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    • 81. 发明申请
    • Optical switch
    • 光开关
    • US20020028036A1
    • 2002-03-07
    • US09944354
    • 2001-08-30
    • Yoshichika Kato
    • G02B006/35
    • G02B6/3514G02B6/3546G02B6/357G02B6/3582G02B6/3596G02B26/0841
    • In an optical switch which has a stationary electrode plate 23, a substrate 10, a movable electrode plate 20 formed integral with the substrate 10 through flexure portions 21, and mirrors formed on the top of the movable electrode plate 20 and which performs switching control of light by electrostatic driving of the movable electrode plate 20, an output optical fiber 334 and an input optical fiber 35 are arranged along two parallel straight lines, respectively, and mirrors 41 and 42 are formed on the movable electrode plate 20 in opposing relation to the output optical fiber 34 and the input optical fiber 35, respectively.
    • 在具有固定电极板23的光开关中,基板10,通过弯曲部21与基板10一体形成的可动电极板20和形成在可动电极板20的顶部上的反射镜,并且执行切换控制 可动电极板20的静电驱动的光,输出光纤334和输入光纤35分别沿着两条平行的直线布置,反射镜41和42分别与可动电极板20相对地形成在可动电极板20上 输出光纤34和输入光纤35。
    • 82. 发明授权
    • Optical switch and method for assembling the same
    • 光开关及其组装方法
    • US6072924A
    • 2000-06-06
    • US921603
    • 1997-09-02
    • Makoto SatoFusao ShimokawaYasuhide NishidaMitsuhiro MakiharaHiroyoshi Togo
    • Makoto SatoFusao ShimokawaYasuhide NishidaMitsuhiro MakiharaHiroyoshi Togo
    • G02B6/12G02B6/35
    • G02B6/3538G02B2006/12145G02B6/3546G02B6/3574G02B6/3576G02B6/3596
    • An optical switch includes a substrate having therein optical waveguides made of silicon and a silicon layer deposited on its top surface. A space is formed in the crossing portion of the optical waveguides which is covered with a lid, preferably made of low alkali borosilicate glass, and which is bonded to the silicon layer by anodic bonding. Preferably, a groove is formed in a surface of the optical waveguide substrate or a bonding surface of the lid. The groove, after the lid has been bonded, makes a passage which communicates between the space and an outside. The passage is a pouring slit for pouring an index-matching liquid and is connected to the space which acts as a driving slit in which the index-matching liquid moves. In one embodiment, the width of the pouring slit is smaller than that of the driving slit. The optical switch can be manufactured by providing an optical waveguide substrate and a lid substrate, one of which is formed with a groove in its surface on which the two substrates are bonded. The optical waveguide substrate and the lid substrate are bonded together by anodic bonding to make a passage which communicates between the space formed in a crossing portion of the optical waveguides and an outside. The regulation of the volume of the index-matching liquid is time-, temperature-, or pressure-based regulation.
    • 光开关包括其上具有由硅制成的光波导和沉积在其顶表面上的硅层的衬底。 在由优选由低碱性硼硅酸盐玻璃制成的盖子覆盖的光波导的交叉部分中形成空间,并通过阳极接合与硅层结合。 优选地,在光波导基板的表面或盖的接合面上形成有槽。 在盖已经结合之后,凹槽形成在空间和外部之间连通的通道。 通道是用于倾倒折射率匹配液体的倾倒狭缝,并连接到作为折射率匹配液体移动的驱动狭缝的空间。 在一个实施例中,倾倒狭缝的宽度小于驱动狭缝的宽度。 光开关可以通过提供光波导基板和盖基板来制造,盖基板在其表面上形成有两个基板接合的凹槽。 光波导基板和盖基板通过阳极接合而接合在一起,以形成在形成在光波导的交叉部分中的空间与外部之间连通的通道。 指数匹配液体的体积调节是基于时间,温度或压力的调节。
    • 83. 发明授权
    • Self-aligned mechanical M.times.N optical switch
    • 自对准机械MxN光开关
    • US5828800A
    • 1998-10-27
    • US880702
    • 1997-06-23
    • Charles Howard HenryHerman Melvin Presby
    • Charles Howard HenryHerman Melvin Presby
    • G02B6/38G02B6/12G02B6/13G02B6/26G02B6/35G02B26/08H04B10/02
    • G02B6/3508G02B6/13G02B6/26G02B2006/12195G02B6/3546G02B6/3588G02B6/3596
    • A mechanically stable self-aligned M.times.N optical switch having a low insertion loss is achieved by employing three cleaved silica optical structures containing a plurality of waveguides. A monolithic silica optical structure is cleaved into the three corresponding structures. Each of the first and third structures has a cleaved edge and a respective set of waveguides extending parallel to a corresponding structure surface. The second structure has two substantially parallel cleaved edges and a plurality of sets of waveguides extending parallel to a corresponding structure surface. The corresponding surfaces of the first, second and third structures are positioned on, for example, surfaces of respective first, second and third bases aligned in a common plane. The structures are further positioned with the cleaved edges of the second structure arranged adjacent to and facing respective ones of the cleaved edges of the first and third structures. In operation, the second structure is moveable in a direction along the cleaved edges relative to the first and third structures to selectively align different waveguide sets with the waveguides of the first and third structures to provide various different optical connections between the waveguide sets of the first and third structures.
