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    • 1. 发明申请
    • Walking beam type heat treatment apparatus
    • 步行式热处理装置
    • US20100195992A1
    • 2010-08-05
    • US12588587
    • 2009-10-20
    • Takashi IwataYoshizumi ItoKatsuhiro Kano
    • Takashi IwataYoshizumi ItoKatsuhiro Kano
    • F27B5/06
    • B65G25/02F27B17/0025H01L21/67115H01L21/67706H01L21/6776H01L31/1864Y02P70/521
    • A walking beam type heat treatment apparatus including a heating furnace having a heating body to heat a substrate by radiation, a pair of first beams that are rod-like and provided in the heating furnace and a second beam disposed between the pair of the first beams, one of the pair of the first beams and the second beam relatively moving alternately in longitudinal and vertical directions repeatedly to the other of the pair of the first beams and the second beam, to cause to deliver and receive the substrate between the pair of the first beams and the second beam, and accordingly, to convey the substrate through the heating furnace, includes a side edge support protrusion that protrudes from each of the pair of the first beams such that the side edge support protrusion can horizontally support the substrate in abutting contact with a side edge of the substrate; and a front edge support protrusion and a rear edge support protrusion that protrude from the second beam such that the front edge support protrusion and the rear edge support protrusion can horizontally support the substrate in abutting contact with a front edge and a rear edge of the substrate.
    • 一种步进梁式热处理装置,包括:加热炉,具有加热体,用于通过辐射加热基板;一对第一梁,其杆状并设置在加热炉中,第二梁设置在所述一对第一梁之间 所述一对第一光束和所述第二光束中的一个在所述一对第一光束和所述第二光束中反复相对于所述一对第一光束和所述第二光束中的另一个反复相对地在纵向和垂直方向上交替移动,从而在所述一对 第一梁和第二梁,因此,通过加热炉输送基板,包括从所述一对第一梁中的每一个突出的侧边缘支撑突起,使得侧边缘支撑突起能够将基板水平地支撑在邻接 与基板的侧边缘接触; 以及从所述第二梁突出的前边缘支撑突起和后边缘支撑突起,使得所述前边缘支撑突起和所述后边缘支撑突起可水平地支撑所述基板,所述基板与所述基板的前边缘和后边缘抵接 。
    • 2. 发明授权
    • Walking beam type heat treatment apparatus
    • 步行式热处理装置
    • US08428448B2
    • 2013-04-23
    • US12588587
    • 2009-10-20
    • Takashi IwataYoshizumi ItoKatsuhiro Kano
    • Takashi IwataYoshizumi ItoKatsuhiro Kano
    • A21B2/00
    • B65G25/02F27B17/0025H01L21/67115H01L21/67706H01L21/6776H01L31/1864Y02P70/521
    • A walking beam type heat treatment apparatus including a heating furnace having a heating body to heat a substrate by radiation, a pair of first beams that are rod-like and provided in the heating furnace and a second beam disposed between the pair of the first beams, one of the pair of the first beams and the second beam relatively moving alternately in longitudinal and vertical directions repeatedly to the other of the pair of the first beams and the second beam, to cause to deliver and receive the substrate between the pair of the first beams and the second beam, and accordingly, to convey the substrate through the heating furnace, includes a side edge support protrusion that protrudes from each of the pair of the first beams such that the side edge support protrusion can horizontally support the substrate in abutting contact with a side edge of the substrate; and a front edge support protrusion and a rear edge support protrusion that protrude from the second beam such that the front edge support protrusion and the rear edge support protrusion can horizontally support the substrate in abutting contact with a front edge and a rear edge of the substrate.
    • 一种步进梁式热处理装置,包括:加热炉,具有加热体,用于通过辐射加热基板;一对第一梁,其杆状并设置在加热炉中,第二梁设置在所述一对第一梁之间 所述一对第一光束和所述第二光束中的一个在所述一对第一光束和所述第二光束中反复相对于所述一对第一光束和所述第二光束中的另一个反复相对地在纵向和垂直方向上交替移动,从而在所述一对 第一梁和第二梁,因此,通过加热炉输送基板,包括从所述一对第一梁中的每一个突出的侧边缘支撑突起,使得侧边缘支撑突起能够将基板水平地支撑在邻接 与基板的侧边缘接触; 以及从所述第二梁突出的前边缘支撑突起和后边缘支撑突起,使得所述前边缘支撑突起和所述后边缘支撑突起可水平地支撑所述基板,所述基板与所述基板的前边缘和后边缘抵接 。