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1. 发明授权

US5701372A Hybrid architecture for integrated optic switchable time delay lines and method of fabricating same 失效
标题翻译：用于集成光可切换时间延迟线的混合架构及其制造方法
公开(公告)号：US5701372A
公开(公告)日：1997-12-23
申请号：US735293
申请日：1996-10-22
申请人： Gregory A. Magel , Robert M. Boysel
发明人： Gregory A. Magel , Robert M. Boysel
IPC分类号： G02B6/28
CPC分类号： G02B6/2861
摘要： The present invention provides a method and a circuit architecture whereby a time delay for optical signals in an integrated optical circuit is implemented in a hybrid configuration. For example, a hybrid time delay circuit could be implemented with a three chip set composed of a switch chip 34 placed between two delay chips 36,38. The delay chips may include one or more delay loops 44 and preferably an associated bypass loop for each delay loop 42. The switch chip contains an optical switch 20 for each delay loop on the delay chips and may contain switch control circuitry or an interface to external switch control circuitry.
摘要翻译：本发明提供了一种方法和电路架构，由此在混合配置中实现集成光电路中的光信号的时间延迟。例如，混合时间延迟电路可以用由放置在两个延迟芯片36,38之间的开关芯片34组成的三个芯片组来实现。延迟芯片可以包括一个或多个延迟环路44并且优选地用于每个延迟环路42的相关联的旁路回路。开关芯片包含用于延迟芯片上的每个延迟环路的光学开关20，并且可以包含开关控制电路或到外部的接口开关控制电路。

2. 发明授权

US5278925A Integrated-optic waveguide devices and method 失效
标题翻译：集成光波导器件及方法
公开(公告)号：US5278925A
公开(公告)日：1994-01-11
申请号：US46530
申请日：1993-04-13
申请人： Robert M. Boysel , Gregory A. Magel
发明人： Robert M. Boysel , Gregory A. Magel
IPC分类号： G02B6/12 , G02B6/122 , G02B6/13 , G02B26/02 , G02F1/01 , G02F1/313
CPC分类号： G02B6/122 , G02B26/02 , G02F1/011 , G02F1/3132 , G02F2001/0142 , G02F2201/06 , G02F2203/07 , G02F2203/22
摘要： It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane.Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.
摘要翻译：可以利用通过使金属膜靠近光波导的芯而引起的复合有效折射率的变化，以形成许多器件。本文描述的本发明提供了这样做的结构和过程，该结构包括基底，下包层，波导芯，支撑金属膜的可移除的上包层以及用于偏转所述膜的电极。使用该结构的可切换装置包括但不限于偏振器，模式转换器，光开关，布拉格器件，定向耦合器和沟道波导。

3. 发明授权

US5178728A Integrated-optic waveguide devices and method 失效
标题翻译：集成光波导装置及方法
公开(公告)号：US5178728A
公开(公告)日：1993-01-12
申请号：US676688
申请日：1991-03-28
申请人： Robert M. Boysel , Gregory A. Magel
发明人： Robert M. Boysel , Gregory A. Magel
IPC分类号： G02B6/12 , G02B6/122 , G02B6/13 , G02B26/02 , G02F1/01 , G02F1/313
CPC分类号： G02B6/122 , G02B26/02 , G02F1/011 , G02F1/3132 , G02F2001/0142 , G02F2201/06 , G02F2203/07 , G02F2203/22
摘要： It is possible to utilize changes in the complex effective refractive index caused by bringing a metal membrane in close proximity to the core of an optical waveguide to form many devices. The invention described herein provides structures and processes that do so, the structure comprising a substrate, a lower cladding, a waveguide core, a removable upper cladding which supports a metal membrane, and an electrode for deflecting said membrane.Switchable devices using this structure include, but are not limited to, polarizers, mode converters, optical switches, Bragg devices, directional couplers and channel waveguides.

4. 发明授权

US08077372B2 Micro-electromechanical microshutter array 有权
标题翻译：微机电微型抽头阵列
公开(公告)号：US08077372B2
公开(公告)日：2011-12-13
申请号：US12690975
申请日：2010-01-21
申请人： John N. Border , Herbert J. Erhardt , J. Kelly Lee , Marek W. Kowarz , Robert M. Boysel
发明人： John N. Border , Herbert J. Erhardt , J. Kelly Lee , Marek W. Kowarz , Robert M. Boysel
IPC分类号： G02B26/02
CPC分类号： B81B7/04 , B81B2201/045 , G02B26/02 , G02B26/0841
摘要： A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.
摘要翻译：微型扫描器阵列具有具有透光部分的框架。线性微型振荡器元件延伸穿过光透射部分并且彼此平行。每个微型振动元件具有在长度方向上延伸的平坦叶片，并且第一和第二扭转臂在长度方向上从叶片的每侧向外延伸，叶片延伸穿过透光部分。至少有一个电极与每个线性微型切割器元件相关联并且在长度方向上平行于微型振动器元件延伸。

