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81. 发明申请

US20080155448A1 METHODS AND SYSTEMS FOR CONTROLLING A SEMICONDUCTOR FABRICATION PROCESS 有权
标题翻译：用于控制半导体制造工艺的方法和系统
公开(公告)号：US20080155448A1
公开(公告)日：2008-06-26
申请号：US11877228
申请日：2007-10-23
申请人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
发明人： Patrick D. Pannese , Vinaya Kavathekar , Peter van der Meulen
IPC分类号： G06F3/048
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。

82. 发明申请

US20080147580A1 APPLICATIONS OF NEURAL NETWORKS 有权
标题翻译：神经网络的应用
公开(公告)号：US20080147580A1
公开(公告)日：2008-06-19
申请号：US12032733
申请日：2008-02-18
申请人： Patrick D. Pannese
发明人： Patrick D. Pannese
IPC分类号： G06N3/04
CPC分类号： G05B99/00 , G05B15/02 , G05B19/41865 , G05B19/41885 , G05B23/0267 , G05B2219/30 , G05B2219/31 , G05B2219/31467 , G05B2219/31472 , G05B2219/32128 , G05B2219/32267 , G05B2219/32329 , G05B2219/32335 , G05B2219/32342 , G05B2219/32351 , G05B2219/35494 , G05B2219/40411 , G05B2219/40412 , G05B2219/40413 , G05B2219/40419 , G05B2219/40424 , G05B2219/45031 , G06T7/0004 , H01L21/67161 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67201 , H01L21/67207 , H01L21/67742 , H01L21/67745 , Y02P90/18 , Y02P90/20 , Y02P90/26 , Y02P90/86
摘要： Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.
摘要翻译：用于控制异构半导体制造环境中的处理的软件可以包括以晶圆为中心的数据库，使用神经网络的实时调度器和显示系统的模拟操作的图形用户界面。这些特征可以单独使用或组合使用以提供用于半导体制造过程的实时控制和监视的改进的可用性和计算效率。更一般来说，这些技术可以有用地用于各种实时控制系统中，特别是需要复杂调度决策的系统或由许多独立供应商的硬件构成的异构系统。

83. 发明申请

US20080066004A1 Process Plant User Interface System Having Customized Process Graphic Display Layers in an Integrated Environment 有权
标题翻译：过程工厂用户界面系统在集成环境中具有定制过程图形显示层
公开(公告)号：US20080066004A1
公开(公告)日：2008-03-13
申请号：US10574824
申请日：2005-05-04
申请人： Terrence L. Blevins , Ken J. Beoughter , J. Michael Lucas , Mark J. Nixon
发明人： Terrence L. Blevins , Ken J. Beoughter , J. Michael Lucas , Mark J. Nixon
IPC分类号： G06F3/048
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： A method useful for providing a user interface for a process plant includes displaying graphical depictions of process plant elements of the process plant via the user interface. Information is generated for a plurality of content layers of a process graphic display of the process plant elements by processing data regarding operation of the process plant. Content to be displayed via the user interface is determined from the generated information by determining which content layer of the plurality of content layer is to be displayed. In some embodiments, the determination may be made based on a user profile characteristic. The generated information may therefore support multiple views of the process plant via the user interface for a plurality of different types of users of the user interface, and may involve processing data regarding actual and simulated operation of the process plant. As a result, the method may also include determining whether the process plant is currently on-line to further determine the portion of the information to be displayed via the user interface.
摘要翻译：用于为过程工厂提供用户界面的方法包括通过用户界面显示过程工厂的过程工厂元件的图形描绘。通过处理关于处理工厂的操作的数据，为处理工厂元件的过程图形显示的多个内容层生成信息。通过确定要显示多个内容层的哪个内容层，从所生成的信息确定要通过用户界面显示的内容。在一些实施例中，可以基于用户简档特征来进行确定。因此，生成的信息可以经由用户界面为用户界面的多个不同类型的用户支持处理工厂的多个视图，并且可以涉及处理关于过程工厂的实际和模拟操作的数据。结果，该方法还可以包括确定过程工厂当前是否在线以进一步确定经由用户界面显示的信息的一部分。

