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    • 81. 发明授权
    • Memory device and manufacturing method
    • 存储器件及制造方法
    • US07554144B2
    • 2009-06-30
    • US11279945
    • 2006-04-17
    • Erh-Kun LaiChiahua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiahua HoKuang Yeu Hsieh
    • H01L29/417
    • H01L45/1226H01L45/06H01L45/1253H01L45/14H01L45/144H01L45/145H01L45/146H01L45/147H01L45/16
    • A memory device includes first and second electrodes separated by an insulating member comprising upwardly and inwardly tapering surfaces connected by a surface segment. A bridge, comprising memory material, such as a phase change material, switchable between electrical property states by the application of energy, is positioned across the surface segment and in contact with the electrodes to define an inter-electrode path defined at least in part by the length of the surface segment. According to a method for making a memory cell device, the tapering surfaces may be created by depositing a dielectric material cap using a high density plasma (HDP) deposition procedure. The electrodes and the dielectric material cap may he planarized to create the surface segment on the dielectric material. At least one of the dielectric material depositing step and the planarizing step may be controlled so that the length of the surface and segment is within a chosen dimensional range, such as between 10 nm and 100 nm.
    • 存储器件包括由绝缘构件隔开的第一和第二电极,包括由表面段连接的向上和向内的渐缩表面。 包括可通过施加能量在电性能状态之间切换的记忆材料(例如相变材料)的桥被定位在表面段上并与电极接触以限定至少部分地由 表面段的长度。 根据制造存储单元器件的方法,可以通过使用高密度等离子体(HDP)沉积程序沉积介电材料盖而产生锥形表面。 电极和电介质材料盖可以被平坦化以在电介质材料上产生表面段。 可以控制介电材料沉积步骤和平坦化步骤中的至少一个,使得表面和段的长度在选定的尺寸范围内,例如在10nm和100nm之间。
    • 84. 发明申请
    • Resistor Random Access Memory Structure Having a Defined Small Area of Electrical Contact
    • 电阻随机存取存储器结构具有定义的小面积的电触点
    • US20090032793A1
    • 2009-02-05
    • US11833563
    • 2007-08-03
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • H01L45/00
    • H01L45/16H01L45/06H01L45/1233H01L45/1273H01L45/144
    • A memory cell device, of the type that includes a memory material switchable between electrical property states by application of energy, includes first and second electrodes, a plug of memory material (such as phase change material) which is in electrical contact with the second electrode, and an electrically conductive film which is supported by a dielectric form and which is in electrical contact with the first electrode and with the memory material plug. The dielectric form is wider near the first electrode, and is narrower near the phase change plug. The area of contact of the conductive film with the phase change plug is defined in part by the geometry of the dielectric form over which the conductive film is formed. Also, methods for making the device include steps of constructing a dielectric form over a first electrode, and forming a conductive film over the dielectric form.
    • 包括能够通过施加能量在电性能状态之间切换的存储材料的存储单元装置包括第一和第二电极,与第二电极电接触的存储材料(例如相变材料)插头 以及由电介质形式支撑并与第一电极和记忆材料塞电接触的导电膜。 电介质形式在第一电极附近较宽,在相变插头附近较窄。 导电膜与相变插塞的接触面积部分地由形成导电膜的电介质形状的几何形状限定。 此外,制造该器件的方法包括在第一电极上构建电介质形式,以及在电介质形式上形成导电膜的步骤。
    • 88. 发明授权
    • Self-aligned structure and method for confining a melting point in a resistor random access memory
    • 用于将熔点限制在电阻随机存取存储器中的自对准结构和方法
    • US07442603B2
    • 2008-10-28
    • US11465094
    • 2006-08-16
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • H01L27/13
    • H01L45/06G11C11/5678G11C13/0004H01L27/2436H01L45/1233H01L45/1246H01L45/144H01L45/148H01L45/1666
    • A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.
    • 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱,该支柱包括衬底主体,覆盖衬底主体的第一导电材料,覆盖第一导电材料的可编程电阻性存储器材料,覆盖在可编程电阻性存储器材料上的高选择性材料, 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻,以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中,并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。
    • 89. 发明申请
    • Multilevel-Cell Memory Structures Employing Multi-Memory Layers with Tungsten Oxides and Manufacturing Method
    • 使用氧化钨的多存储器层的多层单元存储器结构和制造方法
    • US20080173931A1
    • 2008-07-24
    • US11625216
    • 2007-01-19
    • ChiaHua HoErh-Kun Lai
    • ChiaHua HoErh-Kun Lai
    • H01L27/00H01L21/44
    • H01L45/04H01L27/2409H01L27/2481H01L45/1233H01L45/1273H01L45/146H01L45/1633
    • The present invention provides multilevel-cell memory structures with multiple memory layer structures where each memory layer structure includes a tungsten oxide region that defines different read current levels for a plurality of logic states. Each memory layer structure can provide two bits of information, which constitutes four logic states, by the use of the tungsten oxide region that provides multilevel-cell function in which the four logic states equate to four different read current levels. A memory structure with two memory layer structures would provide four bits of storage sites and 16 logic states. In one embodiment, each of the first and second memory layer structures includes a tungsten oxide region extending into a principle surface of a tungsten plug member where the outer surface of the tungsten plug is surrounded by a barrier member.
    • 本发明提供具有多个存储层结构的多电平单元存储器结构,其中每个存储层结构包括为多个逻辑状态定义不同读取电流电平的氧化钨区域。 每个存储器层结构可以通过使用提供多电平单元功能的氧化钨区域来提供构成四个逻辑状态的两位信息,其中四个逻辑状态等于四个不同的读取电流电平。 具有两个存储器层结构的存储器结构将提供四位存储位置和16个逻辑状态。 在一个实施例中,第一和第二存储层结构中的每一个包括延伸到钨插塞构件的主表面中的钨氧化物区域,其中钨插塞的外表面被阻挡构件包围。