5. 发明授权

US5551293A Micro-machined accelerometer array with shield plane 失效
标题翻译：带有屏蔽平面的微加工加速度计阵列
公开(公告)号：US5551293A
公开(公告)日：1996-09-03
申请号：US485170
申请日：1995-06-07
申请人： Robert M. Boysel , Jeffrey B. Sampsell
发明人： Robert M. Boysel , Jeffrey B. Sampsell
IPC分类号： B81B3/00 , G01P15/08 , G01P15/135
CPC分类号： G01P15/135 , G01P15/0802
摘要： An accelerative force may be measured using a plurality of deflection elements (102), each deflection element (102) comprising an inertial mass (104), and at least one hinge (104) supporting the inertial mass (104) in a normal position. Application of a force to inertial mass (104) will result in the deflection of the inertial mass (104) in a first direction out of the normal position. The movement of the inertial mass (104) from the normal position stores energy in the hinges (108) which tends to move the inertial mass (104) in a second direction back to its normal position. Either the mass of the inertial mass (104), or the compliance of the hinges (108) is varied from one deflection element (102) in the array to another so that the force applied to the inertial masses (104) by simultaneous acceleration of the deflection elements (102) deflects some of the inertial masses (104). A detection means (112) senses if inertial masses (104) have deflected and produces an output representative of the applied force.
摘要翻译：可以使用多个偏转元件（102）测量加速力，每个偏转元件（102）包括惯性块（104），以及至少一个支撑惯性块（104）的铰链（104）在正常位置。向惯性质量块（104）施加力将导致惯性质量块（104）沿第一方向偏离正常位置。惯性质量块（104）从正常位置的移动将能量存储在铰链（108）中，该铰链倾向于使惯性质量块（104）沿第二方向移动回其正常位置。惯性质量块（104）的质量或铰链（108）的顺应性都从阵列中的一个偏转元件（102）变化到另一个，使得通过同时加速惯性块偏转元件（102）偏转一些惯性块（104）。检测装置（112）感测惯性质量（104）是否已经偏转并产生表示所施加的力的输出。

6. 发明授权

US5526688A Digital flexure beam accelerometer and method 失效
标题翻译：数字弯曲梁加速度计及方法
公开(公告)号：US5526688A
公开(公告)日：1996-06-18
申请号：US233838
申请日：1994-04-26
申请人： Robert M. Boysel , Jeffrey B. Sampsell
发明人： Robert M. Boysel , Jeffrey B. Sampsell
IPC分类号： B81B3/00 , G01P15/08 , G01P15/135
CPC分类号： G01P15/135 , G01P15/0802
摘要： An accelerative force may be measured using a plurality of deflection elements (102), each deflection element (102) comprising an inertial mass (104), and at least one hinge (104) supporting the inertial mass (104) in a normal position. Application of a force to inertial mass (104) will result in the deflection of the inertial mass (104) in a first direction out of the normal position. The movement of the inertial mass (104) from the normal position stores energy in the hinges (108) which tends to move the inertial mass (104) in a second direction back to its normal position. Either the mass of the inertial mass (104), or the compliance of the hinges (108) is varied from one deflection element (102) in the array to another so that the force applied to the inertial masses (104) by simultaneous acceleration of the deflection elements (102) deflects some of the inertial masses (104). A detection means (112) senses if inertial masses (104) have deflected and produces an output representative of the applied force.
摘要翻译：可以使用多个偏转元件（102）测量加速力，每个偏转元件（102）包括惯性块（104），以及至少一个支撑惯性块（104）的铰链（104）在正常位置。向惯性质量块（104）施加力将导致惯性质量块（104）沿第一方向偏离正常位置。惯性质量块（104）从正常位置的移动将能量存储在铰链（108）中，该铰链倾向于使惯性质量块（104）沿第二方向移动回其正常位置。惯性质量块（104）的质量或铰链（108）的顺应性都从阵列中的一个偏转元件（102）变化到另一个，使得通过同时加速惯性块偏转元件（102）偏转一些惯性块（104）。检测装置（112）感测惯性质量（104）是否已经偏转并产生表示施加的力的输出。

