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    • 84. 发明授权
    • Exposure device for exposing a photosensitive material in accordance with image data
    • 用于根据图像数据曝光感光材料的曝光装置
    • US07098993B2
    • 2006-08-29
    • US10098755
    • 2002-03-21
    • Takeshi FujiiYoji OkazakiMitsuru SawanoKazuhiko Nagano
    • Takeshi FujiiYoji OkazakiMitsuru SawanoKazuhiko Nagano
    • G03B27/54G03B27/72G06F3/12
    • G03F7/2053G03F7/0007
    • An inexpensive and highly productive exposure device for directly scanning and exposing a photosensitive material sensitive to at least a UV region, based on digital data. As a motor controller moves an exposure head at a fixed speed in Y direction, image data is read one line of image data, each GLV element of a light modulator array is switched on/off by the read image data, and laser light from a high power light source of the exposure head is switched on/off. A UV-sensitive object to be exposed is exposed in X direction in a number of pixel units that substantially corresponds to the number of the GLV elements. The image data is scanned and exposed by one line in Y direction (main-scan). The motor controller moves a flat stage by one step in X direction (sub-scan). The object to be exposed is imagewise-exposed by repeating such scans.
    • 基于数字数据,用于直接扫描和曝光对至少UV区域敏感的感光材料的廉价和高生产率的曝光装置。 由于电动机控制器在Y方向上以固定的速度移动曝光头,所以图像数据被读取一行图像数据,光调制器阵列的每个GLV元件被读取的图像数据打开/关闭,并且来自 打开/关闭曝光头的高功率光源。 要暴露的UV敏感物体在X方向上以基本上对应于GLV元件的数量的多个像素单元曝光。 扫描图像数据并沿Y方向(主扫描)一行曝光。 电机控制器在X方向(副扫描)将平台移动一步。 通过重复这种扫描,待曝光的物体成像曝光。