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    • 82. 发明申请
    • METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL
    • 制造硅单晶的方法
    • US20100162944A1
    • 2010-07-01
    • US12647659
    • 2009-12-28
    • Yukinaga AZUMAMasaki MORIKAWA
    • Yukinaga AZUMAMasaki MORIKAWA
    • C30B15/20
    • C30B29/06C30B15/20
    • A method for manufacturing a silicon single crystal is provided including producing a silicon melt in a chamber by melting a silicon raw material loaded into a silica glass crucible under a reduced pressure and high temperature, removing gas bubbles from within the silicon melt by rapidly changing at least the pressure or temperature within the chamber, and pulling up the silicon single crystal from the silicon melt after the gas bubbles are removed. When the pressure is rapidly changed, the pressure within the chamber is rapidly changed at a predetermined change ratio. In addition, when the temperature is rapidly changed, the temperature within the chamber is rapidly changed at a predetermined change ratio. In this way, Ar gas attached to an inner surface of the crucible and h is the cause of the generation of SiO gas is removed.
    • 提供了一种制造硅单晶的方法,包括通过在减压和高温下熔化装载到石英玻璃坩埚中的硅原料在室内产生硅熔体,通过迅速地在 最小化室内的压力或温度,并且在除去气泡之后从硅熔体中拉出硅单晶。 当压力快速变化时,室内的压力以预定的变化率迅速变化。 此外,当温度迅速变化时,室内的温度以预定的变化率快速变化。 以这种方式,附着在坩埚的内表面上的Ar气体和h是除去产生SiO气体的原因。
    • 83. 发明申请
    • SILICA GLASS CRUCIBLE
    • 二氧化硅玻璃可溶
    • US20100154703A1
    • 2010-06-24
    • US12717390
    • 2010-03-04
    • Yoshiyuki TSUJIToshio Tsujimoto
    • Yoshiyuki TSUJIToshio Tsujimoto
    • C30B15/10B44C1/22
    • C03C19/00B24C1/08C03C15/00C30B15/10Y10T117/1032Y10T117/108Y10T428/13Y10T428/131
    • To provide a silica glass crucible, wherein there are no problems of generating a sinking and buckling when said crucible is used for pulling up silicon single crystal at a high temperature.The silica glass crucible used for pulling up the silicon single crystal, wherein at least an outer surface of a wall part of the crucible is covered with fine grooves having a length of less than 200 μm, a width of less than 30 μm and a depth of from more than 3 μm to less than 30 μm. Preferably, said fine groves are formed by carrying out a sand-blast treatment and a hydrofluoric acid etching and exist on more than 10% of the outer surface of the crucible, and a sliding frictional coefficient of the outer surface of the crucible to a carbon at 1500 degree C. is more than 0.6.
    • 为了提供一种二氧化硅玻璃坩埚,其中当在高温下使用所述坩埚拉起硅单晶时,不存在产生下沉和翘曲的问题。 用于提升硅单晶的二氧化硅玻璃坩埚,其中至少坩埚的壁部的外表面被细长的小于200μm,宽度小于30μm的细槽和深度 大于3μm至小于30μm。 优选地,通过进行喷砂处理和氢氟酸蚀刻而形成所述细小花纹,并且存在于坩埚的外表面的10%以上,坩埚的外表面的滑动摩擦系数为碳 在1500摄氏度,大于0.6。
    • 87. 发明申请
    • METHOD FOR PRODUCING QUARTZ GLASS CRUCIBLE
    • 生产石英玻璃可溶性的方法
    • US20100005836A1
    • 2010-01-14
    • US12169838
    • 2008-07-09
    • Hiroshi KISHIMinoru KANDA
    • Hiroshi KISHIMinoru KANDA
    • C03B7/18
    • C03B19/095C30B15/10C30B35/002
    • A method of producing a quartz glass crucible by arc melting a quartz powder molded product loaded on the inner side of a mold while performing vacuum suction, includes initiating the melting of quartz powder from the rim edge of a quartz powder molded product, subsequently lowering the arc electrode or raising the mold to heat and melt the sections on the downside of the rim edge. The method is preferably carried out such that the inner surface of the crucible is sealed within a time corresponding to 10% of the total arc time starting from the initiation of arc melting, and the seal thickness is 3 mm or less. The quartz glass crucible thus produced is useful for the pulling up of silicon single crystals and has a uniform glass layer with fewer internal bubbles.
    • 通过电弧熔融装载在模具内侧的石英粉末成形体同时进行真空抽吸来制造石英玻璃坩埚的方法包括从石英粉末成型品的边缘开始熔融石英粉末,随后将 电弧电极或提升模具以加热和熔化边缘边缘的下侧的部分。 该方法优选进行,使得坩埚的内表面在从电弧熔化开始起的总电弧时间的10%的时间内密封,并且密封厚度为3mm以下。 由此制造的石英玻璃坩埚可用于提升硅单晶,并且具有均匀的具有较少内部气泡的玻璃层。
    • 88. 发明申请
    • SILICA GLASS CRUCIBLE
    • 二氧化硅玻璃可溶
    • US20090272315A1
    • 2009-11-05
    • US12430311
    • 2009-04-27
    • Masanori FUKUIHiroshi KISHI
    • Masanori FUKUIHiroshi KISHI
    • C30B15/10
    • C30B15/10C30B35/002Y10T117/10Y10T117/1024Y10T117/1032Y10T117/1052
    • A silica glass crucible having a sidewall portion and a bottom portion is provided with a first synthetic silica glass layer constituting an inner layer at least in the sidewall portion, a second synthetic silica glass layer constituting an inner layer at least in a region including a center of the bottom portion, and a natural silica glass layer constituting an outer layer in the sidewall portion and the bottom portion. A melting rate of the second synthetic silica glass layer with respect to a silicon melt is higher than that of the first synthetic silica glass layer. An aluminum concentration of the second synthetic silica glass layer is higher than that of the first synthetic silica glass layer.
    • 具有侧壁部和底部的石英玻璃坩埚具有至少在侧壁部中构成内层的第一合成石英玻璃层,至少在包括中心的区域中构成内层的第二合成石英玻璃层 和在侧壁部和底部构成外层的天然石英玻璃层。 第二合成石英玻璃层相对于硅熔体的熔融率高于第一合成石英玻璃层的熔融速度。 第二合成石英玻璃层的铝浓度高于第一合成石英玻璃层的铝浓度。