7. 发明授权

US5629794A Spatial light modulator having an analog beam for steering light 失效
标题翻译：具有用于转向灯的模拟光束的空间光调制器
公开(公告)号：US5629794A
公开(公告)日：1997-05-13
申请号：US455475
申请日：1995-05-31
申请人： Gregory A. Magel , James M. Florence , Robert M. Boysel
发明人： Gregory A. Magel , James M. Florence , Robert M. Boysel
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/0841
摘要： A spatial light modulator (40, 70, 80) operable in the analog mode for light beam steering or scanning applications. A deflectable mirror (42, 72) is supported by a torsion hinge (44) along a torsion axis. A plurality of flexure hinges (48) are provided to support the corners of the mirror (42, 72) and provide a restoration force. The combination of the torsion hinges and the flexure hinges realizes a deflectable pixel that is operable in the linear range for a large range of address voltages. The flexure hinges also maintain a flat undeflected state when no address voltage is applied, and prevent the pixel from collapsing. The pixel may be reinforced, such as about its perimeter (74) to ensure mirror flatness and prevent warping, even during extreme deflections of the mirror. The pixel is electrostatically deflected by applying an address voltage to an underlying address electrode (60).
摘要翻译：一种在模拟模式下可操作以用于光束转向或扫描应用的空间光调制器（40,70,80）。可挠曲镜（42,72）由扭转轴（44）沿着扭转轴支撑。提供多个弯曲铰链（48）以支撑反射镜（42,72）的角部并提供恢复力。扭转铰链和弯曲铰链的组合实现了可在大范围的地址电压下在线性范围内操作的可偏转像素。当没有施加地址电压时，挠曲铰链也保持平坦的未偏转状态，并且防止像素塌陷。像素可以被加强，例如围绕其周边（74），以确保镜子的平整度，并防止翘曲，即使在镜子的极度偏转期间。通过将地址电压施加到下面的寻址电极（60），该像素被静电偏转。

8. 发明申请

US20100118176A1 MICRO-ELECTROMECHANICAL MICROSHUTTER ARRAY 有权
标题翻译：微电子显微镜阵列
公开(公告)号：US20100118176A1
公开(公告)日：2010-05-13
申请号：US12690975
申请日：2010-01-21
申请人： John N. Border , Herbert J. Erhardt , J. Kelly Lee , Marek W. Kowarz , Robert M. Boysel
发明人： John N. Border , Herbert J. Erhardt , J. Kelly Lee , Marek W. Kowarz , Robert M. Boysel
IPC分类号： H04N5/238 , G02B26/02
CPC分类号： B81B7/04 , B81B2201/045 , G02B26/02 , G02B26/0841
摘要： A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.
摘要翻译：微型扫描器阵列具有具有透光部分的框架。线性微型振荡器元件延伸穿过光透射部分并且彼此平行。每个微型振动元件具有在长度方向上延伸的平坦叶片，并且第一和第二扭转臂在长度方向上从叶片的每侧向外延伸，叶片延伸穿过透光部分。至少有一个电极与每个线性微型切割器元件相关联并且在长度方向上平行于微型振动器元件延伸。

9. 发明授权

US5703728A Support post architecture for micromechanical devices 失效
标题翻译：支持微机械设备的后架构
公开(公告)号：US5703728A
公开(公告)日：1997-12-30
申请号：US333195
申请日：1994-11-02
申请人： Gregory C. Smith , Robert M. Boysel
发明人： Gregory C. Smith , Robert M. Boysel
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G06K15/12 , H04N5/74 , H04N9/31 , G02B7/182 , G02B5/08 , G02B26/00
CPC分类号： G06K15/1252 , G02B26/0841 , Y10S359/904
摘要： A support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
摘要翻译：用于微机械装置，特别是数字微镜装置的支撑柱426，其包括由衬底400支撑并被金属层406覆盖的支柱材料422.支撑柱426通过将柱材料层沉积在衬底400，图案化柱层以限定支撑柱426，以及在包围支撑柱的支撑柱426上沉积金属层406。可以通过在柱426上施加间隔层432来产生甚至具有柱顶部的平面。在施加间隔层432之后，间隔层432被蚀刻以暴露柱的顶部。

10. 发明授权

US5631782A Support post architecture for micromechanical devices 失效
标题翻译：支持微机械设备的后架构
公开(公告)号：US5631782A
公开(公告)日：1997-05-20
申请号：US474867
申请日：1995-06-07
申请人： Gregory C. Smith , Robert M. Boysel
发明人： Gregory C. Smith , Robert M. Boysel
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G06K15/12 , H04N5/74 , H04N9/31 , G02B7/182 , G02B26/00
CPC分类号： G06K15/1252 , G02B26/0841 , Y10S359/904
摘要： Support pillar 426 for use with a micromechanical device, particularly a digital micromirror device, comprising a pillar material 422 supported by a substrate 400 and covered with a metal layer 406. The support pillar 426 is fabricated by depositing a layer of pillar material on a substrate 400, patterning the pillar layer to define a support pillar 426, and depositing a metal layer 406 over the support pillar 426 enclosing the support pillar. A planar surface even with the top of the pillar may be created by applying a spacer layer 432 over the pillars 426. After applying the spacer layer 432, the spacer layer 432 is etched to expose the tops of the pillars.
摘要翻译：支撑柱426，用于微机械装置，特别是数字微镜装置，其包括由衬底400支撑并被金属层406覆盖的支柱材料422.支撑柱426通过在衬底上沉积柱状材料制成 400，图案化柱层以限定支撑柱426，以及在包围支撑柱的支撑柱426上沉积金属层406。可以通过在柱426上施加间隔层432来产生甚至具有柱顶部的平面。在施加间隔层432之后，间隔层432被蚀刻以暴露柱的顶部。

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