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    • 82. 发明授权
    • Bipolar transistor-based electrostatic discharge (ESD) protection structure with a heat sink
    • 双极晶体管静电放电(ESD)保护结构,带散热片
    • US06777784B1
    • 2004-08-17
    • US09690580
    • 2000-10-17
    • Vladislav VashchenkoPeter J. Hopper
    • Vladislav VashchenkoPeter J. Hopper
    • H01L27082
    • H01L27/0259
    • An ESD protection structure for use with bipolar or BiCMOS ICs that is relatively immune to thermal overheating and, thus, stable during an ESD event. This immunity is achieved by employing a heat sink region adjacent to a polysilicon emitter within a distance of less than 2 microns. Such a heat sink region provides temporal heat capacity to locally dissipate the heat generated during an ESD event. Bipolar transistor-based ESD protection structures according to the present invention include a semiconductor substrate and a bipolar transistor in and on the semiconductor. The bipolar transistor includes a base region, a collection region and a polysilicon emitter. The bipolar transistor-based ESD protection structures also include a heat sink region disposed above the semiconductor substrate adjacent to the polysilicon emitter. The heat sink region is formed of a material with a heat capacity and/or thermal conductivity that is greater than the heat capacity and/or thermal conductivity of the material (typically an SiO2-based material) which conventionally covers the ESD protection structures. The heat sink region can be formed, for example, of metal and/or polysilicon. In one embodiment, the heat sink region is floating and disposed adjacent to the polysilicon. In another embodiment, the heat sink region is integrated with a metal contact to the polysilicon emitter, thereby making the otherwise conventional metal contact bulkier. By locally providing extra heat capacity (i.e., a floating heat sink region or a bulky metal contact), heat is dissipated during an ESD event, thereby increasing ESD protection capability and reliability.
    • 用于双相或BiCMOS IC的ESD保护结构,其相对地不受热过热的影响,因此在ESD事件期间是稳定的。 通过在小于2微米的距离内使用与多晶硅发射器相邻的散热区来实现该抗扰度。 这样的散热区域提供时间热容量以局部消散在ESD事件期间产生的热量。 根据本发明的基于双极晶体管的ESD保护结构包括在半导体中和半导体上的半导体衬底和双极晶体管。 双极晶体管包括基极区域,收集区域和多晶硅发射极。 基于双极晶体管的ESD保护结构还包括设置在与多晶硅发射极相邻的半导体衬底之上的散热片区域。 散热区域由热容量和/或导热系数大于材料(通常为SiO 2基材料)的热容量和/或热导率(通常覆盖ESD保护结构)的材料形成。 散热区域可以由例如金属和/或多晶硅形成。 在一个实施例中,散热区域是浮置的并且与多晶硅相邻地设置。 在另一个实施例中,散热片区域与金属接触件一体化到多晶硅发射器,从而使常规的金属接触体积更大。 通过局部地提供额外的热容量(即,浮动散热区域或庞大的金属接触),在ESD事件期间散热,从而增加ESD保护能力和可靠性。