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    • 81. 发明申请
    • Delay line circuit for generating a fixed delay
    • 用于产生固定延迟的延迟线电路
    • US20100007397A1
    • 2010-01-14
    • US12218457
    • 2008-07-11
    • Shengyuan ZhangYong WangYanbo Wang
    • Shengyuan ZhangYong WangYanbo Wang
    • H03H11/26H03K3/011G05F1/00
    • G05F3/30H03K5/133H03K2005/00032H03K2005/00078
    • A delay line circuit is provided. The delay line circuit includes a reference voltage generating circuit that generates a reference voltage, the reference voltage having a positive temperature coefficient. The delay line circuit also includes a voltage regulating circuit that generates a regulated voltage in response to the generated reference voltage as an input, and a delay chain circuit coupled to the voltage regulator to receive the regulated voltage, the delay chain circuit outputting a delay signal. In an embodiment consistent with the present invention, the reference voltage generating circuit includes a bandgap reference voltage circuit. In another embodiment consistent with the present invention, the reference voltage generating circuit includes a proportional to absolute temperature (PTAT) circuit.
    • 提供延迟线电路。 延迟线电路包括产生参考电压的参考电压产生电路,该参考电压具有正温度系数。 延迟线电路还包括电压调节电路,其响应于产生的参考电压作为输入而产生调节电压,以及延迟链电路,耦合到电压调节器以接收调节电压,延迟链电路输出延迟信号 。 在与本发明一致的实施例中,参考电压产生电路包括带隙基准电压电路。 在与本发明一致的另一实施例中,参考电压产生电路包括与绝对温度(PTAT)成比例的电路。
    • 82. 发明申请
    • LIQUID IMMERSION LITHOGRAPHY
    • 液体渗透光刻
    • US20090305161A1
    • 2009-12-10
    • US12094493
    • 2006-11-20
    • Atsushi NakamuraYong WangTakayuki Tsuji
    • Atsushi NakamuraYong WangTakayuki Tsuji
    • G03F7/004
    • G03F7/2041G03F7/0397
    • A radiation-sensitive resin composition for liquid immersion lithography which produces an excellent pattern profile, exhibits excellent resolution, provides sufficient focal depth allowance, and elutes only the minimal amount in the liquid when brought in contact with the liquid during exposure to radiation. The radiation-sensitive resin composition forms a photoresist film in liquid immersion lithography, in which radiation is emitted through a liquid for use in liquid immersion lithography having a refractive index larger than 1.44 and smaller than 1.85 at a wavelength of 193 nm, existing between a lens and a photoresist, the composition comprising a resin having a recurring unit with a lactone structure, which is insoluble or scarcely soluble in alkali, but becomes soluble in alkali by the action of an acid, and a radiation-sensitive acid generator.
    • 用于液浸光刻的辐射敏感性树脂组合物,其产生优异的图案轮廓,显示出优异的分辨率,提供足够的焦点深度余量,并且在暴露于辐射期间与液体接触时仅洗脱液体中的最小量。 辐射敏感树脂组合物在液浸光刻中形成光致抗蚀剂膜,其中辐射通过用于液体浸渍光刻的液体发射,其在193nm波长处的折射率大于1.44且小于1.85,存在于 透镜和光致抗蚀剂,该组合物包含具有内酯结构的重复单元的树脂,其不溶于或几乎不溶于碱,但通过酸的作用变得可溶于碱,并且具有辐射敏感性的酸产生剂。