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81. 发明授权

US09508521B2 Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：US09508521B2
公开(公告)日：2016-11-29
申请号：US14328754
申请日：2014-07-11
申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
IPC分类号： H01J27/00 , H01J27/02 , H01J27/26 , H01J37/02 , H01J37/067 , H01J37/08 , H01J37/28 , H01J37/26
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译：根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15）构造成围绕发射器尖端（21），以及气体供应管（25）。引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座（64）相对于所述电离室（15）的中心轴线是可倾斜的。因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

82. 发明授权

US09218934B2 Charged particle beam system and method of operating a charged particle beam system 有权
标题翻译：带电粒子束系统和操作带电粒子束系统的方法
公开(公告)号：US09218934B2
公开(公告)日：2015-12-22
申请号：US14314262
申请日：2014-06-25
申请人： Carl Zeiss Microscopy, LLC
发明人： John A. Notte, IV , Weijie Huang , FHM-Faridur Rahman , Shawn McVey
IPC分类号： H01J27/26 , H01J37/08 , H01J37/18 , G21K5/04
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.
摘要翻译：本公开涉及一种操作气体场离子束系统的方法，其中气体场离子束系统包括外部壳体，布置在外部壳体内的内部壳体，布置在内部壳体内的导电尖端，气体源用于将一个或多个气体供应到内部壳体，气体供应具有终止在内部壳体内的管，以及具有孔的提取器电极，其具有允许在尖端附近产生的离子通过孔进入外部壳体。该方法包括将外部壳体，内部壳体，导电尖端，管子和提取器电极定期加热至高于100℃的温度。

83. 发明授权

US09194379B1 Field-ionization based electrical space ion thruster using a permeable substrate 有权
标题翻译：使用可渗透基底的基于场离子化的电空间离子推进器
公开(公告)号：US09194379B1
公开(公告)日：2015-11-24
申请号：US13024530
申请日：2011-02-10
申请人： Oscar Biblarz , Marcello Romano
发明人： Oscar Biblarz , Marcello Romano
IPC分类号： F03H1/00 , F03H99/00 , B64G1/40
CPC分类号： B64G1/40 , B64G1/405 , F03H1/00 , F03H1/0012 , F03H1/0025 , F03H1/0037 , H01J27/26 , H01J2201/30469
摘要： A field-ionization based electrical ion thruster utilizes a single propellant that can be used in either a high specific-impulse mode, i.e., ion-thruster mode, or a low-specific-impulse mode, i.e., a cold-gas thruster mode. In one embodiment, the high specific impulse mode (ion thruster mode) utilizes a miniaturized positive-ion field-ionization chamber including a permeable substrate infused with properly oriented carbon nanotubes (CNTs), which is fed propellant from a porous injection plug made from permeable carbon or equivalent material. In one embodiment, field-electron emission from a neutralizer, such as a carbon nanotube array neutralizer, positioned after one or more accelerator grids is used for ion neutralization. In one embodiment, the low specific-impulse (cold-gas mode) uses a conventional supersonic nozzle-expansion to generate thrust. In one embodiment, both the high specific-impulse mode and the low specific-impulse mode thruster embodiments share the same gas propellant, storage propellant tank, and delivery equipment.
摘要翻译：基于场离子化的电离离子推进器利用可以以高比冲量模式即离子推进器模式或低比冲量模式即冷气推进器模式使用的单一推进剂。在一个实施例中，高比冲量模式（离子推进器模式）利用小型化的正离子场离子化室，其包括注入适当取向的碳纳米管（CNT）的可渗透底物，其由可渗透的多孔注入塞碳或等效材料。在一个实施例中，使用位于一个或多个加速器栅之后的来自中和器（例如碳纳米管阵列中和器）的场电子发射用于离子中和。在一个实施例中，低比冲量（冷气模式）使用常规的超音速喷嘴膨胀来产生推力。在一个实施例中，高比冲量模式和低比冲量模式推进器实施例共享相同的气体推进剂，储存推进剂罐和输送设备。

