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    • 84. 发明授权
    • Robot and adaptive placement system and method
    • 机器人和自适应放置系统及方法
    • US09548231B2
    • 2017-01-17
    • US14295419
    • 2014-06-04
    • Persimmon Technologies, Corp.
    • Martin HosekChristopher HofmeisterDennis Poole
    • G05B19/418H01L21/68B25J9/16H01L21/677
    • H01L21/681B25J9/1682G05B2219/39109G05B2219/45031H01L21/67742
    • An apparatus including a drive; a movable arm assembly; a plurality of sets of end effectors; and a controller. The end effectors are connected to the drive by the movable arm assembly. A first one of the sets of end effectors includes at least two of the end effectors, where the drive and the movable arm assembly are configured to move the at least two end effectors substantially in unison from a retracted position towards an extended position towards two different respective target locations. The at least two end effectors are at least partially independently movable relative to each other on the moveable arm assembly. The controller is configured to detect an offset of respective substrates on the at least two end effectors and adjust movement of the at least two end effectors relative to each other prior to placement of the substrates at the respective target locations.
    • 一种包括驱动器的装置; 可动臂组件; 多套终端执行器; 和控制器。 末端执行器通过可动臂组件连接到驱动器。 这些端部执行器组中的第一组包括至少两个末端执行器,其中驱动装置和可动臂组件构造成将至少两个端部执行器基本上从缩回位置朝向延伸位置向两个不同的端部执行器移动 各自的目标位置。 所述至少两个末端执行器在可动臂组件上至少部分地可相对于彼此移动。 控制器被配置成在至少两个末端执行器之前检测相应基板的偏移,并且在将基板放置在相应的目标位置之前调整至少两个端部执行器相对于彼此的移动。