84. 发明申请

US20080024083A1 Numerical controller 有权
标题翻译：数控机
公开(公告)号：US20080024083A1
公开(公告)日：2008-01-31
申请号：US11826972
申请日：2007-07-19
申请人： Takehiro Yamaguchi , Tetsuo Hishikawa , Yasushi Onishi , Kentaro Fujibayashi
发明人： Takehiro Yamaguchi , Tetsuo Hishikawa , Yasushi Onishi , Kentaro Fujibayashi
IPC分类号： G05B19/4061
CPC分类号： G05B19/4061 , G05B2219/32342 , G05B2219/33301 , G05B2219/49141 , Y02P90/26
摘要： Disclosed is a numerical controller capable of foreseeing the occurrence of interference during operation of a machine and securely preventing the interference. An advanced position calculating section determines advanced time for the next interference check, based on an end time point of an interference check by an interference checking device and the sum of a time required for the interference check, a time required for communication, a time required for decelerating and stopping a movable part, and a predetermined float. Further, an advanced position of the movable part at the advanced time is calculated based on pre-read program data and is outputted to the interference checking device. The interference checking device performs the interference check at the advanced position. If it detects interference, the interference checking device delivers an axis stop signal to a motion command output section, thereby stopping a motion command and decelerating and stopping the movable part. Since interference check timing is settled in accordance with the time required for the interference check, the occurrence of interference can be securely prevented without delay or advance.
摘要翻译：公开了一种数字控制器，其能够预见机器操作期间的干扰发生，并可靠地防止干扰。高级位置计算部分基于干扰检查装置的干扰检查的结束时间点和干扰检查所需的时间之和，通信所需的时间，所需的时间，确定下次干扰检查的高级时间用于减速和停止可移动部件和预定浮子。此外，基于预先读取的程序数据计算可动部件在高级时间的高位置，并将其输出到干扰检查装置。干扰检查装置在高级位置进行干扰检查。如果检测到干扰，则干扰检查装置向运动指令输出部输出轴停止信号，从而停止运动指令，减速停止可动部。由于根据干扰检查所需的时间来确定干扰检查定时，所以可以在不延迟或提前的情况下可靠地防止发生干扰。

85. 发明申请

US20070174225A1 Integration of process modules and expert systems in process plants 有权
标题翻译：将过程模块和专家系统集成到过程工厂中
公开(公告)号：US20070174225A1
公开(公告)日：2007-07-26
申请号：US10590573
申请日：2005-05-04
申请人： Terrence Blevins , J. Samson , Mark Nixon
发明人： Terrence Blevins , J. Samson , Mark Nixon
IPC分类号： G06N5/04
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： A process control system element for use in a process plant includes a process module, which represents a logical unit in the process plant, integrated with an expert module capable of detecting and/or mitigating abnormal situations associated with the logical unit. The process module may include a plurality of process objects, each process object representing a corresponding physical entity in the process plant. At least some of the process objects may include simulation capabilities to simulate the corresponding physical entities. The expert module may be adapted to detect at least one abnormal situation associated with the logical unit, and may be communicatively coupled to the process module to receive data from the process module during operation of the process module. Because the expert module is integrated with the process module, a user can more easily configure the expert module to detect and/or mitigate abnormal situations associated with the logical unit.
摘要翻译：用于过程工厂的过程控制系统元件包括处理模块，其表示过程工厂中的逻辑单元，与能够检测和/或减轻与逻辑单元相关联的异常状况的专家模块集成。处理模块可以包括多个处理对象，每个处理对象表示处理工厂中相应的物理实体。至少一些过程对象可以包括模拟相应物理实体的模拟能力。专家模块可以适于检测与逻辑单元相关联的至少一个异常情况，并且可以通信地耦合到处理模块以在处理模块的操作期间从过程模块接收数据。由于专家模块与过程模块集成，用户可以更轻松地配置专家模块来检测和/或减轻与逻辑单元相关联的异常情况。

