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81. 发明授权

US06983892B2 Gas distribution showerhead for semiconductor processing 有权
标题翻译：用于半导体加工的气体分配喷头
公开(公告)号：US06983892B2
公开(公告)日：2006-01-10
申请号：US10772787
申请日：2004-02-05
申请人： Hamid Noorbakhsh , James D. Carducci , Jennifer Y. Sun , Larry D. Elizaga
发明人： Hamid Noorbakhsh , James D. Carducci , Jennifer Y. Sun , Larry D. Elizaga
IPC分类号： A01G27/00 , B05B5/00 , B05B1/14 , F23D11/32
CPC分类号： C23C16/45565
摘要： We have developed a gas distribution showerhead assembly, for use in a semiconductor processing chamber, which can be easily cleaned, with minimal chamber downtime. The gas distribution showerhead assembly includes an electrode having openings therethrough, and a gas distribution plate which includes a plurality of through-holes for delivering processing gases into the semiconductor processing chamber. The gas distribution plate is bonded to a first, lower major surface of the electrode. A removable insert which fits into an opening in the electrode through which gas flows. Spacing between surfaces of the removable insert and surfaces of the electrode is adequate to permit gas flow, but inadequate for plasma ignition within the opening. The removable insert can be easily removed during cleaning of the gas distribution showerhead, permitting the holes in the gas distribution plate to be easily accessed from both sides of the gas distribution plate.
摘要翻译：我们开发了一种用于半导体处理室的气体分配喷头组件，可以轻松清洁，并具有最小的室停机时间。气体分配喷头组件包括具有开口的电极，以及气体分配板，其包括用于将处理气体输送到半导体处理室中的多个通孔。气体分配板结合到电极的第一下表面。可拆卸的插入件，其装配在气体流过的电极的开口中。可拆卸插入件的表面与电极表面之间的间距足以允许气体流动，但不足以在开口内等离子体点火。在清洁气体分配喷头时可以容易地移除可移除的插入物，从而容易从气体分配板的两侧接近气体分配板中的孔。

82. 发明授权

US09520314B2 High temperature electrostatic chuck bonding adhesive 有权
标题翻译：高温静电卡盘粘合胶
公开(公告)号：US09520314B2
公开(公告)日：2016-12-13
申请号：US12640496
申请日：2009-12-17
申请人： Jennifer Y. Sun , Senh Thach , Ren-Guan Duan
发明人： Jennifer Y. Sun , Senh Thach , Ren-Guan Duan
IPC分类号： H01L21/68 , H02N13/00 , C09D183/04 , H01L21/683
CPC分类号： H01L21/6833 , C08K3/22 , C08K3/28 , C08K2003/2227 , C08K2003/282 , C09D183/04 , C09J11/04 , C09J183/04 , H01L21/6831 , H02N13/00 , Y10T279/23 , Y10T279/34
摘要： Methods and apparatus for bonding an electrostatic chuck to a component of a substrate support are provided herein. In some embodiments, an adhesive for bonding components of a substrate support may include a matrix of silicon-based polymeric material having a filler dispersed therein. The silicon based polymeric material may be a polydimethylsiloxane (PDMS) structure having a molecular weight with a low molecular weight (LMW) content Σ D3-D10 of less than about 500 ppm. In some embodiments, the filler may comprise between about 50 to about 70 percent by volume of the adhesive layer. In some embodiments, the filler may comprise particles of aluminum oxide (Al2O3), aluminum nitride (AlN), yttrium oxide (Y2O3), or combinations thereof. In some embodiments, the filler may comprise particles having a diameter of about 10 nanometers to about 10 microns.
摘要翻译：本文提供了用于将静电卡盘结合到基板支撑件的部件的方法和装置。在一些实施例中，用于粘合基底支撑件的部件的粘合剂可以包括其中分散有填料的硅基聚合物材料的基体。硅基聚合物材料可以是分子量小于约500ppm的具有低分子量（LMW）含量ΣD3-D10的聚二甲基硅氧烷（PDMS）结构。在一些实施方案中，填料可以占粘合剂层的约50至约70体积％。在一些实施例中，填料可以包括氧化铝（Al 2 O 3），氮化铝（AlN），氧化钇（Y 2 O 3）或其组合的颗粒。在一些实施方案中，填料可以包含直径为约10纳米至约10微米的颗粒。

83. 发明授权

US08231736B2 Wet clean process for recovery of anodized chamber parts 有权
标题翻译：用于回收阳极氧化室部件的湿清洁工艺
公开(公告)号：US08231736B2
公开(公告)日：2012-07-31
申请号：US11845620
申请日：2007-08-27
申请人： Jennifer Y. Sun , Senh Thach , Xi Zhu , Li Xu , Anisul Khan
发明人： Jennifer Y. Sun , Senh Thach , Xi Zhu , Li Xu , Anisul Khan
IPC分类号： B08B3/00
CPC分类号： C23C16/4407 , C11D7/08 , C11D7/10 , C11D11/0047 , C11D11/0064
摘要： A cleaning process for recovering an anodized aluminum part is particularly useful when the part has been exposed to a fluorine-containing plasma in etch reactor. The part is bathed in an agitated solution of a fluoride acid, such as ammonium fluoride, which converts aluminum fluoride to a soluble fluoride. The part is rinsed in water. The pores of the cleaned anodization may be resealed by a submerging the part in hot agitated deionized water.
摘要翻译：当在蚀刻反应器中暴露于含氟等离子体时，用于回收阳极氧化铝部件的清洁方法是特别有用的。将该部分浸渍在氟化物酸如氟化铵的搅拌溶液中，其将氟化铝转化为可溶性氟化物。该部件在水中冲洗。清洁的阳极氧化的孔可以通过将部件浸没在热的搅拌去离子水中来重新密封。

