Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 有权
标题翻译：基于垂直转盘和天花板升降机的组合的半导体制造的自动材料处理系统
公开(公告)号：US08197172B2
公开(公告)日：2012-06-12
申请号：US12724194
申请日：2010-03-15
申请人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
发明人： Brian J. Doherty , Thomas R. Mariano , Robert P. Sullivan
IPC分类号： H01L21/00 , G06F19/00
CPC分类号： H01L21/67733 , B65G1/0457 , H01L21/677 , H01L21/67706 , H01L21/67736 , H01L21/67769
摘要： A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle. The storage unit is at least partially open to allow the movable shelf to move to the second position, thereby allowing the overhead hoist to access a material unit directly from the movable shelf for subsequent transport along the track between various locations within a product manufacturing facility.
摘要翻译：一种高效率的自动物料搬运系统（AMHS），允许架空式起重运输车辆直接向系统中包含的一个或多个WIP存储单元加载和卸载在制品（WIP）零件。 AMHS包括架空式起重运输子系统和至少一个具有多个存储箱的垂直转盘储盘器。架空式起重运输子系统包括沿悬挂轨道行进的架空式起重运输车辆，该悬挂轨道限定了与转盘存放机相邻的预定路线，从而允许架空式起重运输车辆直接从其中一个存储箱进入WIP部分。存储箱中的至少一个包括可操作地沿着转盘路径从第一位置横向移动到靠近顶部起重运输车辆的第二位置的可移动搁架。存储单元至少部分地打开以允许可移动搁板移动到第二位置，从而允许架空起重机直接从可移动搁架接近材料单元，以便随后在产品制造设施内的各个位置之间沿轨道运输。

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