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    • 85. 发明授权
    • Wafer abrasive machine
    • 晶圆磨机
    • US06692342B2
    • 2004-02-17
    • US10081493
    • 2002-02-22
    • Yoshio NakamuraTsuyoshi HasegawaSusumu Onishi
    • Yoshio NakamuraTsuyoshi HasegawaSusumu Onishi
    • B24B2500
    • B24B37/30
    • In the wafer abrasive machine of the present invention, a gravity center and a rotational axis of a wafer can be corresponded while abrading the wafer and a holding plate can be smoothly moved in a head member. The abrasive machine comprises: the head member including a concave section, in which the holding plate is accommodated; an elastic sheet member suspending the holding plate and being reinforced by a cloth-formed reinforcing member; a space for storing pressure fluid which pushes the holding plate toward the abrasive plate, the space being formed between the elastic sheet member and the concave section; and a plurality of spherical bodies being provided between an outer circumferential face of the holding plate and an inner circumferential face of the concave section, the spherical bodies simultaneously point-contact the both circumferential faces.
    • 在本发明的晶片研磨机中,在研磨晶片的同时可以使晶片的重心和旋转轴对应,并且保持板能够平滑地移动到头部构件中。 所述研磨机包括:所述头部构件包括凹部,所述保持板容纳在所述凹部中; 弹性片构件,其将所述保持板悬挂并由布形加强构件加强; 用于存储将所述保持板向研磨板推动的压力流体的空间,所述空间形成在所述弹性片构件和所述凹部之间; 并且在所述保持板的外周面与所述凹部的内周面之间设置有多个球状体,所述球状体同时与所述两个圆周面进行点接触。
    • 88. 发明授权
    • Polishing machine
    • 抛光机
    • US5361545A
    • 1994-11-08
    • US105534
    • 1993-08-11
    • Yoshio Nakamura
    • Yoshio Nakamura
    • B24B37/04B24B41/06B24B7/22
    • B24B37/345
    • The polishing machine of the present invention is capable of moving a work away from a center roller and a guide roller without reference to other members. In the polishing machine, a circular polishing plate is capable of revolving so as to polish works. A center roller is capable of revolving. Guide rollers are arranged around the center roller and capable of revolving, wherein each work is rotatably held between each guide roller and the center roller. An arm shaft is provided in the vicinity of the polishing plate and capable of moving in the longitudinal direction. A work head is provided to the arm shaft and capable of holding and releasing the work. A driving mechanism moves the arm shaft so as to move the work head between a discharge position and a specified position. A releasing mechanism slightly moves the arm shaft in the longitudinal direction so as to slightly move the work away from the center roller and the guide roller.
    • 本发明的抛光机能够将工件从中心辊和引导辊移开而不参照其他部件。 在抛光机中,圆形抛光板能够旋转以抛光作品。 中心滚筒能旋转。 引导辊布置在中心辊周围并且能够旋转,其中每个工件可旋转地保持在每个引导辊和中心辊之间。 在抛光板附近设置有能够沿纵向移动的臂轴。 工作头设置在臂轴上,能够保持和释放工件。 驱动机构使臂轴移动,以使工作头在排出位置和指定位置之间移动。 释放机构使臂轴在纵向方向稍微移动,以使工件从中心辊和引导辊稍微移动。
    • 89. 发明授权
    • Camera with non-TTL type finder
    • 相机与非TTL型取景器
    • US5278598A
    • 1994-01-11
    • US964831
    • 1992-10-22
    • Yoshio Nakamura
    • Yoshio Nakamura
    • G03B13/20G03B13/24G03B13/34G03B13/02
    • G03B13/34G03B13/20
    • A camera with a non-TTL type finder may avoid a mechanical complexity, may be produced with a gentler standard in dimensional accuracy than conventional cameras of such a type, and may lower consumption of a power battery.A finder focusing dial is manually rotated together with a cam member to swing an interlocking lever. An end of the interlocking lever moves an objective lens frame back and forth. When it is observed that an image of a target subject becomes focused on a finder focusing screen through a finder eye piece, the rotation of the dial is stopped. A focused state detecting device detects a stop position of an objective lens to supply a detection value to a photo-taking optical system focusing amount determining device to determine an amount of focusing. A drive device drives the photo-taking optical system into an in-focus state in accordance with the focusing amount thus determined.
    • 具有非TTL型取景器的相机可以避免机械复杂性,可以以比这种类型的传统照相机更小的尺寸精度标准产生,并且可以降低动力电池的消耗。 取景器对焦表盘与凸轮构件一起手动旋转以摆动互锁杆。 互锁杆的端部来回移动物镜框架。 当观察到目标物体的图像通过取景器眼件聚焦在取景器聚焦屏幕上时,表盘的旋转停止。 聚焦状态检测装置检测物镜的停止位置,以向感光光学系统聚焦量确定装置提供检测值,以确定聚焦量。 驱动装置根据如此确定的聚焦量将照相光学系统驱动到聚焦状态。