84. 发明授权

US07718029B2 Self-passivating plasma resistant material for joining chamber components 有权
标题翻译：用于连接腔室部件的自钝化等离子体材料
公开(公告)号：US07718029B2
公开(公告)日：2010-05-18
申请号：US11461689
申请日：2006-08-01
申请人： Jennifer Y. Sun , Li Xu , Senh Thach , Kelly A. McDonough , Robert Scott Clark
发明人： Jennifer Y. Sun , Li Xu , Senh Thach , Kelly A. McDonough , Robert Scott Clark
IPC分类号： C04B37/00 , B29C65/00 , B32B37/00 , B32B38/04 , H01L21/00
CPC分类号： C23C16/4409 , H01J37/32467
摘要： Embodiments of the invention provide a robust bonding material suitable for joining semiconductor processing chamber components. Other embodiments provide semiconductor processing chamber components joined using a bonding material having metal filler disposed in an adhesive layer. Other embodiments include methods for manufacturing a semiconductor processing chamber component having a bonding material that includes metal filled disposed in an adhesive layer. The metal filler is suitable for reacting with halogen containing plasmas such that a halogen based metal layer is formed on the exposed portion of the bonding material upon exposure to the plasma.
摘要翻译：本发明的实施例提供了适用于接合半导体处理室部件的坚固的接合材料。其他实施例提供使用布置在粘合剂层中的具有金属填料的接合材料连接的半导体处理室部件。其他实施例包括用于制造半导体处理室部件的方法，所述半导体处理室部件具有包括设置在粘合剂层中的填充金属的接合材料。金属填料适于与含卤素的等离子体反应，使得在暴露于等离子体时在接合材料的暴露部分上形成卤素基金属层。

85. 发明授权

US07055732B2 Semiconductor processing apparatus including plasma-resistant, welded aluminum structures 失效
标题翻译：半导体处理装置包括耐等离子体，焊接铝结构
公开(公告)号：US07055732B2
公开(公告)日：2006-06-06
申请号：US10652663
申请日：2003-08-28
申请人： Senh Thach , Jennifer Y. Sun , Shun Jackson Wu , Yixing Lin , Clifford C. Stow
发明人： Senh Thach , Jennifer Y. Sun , Shun Jackson Wu , Yixing Lin , Clifford C. Stow
IPC分类号： B23K20/12 , B23K37/00 , B23K31/02
CPC分类号： B23K20/24 , B23K20/12 , B23K20/129 , B23K20/2336 , B23K2101/40 , B23K2103/10 , Y10T428/12736
摘要： We have discovered a method of producing a complex-shaped aluminum alloy article, where welding has been employed to form the article, where an anodized aluminum coating is produced over a surface of the article including the weld joint, and where the anodized aluminum coating is uniform, providing improved performance over that previously known in the art for welded articles exposed to a corrosive plasma environment.
摘要翻译：我们已经发现了一种生产复合形状的铝合金制品的方法，其中已经使用焊接来形成制品，其中在包括焊接接头的制品的表面上产生阳极氧化的铝涂层，并且其中阳极氧化的铝涂层与现有技术中已知的用于暴露于腐蚀性等离子体环境的焊接制品相比提供了更好的性能。

86. 发明授权

US06722937B1 Sealing of flat-panel device 失效
标题翻译：密封平板设备
公开(公告)号：US06722937B1
公开(公告)日：2004-04-20
申请号：US09628584
申请日：2000-07-31
申请人： Paul N. Ludwig , Theodore S. Fahlen , Shinji Kanagawa , Jennifer Y. Sun
发明人： Paul N. Ludwig , Theodore S. Fahlen , Shinji Kanagawa , Jennifer Y. Sun
IPC分类号： H01J926
CPC分类号： H01J9/261 , H01J2211/48 , H01J2329/867 , H01J2329/8675
摘要： A flat-panel display is hermetically sealed by a process in which a first plate structure (30) is positioned generally opposite a second plate structure (32) such that sealing material (34) provided over the second plate structure lies between the plate structures. In a gravitational sealing technique, the first plate structure is positioned vertically below the second plate structure. The sealing material is heated so that it moves vertically downward under gravitational influence to meet the first plate structure and seal the plate structures together. In a global-heating gap-jumping technique, the plate structures and sealing material are globally heated to cause the sealing material to jump a gap between the sealing material and the first plate structure. When the first plate structure is positioned vertically above the second plate structure, the sealing material moves vertically upward to meet the first plate structure and close the gap.
摘要翻译：平板显示器通过其中第一板结构（30）大致相对于第二板结构（32）定位的过程而气密地密封，使得设置在第二板结构上方的密封材料（34）位于板结构之间。在重力密封技术中，第一板结构位于第二板结构的垂直下方。密封材料被加热，使得其在重力作用下垂直向下移动以满足第一板结构并将板结构密封在一起。在全局加热间隙跳跃技术中，板结构和密封材料被全局加热，使得密封材料在密封材料和第一板结构之间跳跃间隙。当第一板结构垂直地位于第二板结构上方时，密封材料垂直向上移动以满足第一板结构并闭合间隙。

