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    • 82. 发明授权
    • Microresonantor systems and methods of fabricating the same
    • 微谐振器系统及其制造方法
    • US07764852B2
    • 2010-07-27
    • US11888015
    • 2007-07-30
    • Michael Renne Ty TanShih-Yuan WangDuncan StewartDavid A. Fattal
    • Michael Renne Ty TanShih-Yuan WangDuncan StewartDavid A. Fattal
    • G02B6/26
    • H01S5/1075B82Y20/00G02B6/12007H01S5/026H01S5/0424H01S5/1032H01S5/1042H01S5/34306
    • Various embodiments of the present invention are related to microresonator systems and to methods of fabricating the microresonator systems. In one embodiment, a microresonator system comprises a substrate having a top surface layer and at least one waveguide embedded in the substrate and positioned adjacent to the top surface layer of the substrate. The microresonator system also includes a microresonator having a top layer, an intermediate layer, a bottom layer, a peripheral region, and a peripheral coating. The bottom layer of the microresonator is attached to and in electrical communication with the top surface layer of the substrate. The microresonator is positioned so that at least a portion of the peripheral region is located above the at least one waveguide. The peripheral coating covers at least a portion of the peripheral surface and has a relatively lower index of refraction than the top, intermediate, and bottom layers of the microresonator.
    • 本发明的各种实施例涉及微谐振器系统和制造微谐振器系统的方法。 在一个实施例中,微谐振器系统包括具有顶表面层和嵌入在衬底中的至少一个波导并且邻近衬底的顶表面层定位的衬底的衬底。 微谐振器系统还包括具有顶层,中间层,底层,周边区域和外围涂层的微谐振器。 微谐振器的底层附着到衬底的顶表面层并与其电连通。 定位微谐振器使得周边区域的至少一部分位于至少一个波导的上方。 周边涂层覆盖周边表面的至少一部分,并且具有比微谐振器的顶层,中间层和底层更低的折射率。