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    • 83. 发明授权
    • Anti reflective coating polymers and the preparation method thereof
    • 防反射涂料聚合物及其制备方法
    • US06350818B1
    • 2002-02-26
    • US09413679
    • 1999-10-07
    • Sung-Eun HongMin-Ho JungHyeong-Soo KimKi-Ho Baik
    • Sung-Eun HongMin-Ho JungHyeong-Soo KimKi-Ho Baik
    • C08F834
    • C08F212/14C08F8/34G03F7/023G03F7/091C08F12/14C08F220/20
    • The present invention relates to organic anti-reflective coating polymers and preparation methods therefor. Anti-reflective coatings are used in a semiconductor device during photolithography processes to prevent the reflection of light from lower layers of the device, or resulting from changes in the thickness of the photoresist layer, and to eliminate the standing wave effect when ArF light is used. The present invention also relates to anti-reflective compositions and coatings containing these organic anti-reflective coating polymers, alone or in combination with certain light-absorbing compounds, and preparation methods therefor. When the polymers of the present invention are used in an anti-reflective coating in a photolithography process for forming submicro-patterns, the resultant elimination of changes in CD due to diffractive and reflective lights originating from lower layers increases the product yield in the formation of submicro-patterns during the manufacture of 64 M, 256 M, 1G, 4G and 16G DRAM semiconductor devices.
    • 本发明涉及有机抗反射涂层聚合物及其制备方法。 在光刻工艺中,抗反射涂层用于半导体器件,以防止来自器件的下层的光的反射,或由于光致抗蚀剂层的厚度的变化而导致的,并且当使用ArF光时消除驻波效应 。 本发明还涉及包含这些有机抗反射涂层聚合物的抗反射组合物和涂层,其单独或与某些光吸收化合物组合,及其制备方法。 当本发明的聚合物在用于形成亚微图案的光刻工艺中用于抗反射涂层中时,由于衍生于较低层的衍射和反射光引起的CD的变化的消除增加了在形成 在64M,256M,1G,4G和16G DRAM半导体器件的制造期间的微小图案。
    • 86. 发明授权
    • Vinyl aromatic polymer coupling and foams
    • US6117918A
    • 2000-09-12
    • US140586
    • 1998-08-26
    • Bharat I. ChaudharyAndy I. LaihoAndrew N. PaquetJames M. RoeClark H. CumminsMichael J. MullinsH. Craig Silvis
    • Bharat I. ChaudharyAndy I. LaihoAndrew N. PaquetJames M. RoeClark H. CumminsMichael J. MullinsH. Craig Silvis
    • C08J9/04C08F8/34C08F8/42C08F257/02C08J9/00
    • C08F8/34
    • The invention includes a process comprising steps of (1) forming a admixture of (a) a vinyl aromatic polymer and (b) a coupling amount of at least one poly(sulfonyl azide); (2) introducing the vinyl aromatic polymer or admixture into a melt processing device; (3) melting the vinyl aromatic polymer or admixture, and thereafter (4) exposing the admixture to a temperature, hereinafter, melt process temperature, sufficient to result in coupling of the vinyl aromatic polymer. The invention also includes a process of increasing the molecular weight of a vinyl aromatic polymer by heating an admixture of at least one vinyl aromatic polymer and a coupling amount of at least one poly(sulfonyl azide). Alternatively the invention is a process comprising steps of (1) forming, under a first pressure, a mixture of a vinyl aromatic polymer, a blowing agent and at least one poly(sulfonyl azide), with the mixture at a temperature at which the viscosity of the mixture is sufficient to retain the blowing agent when the mixture is allowed to expand; (2) extruding the mixture into a holding zone maintained at a temperature and second pressure which does not allow the mixture to foam, the holding zone having an outlet die defining an orifice opening into a zone of a third pressure lower than the first or second pressures at which the mixture foams, and an openable gate closing the die orifice; (3) periodically opening the gate; (4) substantially concurrently applying mechanical pressure by a movable ram on the mixture to eject the mixture from the holding zone through the die orifice into the zone of third pressure, at a rate greater than that at which substantial foaming in the die orifice occurs and less than that at which substantial irregularities in cross-sectional area or shape occurs; and (5) permitting the ejected mixture to expand unrestrained in at least one dimension to produce an elongated thermoplastic cellular body. The invention also includes any composition comprising a product formed by a process of the invention, said composition preferably comprising a foam or polymer and any article formed from such a composition.