87. 发明授权

US06571464B2 Self-standing spacer wall structures and methods of fabricating and installing same 失效
标题翻译：自立垫片的制作方法
公开(公告)号：US06571464B2
公开(公告)日：2003-06-03
申请号：US09844738
申请日：2001-04-26
申请人： Theodore S. Fahlen , Alfred S. Conte , Robert M. Duboc, Jr. , George B. Hopple , John K. O'Reilly , Vasil M. Chakarov , Robert L. Marion , Steve T. Cho , Robert G. Neimeyer , Jennifer Y. Sun , David L. Morris , Christopher J. Spindt , Kollengode S. Narayanan
发明人： Theodore S. Fahlen , Alfred S. Conte , Robert M. Duboc, Jr. , George B. Hopple , John K. O'Reilly , Vasil M. Chakarov , Robert L. Marion , Steve T. Cho , Robert G. Neimeyer , Jennifer Y. Sun , David L. Morris , Christopher J. Spindt , Kollengode S. Narayanan
IPC分类号： H21R4300
CPC分类号： H01J9/242 , H01J29/864 , H01J31/127 , H01J2329/8625 , H01J2329/864 , H01J2329/8645 , H01J2329/8665 , Y10T29/49004 , Y10T29/49117
摘要： Methods and structures are provided which support spacer walls in a position which facilitates installation of the spacer walls between a faceplate structure and a backplate structure of a flat panel display. In one embodiment, spacer feet are formed at opposing ends of the spacer wall. These spacer feet can be formed of materials such as ceramic, glass and/or glass frit. The spacer feet support the corresponding spacer wall on the faceplate (or backplate) structure. Tacking electrodes can be provided on the faceplate (or backplate) structure to assert an electrostatic force on the spacer feet, thereby holding the spacer feet in place during installation of the spacer wall. The spacer wall can be mechanically and/or thermally expanded prior to attaching both ends of the spacer wall to the faceplate (or backplate) structure. The spacer wall is then allowed to contract, thereby introducing tension into the spacer wall which tends to straighten any inherent waviness in the spacer wall. Alternatively, spacer clips can be clamped onto opposing ends of a spacer wall to support the spacer wall during installation. The spacer clips can provide electrical connections to face electrodes located on the spacer wall.
摘要翻译：制造适于放置在平板显示器的面板结构（301）和背板结构（302）之间的自立间隔物（100或200）的方法必须首先提供具有一对相对表面的晶片（401）（401A和401B）和一对相对端。分隔垫脚材料的两个杆（411和412）分别在其一个表面上或分别在两个表面上分别放置在晶片的两端附近。间隔条（161-164）通过横向切割穿过条形并通过晶片基本同时从端到端形成。每个间隔条然后由晶片的一部分和一对横向分离的间隔脚（111和112）组成，每个由脚的一部分组成。

88. 发明授权

US6129603A Low temperature glass frit sealing for thin computer displays 失效
标题翻译：用于薄型计算机显示器的低温玻璃料密封
公开(公告)号：US6129603A
公开(公告)日：2000-10-10
申请号：US881882
申请日：1997-06-24
申请人： Jennifer Y. Sun , Yutao Ma
发明人： Jennifer Y. Sun , Yutao Ma
IPC分类号： G09F9/00 , H01J5/24 , H01J9/26 , H01J9/40 , H01J29/86 , H01J31/12
CPC分类号： H01J9/261 , H01J2329/00
摘要： A flat panel display and a method for forming a flat panel display. In one embodiment, the flat panel display includes a sealed interior region formed by heating a low temperature glass frit in a vacuum. The low temperature glass frit is placed between a faceplate and a backplate. The low temperature glass frit is heated such that it melts, forming a sealed interior region between the faceplate and the backplate which is hermetically sealed. The low temperature glass frit allows for melting of the glass frit at a temperature lower than that of prior art processes. The resulting sealed interior region is in a vacuum. Therefore, evacuation tubes are not required and process steps associated with evacuation through an evacuation tube are eliminated.
摘要翻译：平板显示器和平板显示器的形成方法。在一个实施例中，平板显示器包括通过在真空中加热低温玻璃料而形成的密封内部区域。低温玻璃料置于面板和背板之间。加热低温玻璃料，使其熔化，形成在密封的面板和密封的背板之间的密封的内部区域。低温玻璃料允许在比现有技术方法低的温度下熔化玻璃料。所得密封的内部区域处于真空状态。因此，不需要排气管，并且消除了通过排气管抽真空的工艺步骤。

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