86. 发明申请

US20070150081A1 INTEGRATED GRAPHICAL RUNTIME INTERFACE FOR PROCESS CONTROL SYSTEMS 有权
标题翻译：用于过程控制系统的集成图形运行界面
公开(公告)号：US20070150081A1
公开(公告)日：2007-06-28
申请号：US11556347
申请日：2006-11-03
申请人： Mark Nixon , Ken Beoughter , Bruce Campney , Tennyson Hoa , Richard Rodriguez , Cheyenne Hernandez , Stephen Gilbert
发明人： Mark Nixon , Ken Beoughter , Bruce Campney , Tennyson Hoa , Richard Rodriguez , Cheyenne Hernandez , Stephen Gilbert
IPC分类号： G05B15/00
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： An integrated graphical runtime interface that provides a secure, highly available environment for process control systems is disclosed. In one example, a method for displaying process control information via a graphical user interface instantiates a runtime workspace application to operatively interpose between an operator station operating system and a user. The example method displays a plurality of panels via the graphical user interface and displays a portion of the process control information associated with a runtime application in at least one of the plurality of panels via the runtime workspace application.
摘要翻译：公开了一种为过程控制系统提供安全，高可用性环境的集成图形运行时界面。在一个示例中，用于经由图形用户界面显示过程控制信息的方法实例化运行时工作空间应用程序以操作地插入操作员站操作系统和用户之间。示例性方法经由图形用户界面显示多个面板，并且经由运行时工作空间应用程序在多个面板中的至少一个中显示与运行时应用程序相关联的过程控制信息的一部分。

87. 发明申请

US20070132779A1 Graphic element with multiple visualizations in a process environment 有权
标题翻译：在进程环境中具有多个可视化的图形元素
公开(公告)号：US20070132779A1
公开(公告)日：2007-06-14
申请号：US10590574
申请日：2005-05-04
申请人： Stephen Gilbert , Ken Beoughter , J.Michael Lucas , Tennyson Hao , Mark Nixon
发明人： Stephen Gilbert , Ken Beoughter , J.Michael Lucas , Tennyson Hao , Mark Nixon
IPC分类号： G09G5/00
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： Smart graphic elements are provided for use as portions or components of one or more graphic displays, which may be executed in a process plant to display information to users about the process plant environment, such as the current state of devices within the process plant. Each of the graphic elements is an executable object that includes a property or a variable that may be bound to an associated process entity, like a field device, and that includes multiple visualizations, each of which may be used to graphically depict the associated process entity on a user interface when the graphic element is executed as part of the graphic display. Any of the graphic element visualizations may be used in any particular graphic display and the same graphic display may use different ones of the visualizations at different times. The different visualizations associated with a graphic element make the graphic element more versatile, at they allow the same graphic element to be used in different displays using different graphical styles or norms. These visualizations also enable the same graphic element to be used in displays designed for different types of display devices, such as display devices having large display screens, standard computer screens and very small display screens, such as PDA and telephone display screens.
摘要翻译：智能图形元素被提供用作一个或多个图形显示器的部分或组件，其可以在过程工厂中执行以向用户显示关于过程工厂环境的信息，例如过程工厂内的设备的当前状态。每个图形元素是可执行对象，其包括可以绑定到相关联的进程实体（如现场设备）的属性或变量，并且包括多个可视化，每个可视化可用于图形地描绘相关联的进程实体在图形元素作为图形显示的一部分执行时，在用户界面上。任何图形元素可视化可以在任何特定的图形显示中使用，并且相同的图形显示可以在不同的时间使用不同的可视化。与图形元素相关联的不同可视化功能使图形元素更加通用，因为它们允许使用不同图形样式或规范在不同显示器中使用相同的图形元素。这些可视化还使得能够将相同的图形元素用于为不同类型的显示设备设计的显示器，例如具有大显示屏幕的显示设备，标准计算机屏幕和诸如PDA和电话显示屏幕的非常小的显示屏幕。