    • 具有低插入损耗的机械稳定的自对准MxN光开关通过采用包含多个波导的三个切割二氧化硅光学结构来实现。 整体二氧化硅光学结构被切割成三个对应的结构。 第一和第三结构中的每一个具有切割边缘和平行于相应结构表面延伸的相应的一组波导。 第二结构具有两个基本上平行的切割边缘和平行于相应的结构表面延伸的多组波导。 第一,第二和第三结构的对应表面位于例如相应的第一,第二和第三底部的表面上,在相同的平面中对准。 结构进一步定位,其中第二结构的切割边缘布置成与第一和第三结构的切割边缘相邻并面对相应的切割边缘。 在操作中,第二结构可以沿着相对于第一和第三结构的切割边缘的方向移动,以选择性地将不同的波导组与第一和第三结构的波导对准,以在第一和第三结构的波导组之间提供各种不同的光学连接 和第三种结构。
    • 85. 发明授权
    • Total internal reflection optical switches employing thermal activation
    • 全内反射光开关采用热激活
    • US5699462A
    • 1997-12-16
    • US663503
    • 1996-06-14
    • Julie E. FouquetPhillip W. BarthKok-Wai ChangLeslie A. FieldEric G. HansonLong YangDavid K. Donald
    • Julie E. FouquetPhillip W. BarthKok-Wai ChangLeslie A. FieldEric G. HansonLong YangDavid K. Donald
    • G02B26/08G02B6/35G02B26/02G02F1/19G02F1/313G02F1/00
    • G02B26/004G02B6/3538G02B6/3546G02B6/3576G02B6/3584G02B6/3596
    • A switching element defines a transmitting state and a reflecting state for a pair of intersecting waveguides that have a gap at their intersection. In the preferred embodiment, the switching element exhibits total internal reflection at the gap sidewall from one waveguide to the other when not in the transmitting state. In the transmitting state, index-matching liquid fills the gap, enabling light to continue in the original waveguide direction. The switching element may use ink jet techniques or bubble techniques to displace index-matching liquid. The index-matching fluid may be projected from a gap between the waveguides by a jet mechanism, or a vapor or dissolved gas bubble may be formed to fill the gap between the waveguides to provide the reflecting state for the switching element. Using either of the techniques, heaters are employed to initiate the switching operation. In some embodiments, more than one heater is utilized. In the preferred embodiment, waveguides are formed on one substrate and heaters are formed on another. Then the substrates are aligned and bonded together to position the heaters in very close proximity to the intersection between the waveguides. Preferably, the switching element is one element in a matrix of such elements for routing signals between arrays of input and output waveguides.
    • 开关元件限定了在其交叉点处具有间隙的一对相交波导的发射状态和反射状态。 在优选实施例中,当不处于发送状态时,开关元件在从一个波导到另一个波导的间隙侧壁处呈现全内反射。 在透射状态下,折射率匹配液体填充间隙,使光能够沿原始波导方向继续。 开关元件可以使用喷墨技术或气泡技术来移位折射率匹配液体。 折射率匹配流体可以通过喷射机构从波导之间的间隙突出,或者可以形成蒸气或溶解的气泡以填充波导之间的间隙,以提供开关元件的反射状态。 使用这些技术之一,采用加热器来启动切换操作。 在一些实施例中,使用多于一个的加热器。 在优选实施例中,在一个基板上形成波导,另一个形成加热器。 然后将基板对准并结合在一起,以将加热器定位在非常接近波导之间的交叉点处。 优选地,开关元件是用于在输入和输出波导阵列之间路由信号的这种元件的矩阵中的一个元件。