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    • 81. 发明申请
    • BALANCING A MICROELECTROMECHANICAL SYSTEM
    • 平衡微电子系统
    • US20120306030A1
    • 2012-12-06
    • US13151539
    • 2011-06-02
    • Pavel KornilovichVladek KasperchikJames William Stasiak
    • Pavel KornilovichVladek KasperchikJames William Stasiak
    • H01L29/30C09D11/02B05C5/00H01L21/66B05C11/00
    • C09D11/30B05B12/084
    • A method of balancing a microelectromechanical system comprises determining if a microelectromechanical system is balanced in a plurality of orthogonal dimensions, and if the microelectromechanical system is not balanced, selectively depositing a first volume of jettable material on a portion of the microelectromechanical system to balance the microelectromechanical system in the plurality of orthogonal dimensions. A jettable material for balancing a microelectromechanical system comprises a vehicle, and a dispersion of nano-particles within the vehicle, in which the total mass of jettable material deposited on the microelectromechanical system is equal to the weight percentage of nano-particles dispersed within the vehicle multiplied by the mass of jettable material deposited on the microelectromechanical system. A microelectromechanical system comprises a number of unbalanced structures, and a number of droplets of jettable material disposed on the unbalanced structures, in which the droplets of jettable material balance the unbalanced structures in a plurality of orthogonal dimensions.
    • 平衡微机电系统的方法包括确定微机电系统是否以多个正交尺寸平衡,并且如果微机电系统不平衡,则在微机电系统的一部分上选择性地沉积第一体积的可喷射材料以平衡微机电 系统。 用于平衡微机电系统的喷射材料包括载体和载体内纳米颗粒的分散体,其中沉积在微机电系统上的可喷射材料的总质量等于分散在车辆内的纳米颗粒的重量百分比 乘以沉积在微机电系统上的喷射材料的质量。 微机电系统包括多个不平衡结构以及设置在不平衡结构上的多个可喷射材料的液滴,其中可喷射材料的液滴以多个正交尺寸平衡不平衡结构。