88. 发明申请

US20070061786A1 METHODS AND APPARATUS FOR MODIFYING PROCESS CONTROL DATA 有权
标题翻译：用于修改过程控制数据的方法和装置
公开(公告)号：US20070061786A1
公开(公告)日：2007-03-15
申请号：US11556612
申请日：2006-11-03
申请人： Ling Zhou , Stephen Hammack , Bruce Campney , Larry Jundt , Mark Nixon , Stephen Gilbert
发明人： Ling Zhou , Stephen Hammack , Bruce Campney , Larry Jundt , Mark Nixon , Stephen Gilbert
IPC分类号： G06F9/45
CPC分类号： G05B19/0426 , G05B19/41885 , G05B23/0267 , G05B2219/23424 , G05B2219/25067 , G05B2219/25428 , G05B2219/31467 , G05B2219/31469 , G05B2219/31472 , G05B2219/31474 , G05B2219/32128 , G05B2219/32342 , G06F8/20 , G06F8/38 , G06F9/4488 , G06F9/451 , G06N5/04 , G06Q10/06 , G06Q50/04 , G06T13/00 , H04L67/12 , H04L67/16 , H04L67/28 , H04L67/289 , H04L67/36 , H04L2012/4026 , Y02A10/46 , Y02P80/40 , Y02P90/14 , Y02P90/26 , Y02P90/265 , Y02P90/30 , Y02P90/84 , Y02P90/86 , Y10S715/965
摘要： Methods, apparatus, and articles of manufacture for modifying process control data involve obtaining the process control data in an extensible markup language format, converting the process control data in the extensible markup language format to a second data format, and storing the process control data in a database. The process control data is subsequently edited by retrieving the process control data from the database, modifying the process control data, storing the modified process control data in the second data format in the database, converting the modified process control data from the second data format to the extensible markup language format, and storing the modified process control data in the extensible markup language format.
摘要翻译：用于修改过程控制数据的方法，装置和制品涉及以可扩展标记语言格式获得过程控制数据，将可扩展标记语言格式的过程控制数据转换为第二数据格式，并将过程控制数据存储在一个数据库。随后通过从数据库检索过程控制数据来修改过程控制数据，修改过程控制数据，将修改的过程控制数据以第二数据格式存储在数据库中，将修改的过程控制数据从第二数据格式转换为可扩展标记语言格式，并以可扩展标记语言格式存储修改后的过程控制数据。

89. 发明申请

US20060106479A1 Chemical-mechanical planarization controller 有权
公开(公告)号：US20060106479A1
公开(公告)日：2006-05-18
申请号：US11291475
申请日：2005-11-30
申请人： Dirk de Roover , Abbas Emami-Naeini , Jon Ebert
发明人： Dirk de Roover , Abbas Emami-Naeini , Jon Ebert
IPC分类号： G06F19/00
CPC分类号： G05B17/02 , G05B2219/32342 , G05B2219/45232 , Y02P90/26
摘要： The invention provides a model-based control approach to chemical-mechanical planarization (CMP) control. The preferred embodiment comprises mathematical models of the CMP process. These models play a critical role in obtaining superior control performance. Model-based Control Design involves the construction of a dynamic mathematical model of the system to be controlled, e.g. a removal rate model of a CMP system. The model can then be evaluated via computer simulations, and validated using data from the system. The invention provides a method and apparatus that processes in-situ data from a suite of real-time sensors and produces real-time commands to multiple actuators, such as applied pressures, slurry-flow rate, and wafer/pad velocity. A key aspect of the invention is an integrated model-based pressure-temperature-velocity-slurry flow control system that includes many innovations in real-time mode identification, real-time gain estimation, and real-time control.

90. 发明申请

US20050090929A1 Apparatus and method for simulation of the control and machine behavior of machine tools and production-line machines 有权
标题翻译：用于模拟机床和生产线机器的控制和机器特性的装置和方法
公开(公告)号：US20050090929A1
公开(公告)日：2005-04-28
申请号：US10690484
申请日：2003-10-21
申请人： Stefan Dolansky , Thomas Menzel , Wolfgang Papiernik
发明人： Stefan Dolansky , Thomas Menzel , Wolfgang Papiernik
IPC分类号： G05B17/02 , G05B19/4069 , G05B13/02
CPC分类号： G05B17/02 , G05B19/4069 , G05B2219/32342 , G05B2219/33324 , G05B2219/34391 , Y02P90/26
摘要： An apparatus and method for simulating the behavior of the drive system and the mechanism of machine tool or production-line machine by use of mathematical models of the drives and the mechanisms of the driven mechanical elements of the machine are disclosed. Preferably actual values for regulated and unregulated axes are calculated at the same time using NC- and PLC-models, respectively by an auxiliary computer using desired values provided by a digital controller. The actual values are then supplied to a mechanism model, preferably a geometric kinematic model, which produces a state signal that is fed back to the digital controller, preferably in real time. The result is an efficient, easy and cost-effective simulation that closely approximates reality and can be provided in real-time.
摘要翻译：公开了一种用于通过使用驱动器的数学模型和机器的从动机械元件的机构来模拟驱动系统的行为和机床或生产线机器的机构的装置和方法。优选地，使用NC-和PLC-模型分别由辅助计算机使用数字控制器提供的期望值同时计算调节轴和不受调节轴的实际值。然后将实际值提供给机械模型，优选地是几何运动学模型，其产生优选实时地反馈到数字控制器的状态信号。结果是一个高效，简单和具有成本效益的模拟，可以逼近现实并可实时提供。

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