84. 发明授权

US09105435B1 Robust, rapid, secure sample manipulation before during and after ionization for a spectroscopy system 有权
标题翻译：在光谱系统电离之前和之后，进行稳健，快速，安全的样品操作
公开(公告)号：US09105435B1
公开(公告)日：2015-08-11
申请号：US14530621
申请日：2014-10-31
申请人： IONSENSE. INC
发明人： Brian D Musselman
IPC分类号： H01J49/00 , H01J27/02 , H01J49/10 , H01J27/26 , H01J27/24
CPC分类号： H01J27/022 , G01N33/54326 , G01N2560/00 , H01J27/24 , H01J27/26 , H01J49/10 , H01J49/14
摘要： This invention provides for the efficient positioning of a sample to be analyzed by using either magnetic or electro-mechanical fields to retain the sample in the ionization region. In an embodiment of the present invention, the sample is contacted with a sampler device, which is inserted into a chamber and accurately positioned using electro-mechanical devices. In an embodiment of the invention, the influence of an electro-mechanical field on the sampler device enables the sample to be positioned in the ionization region to be contacted by particles that result in ionization of the sample whereby rendering the resulting ions available for analysis.
摘要翻译：本发明通过使用磁场或机电场将样品保持在电离区域中来提供待分析样品的有效定位。在本发明的一个实施例中，样品与采样装置接触，取样装置被插入到室中并使用机电装置精确定位。在本发明的一个实施例中，机电场对取样器装置的影响使得样品能够被定位在电离区域中以被导致样品电离的颗粒接触，从而使得到的离子可用于分析。

85. 发明授权

US09099275B2 Ion generation device and electrical apparatus 有权
标题翻译：离子发生装置和电气设备
公开(公告)号：US09099275B2
公开(公告)日：2015-08-04
申请号：US14351594
申请日：2012-10-17
申请人： SHARP KABUSHIKI KAISHA
发明人： Kazuharu Date
IPC分类号： H01T23/00 , H01T19/04 , H01J27/26
CPC分类号： H01J27/26 , H01T19/04 , H01T23/00
摘要： An ion generation device includes: a high voltage generation circuit; and an ion generation element. The high voltage generation circuit includes: a capacitor; a high voltage transformer; a switching element; and a pulse signal generation portion which generates a pulse signal for controlling the turning on and off of the switching element. The pulse signal generation portion adjusts a pulse width of an on-period such that the pulse width of the on-period of the pulse signal is substantially equal to a time obtained by multiplying the reciprocal of an output voltage frequency at the time of a forward operation of the high voltage transformer by one-fourth.
摘要翻译：离子产生装置包括：高压发生电路; 和离子产生元件。高压发生电路包括：电容器; 高压变压器; 开关元件; 以及产生用于控制开关元件的导通和截止的脉冲信号的脉冲信号产生部分。脉冲信号产生部分调节接通周期的脉冲宽度，使得脉冲信号的导通周期的脉冲宽度基本上等于在前进时乘以输出电压频率的倒数而获得的时间高压变压器运行四分之一。

