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    • 81. 发明申请
    • Plasma processing apparatus and method with controlled biasing functions
    • 具有受控偏置功能的等离子体处理装置和方法
    • US20050155711A1
    • 2005-07-21
    • US11053236
    • 2005-02-09
    • Masahiro SumiyaNaoki YasuiSeiichi Watanabe
    • Masahiro SumiyaNaoki YasuiSeiichi Watanabe
    • C23C16/44C23C16/50C23C16/509C23F1/00
    • C23C16/5096C23C16/4401H01J37/32165
    • Processing technique using plasma to process the surface of a sample such as semiconductor device. The phases of RF bias voltages applied to a substrate electrode and an antenna electrode opposed thereto are controlled to be opposite to each other so that either one of the electrodes is forced to always function as ground. Accordingly, current flowing to cross the magnetic field for controlling the plasma is decreased, and the potential distribution difference in the surface of the sample to be processed is reduced, so that the charging damage can be suppressed. Energy of ions incident to the sample to be processed can be controlled to perform high-precision etching. The plasma potential can also be controlled so that the strength of the ion impact to the inner wall of the chamber can be reduced, thereby reducing particles detached from the inner wall of the processing apparatus to improve the throughput.
    • 使用等离子体处理诸如半导体器件的样品表面的处理技术。 施加到与其相对的基板电极和天线电极的RF偏置电压的相位被控制为彼此相反,使得电极中的任一个被强制地始终用作接地。 因此,流过用于控制等离子体的磁场的电流减少,并且待处理样品的表面的电位分布差减小,从而可以抑制充电损伤。 可以控制入射到待处理样品的离子的能量,以进行高精度蚀刻。 也可以控制等离子体电位,使离子冲击室内壁的强度降低,从而减少从处理装置的内壁脱离的颗粒,以提高生产量。
    • 87. 发明授权
    • Magnetic disk cartridge
    • 磁盘盒
    • US5862024A
    • 1999-01-19
    • US699407
    • 1996-08-19
    • Seiichi Watanabe
    • Seiichi Watanabe
    • G11B23/03F16B4/00
    • G11B23/0316Y10T403/4924Y10T403/557
    • A magnetic disk cartridge has a first cassette shell half provided with engagement holes and a second cassette shell half provided with engagement pins. Each engagement hole has an entrance portion enabling insertion of an engagement pin and a shoulder-like engagement portion following the entrance portion. Each engagement pin has an elastic structure enabling it to be compressed and is formed at its tip portion with a bulged portion. The bulged portion is formed at its distal end with a tapered portion and at its proximal end with a sloped provisional retaining surface. The first and second cassette shell halves are formed on inner surfaces thereof with abutting surfaces. The cassette shell halves are provisionally assembled in the final assembly step by bringing the sloped provisional retaining surface of the bulged portion of the engagement pin engaged with the engagement hole into engagement with the shoulder-like engagement portion and bringing the abutting surfaces into abutment with each other. The cassette shell obtained by provisionally assembling the cassette shell halves therefore has high dimensional precision and can be easily disassembled before permanent assembly if necessary.
    • 磁盘盒具有设置有接合孔的第一盒壳半部和设置有接合销的第二盒壳半部。 每个接合孔具有能够插入接合销和入口部分之后的肩状接合部的入口部。 每个接合销具有使其能够被压缩并且在其尖端部分处形成有凸出部分的弹性结构。 凸起部分在其远端处形成有锥形部分,并且在其近端处形成有倾斜的临时保持表面。 第一和第二盒壳半部在其内表面上形成有邻接表面。 通过使接合销的凸出部分的倾斜临时保持表面与接合孔接合而与最终组装步骤暂时组装在一起,使其与肩状接合部分接合并使邻接表面与每个 其他。 因此,通过临时组装盒壳半部获得的盒壳具有高尺寸精度,并且如果需要,可以容易地在永久组装之前拆卸。
    • 88. 发明授权
    • Method and apparatus for injection molding
    • 注射成型的方法和装置
    • US5766526A
    • 1998-06-16
    • US420816
    • 1995-04-12
    • Seiichi Watanabe
    • Seiichi Watanabe
    • B29C45/28B29C45/77
    • B29C45/77B29C45/2806
    • An injection molding method and apparatus in which an injection molding metal mold having a valve gate 7 mechanically opening and closing a gate facing an injection molding cavity is used, and the timing of closing the valve gate is set with reference to a melted resin pressure in the injection molding cavity during a holding pressure step in a molding process. The molding method and apparatus result in high accuracy molded products by utilizing a valve gate system in the injection molding of thin products, and also result in molded products having less variations among cavities even in the case where a plurality of products are molded at the same time.
    • 一种注射成型方法和装置,其中使用具有阀门7的机械地打开和关闭面向注射成型腔的门的注射成型金属模,并且关闭阀门的时间参照熔融树脂压力设定 在模制过程中的保持压力步骤期间的注塑腔。 成型方法和装置通过在薄产品的注射成型中利用阀门浇口系统产生高精度的模制产品,并且还导致即使在多个产品被模制的情况下,空腔的变化也较小的模制产品 时间。