86. 发明申请

US20150206732A1 ION SOURCE, ION GUN, AND ANALYSIS INSTRUMENT 有权
标题翻译：离子源，离子枪和分析仪器
公开(公告)号：US20150206732A1
公开(公告)日：2015-07-23
申请号：US14600338
申请日：2015-01-20
申请人： ULVAC-PHI, Inc.
发明人： Daisuke SAKAI , Mauo SOGOU , Kenzo HIRAOKA
IPC分类号： H01J49/16 , H01J49/06 , G01N23/02 , H01J49/26
CPC分类号： G01N23/02 , G01N23/2258 , H01J27/26 , H01J37/08 , H01J37/252 , H01J49/0468 , H01J49/165 , H01J2237/0812 , H01J2237/2527 , H01J2237/3174
摘要： Provided are an ion source, an ion gun, and an analysis instrument, which are capable of performing sputtering without damage to a surface of a sample and improving detection sensitivity in mass spectroscopy. In the ion source, an emission opening to which ionization liquid is supplied is disposed in an electric field formed in vacuum environment by an extracting electrode so that super large droplet cluster ions are generated from the emission opening. When the sample is irradiated with a super large droplet cluster ion beam, the sample surface is subjected to sputtering without damage, so as to remove contamination substances or to expose a new surface of the sample. In mass spectroscopy, detection sensitivity is improved.
摘要翻译：提供离子源，离子枪和分析仪器，其能够进行溅射而不损害样品的表面并提高质谱中的检测灵敏度。在离子源中，在真空环境中由提取电极形成的电场中配置有供给电离液体的发射开口，从而从发射开口产生超大的液滴簇离子。当用超大液滴簇离子束照射样品时，样品表面经受溅射而不损坏，以便去除污染物质或露出样品的新表面。在质谱中，检测灵敏度得到改善。

87. 发明申请

US20150123008A1 ION GENERATOR 审中-公开
标题翻译：离子发生器
公开(公告)号：US20150123008A1
公开(公告)日：2015-05-07
申请号：US14381460
申请日：2012-11-08
申请人： Koganei Corporation
发明人： Yoshinari Fukada
IPC分类号： H01T23/00 , H01J27/02
CPC分类号： H01T23/00 , G03G15/0291 , H01J27/022 , H01J27/26 , H01T19/04
摘要： In an ion generator, a flexible discharge electrode 44 composed of one wire is provided to a base 43, and a swinging motion or a turning motion of a free end 44b of the discharge electrode 44 about a fixed end 44a of the discharge electrode 44 is performed by repulsive force of a corona discharge generated by supplying a high voltage to the fixed end 44a. Therefore, in comparison with a discharge electrode composed of a bundle of thin wires, it is possible to significantly reduce dust emission from the free end 44b of the discharge electrode 44, and to further improve the ion generator 30 in maintenance interval. Since the discharge electrode 44 is compose of one wire, it is possible to reduce the discharge electrode 44 in size, easily observe the state of the discharge electrode 44, and simplify its maintenance. Since the discharge electrode 44 performs the swinging motion or the turning motion, it is possible to transport the generated air ions EI to a wide area of a packaging film 10, and to enhance ionizing efficiency.
摘要翻译：在离子发生器中，将由一根导线构成的柔性放电电极44设置在基座43上，并且放电电极44的自由端44b围绕放电电极44的固定端44a的摆动运动或转动运动是由通过向固定端44a提供高电压而产生的电晕放电的斥力执行。因此，与由一束细线组成的放电电极相比，可以显着地减少来自放电电极44的自由端44b的灰尘的发射，并且在维护间隔中进一步改善离子发生器30。由于放电电极44由一根导线组成，所以可以减小放电电极44的尺寸，容易观察放电电极44的状态，并简化其维护。由于放电电极44进行摆动运动或转动运动，因此可以将产生的空气离子EI输送到包装膜10的广泛区域，提高电离效率。

88. 发明授权

US08963101B2 Apparatus and method for thermal assisted desorption ionization systems 有权
标题翻译：热辅助解吸电离系统的装置和方法
公开(公告)号：US08963101B2
公开(公告)日：2015-02-24
申请号：US14455611
申请日：2014-08-08
申请人： Jordan Krechmer , Brian D. Musselman
发明人： Jordan Krechmer , Brian D. Musselman
IPC分类号： H01J49/30 , H01J37/08 , H01J49/04 , H01J27/26 , H01J49/12
CPC分类号： H01J49/049 , G01N27/622 , G01N27/626 , G01N27/64 , H01J27/26 , H01J49/004 , H01J49/04 , H01J49/0431 , H01J49/10 , H01J49/126 , H01J49/14 , H01J49/24 , Y10T436/24
摘要： The present invention is directed to a method and device to desorb an analyte using heat to allow desorption of the analyte molecules, where the desorbed analyte molecules are ionized with ambient temperature ionizing species. In various embodiments of the invention a current is passed through a mesh upon which the analyte molecules are present. The current heats the mesh and results in desorption of the analyte molecules which then interact with gas phase metastable neutral molecules or atoms to form analyte ions characteristic of the analyte molecules.
摘要翻译：本发明涉及一种使用热解析分析物以允许分析物分子解吸的方法和装置，其中解吸的分析物分子与环境温度电离物质电离。在本发明的各种实施方案中，电流通过其上存在分析物分子的网。电流加热网格并导致分析物分子的解吸，然后分析物分子与气相亚稳态的中性分子或原子相互作用以形成分析物分子特征的分析物离子。

89. 发明申请

US20150008341A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权
标题翻译：充电颗粒束系统和操作充电颗粒束系统的方法
公开(公告)号：US20150008341A1
公开(公告)日：2015-01-08
申请号：US14314219
申请日：2014-06-25
申请人： Carl Zeiss Microscopy, LLC
发明人： John A. Notte, IV , Alexander Groholski , Robert Conners , Mark D. DiManna , Raymond Hill
IPC分类号： H01J37/08 , H01J37/18
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a charged particle beam system, comprising a noble gas field ion beam source, a charged particle beam column, and a housing defining a first vacuum region and a second vacuum region. A noble gas field ion beam source is arranged within the first vacuum region. A first mechanical vacuum pump is functionally attached to the first vacuum region, an ion getter pump is attached to the charged particle beam column, and a gas supply is attached to the first vacuum region configured to supply a noble gas to the noble gas field ion beam source.
摘要翻译：本发明涉及带电粒子束系统，其包括惰性气体场离子束源，带电粒子束柱和限定第一真空区域和第二真空区域的壳体。惰性气体场离子束源设置在第一真空区域内。第一机械真空泵功能地附接到第一真空区域，离子吸气剂泵连接到带电粒子束柱，并且气体供应附着到构造成向惰性气体场离子供应惰性气体的第一真空区域光束源。

90. 发明申请

US20150008334A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM 有权
标题翻译：充电颗粒束系统和操作充电颗粒束系统的方法
公开(公告)号：US20150008334A1
公开(公告)日：2015-01-08
申请号：US14314289
申请日：2014-06-25
申请人： Carl Zeiss Microscopy, LLC
发明人： John A. Notte, IV , FHM-Faridur Rahman , Weijie Huang , Shawn McVey
IPC分类号： H01J27/26 , G21K5/04
CPC分类号： H01J37/18 , G21K5/04 , H01J27/26 , H01J37/08 , H01J2237/002 , H01J2237/0216 , H01J2237/032 , H01J2237/0653 , H01J2237/0807 , H01J2237/1501 , H01J2237/1502 , H01J2237/1825 , H01J2237/188 , H01J2237/20207 , H01J2237/20214 , H01J2237/20221 , H01J2237/20235
摘要： The present disclosure relates to a gas field ion source comprising a housing, an electrically conductive tip arranged within the housing, a gas supply for supplying one or more gases to the housing, wherein the one or more gases comprise neon or a noble gas with atoms having a mass larger than neon, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole. A surface of the extractor electrode facing the tip can be made of a material having a negative secondary ion sputter rate of less than 10−5 per incident neon ion.
摘要翻译：本公开涉及一种气体离子源，其包括壳体，布置在壳体内的导电尖端，用于向壳体供应一种或多种气体的气体源，其中所述一种或多种气体包括氖或具有原子的惰性气体具有大于氖的质量，以及具有孔的提取器电极，其允许在尖端附近产生的离子穿过孔。提取器电极的面向尖端的表面可以由每个入射氖离子具有小于10-5的负次级离子溅射速率的材料制成。

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