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81. 发明授权

US09010369B2 Flow rate range variable type flow rate control apparatus 有权
标题翻译：流量范围可变型流量控制装置
公开(公告)号：US09010369B2
公开(公告)日：2015-04-21
申请号：US13763178
申请日：2013-02-08
申请人： Fujikin Incorporated , National University Corporation Tohoku University , Tokyo Electron Ltd.
发明人： Tadahiro Ohmi , Masahito Saito , Shoichi Hino , Tsuyoshi Shimazu , Kazuyuki Miura , Kouji Nishino , Masaaki Nagase , Katsuyuki Sugita , Kaoru Hirata , Ryousuke Dohi , Takashi Hirose , Tsutomu Shinohara , Nobukazu Ikeda , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
IPC分类号： G05D7/06 , G01F1/36 , G01F1/684 , G01F5/00 , G01F7/00
CPC分类号： G05D7/0641 , G01F1/363 , G01F1/6842 , G01F1/6847 , G01F5/005 , G01F7/005 , G05D7/0635 , G05D7/0647 , G05D23/1927 , Y10T137/0379 , Y10T137/7759 , Y10T137/776 , Y10T137/8593 , Y10T137/86734 , Y10T137/86815 , Y10T137/87265 , Y10T137/87314 , Y10T137/8741 , Y10T137/87499 , Y10T137/87684
摘要： A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1−P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
摘要翻译：提供一种压力式流量控制装置，其中通过孔口的流体流量计算为Qc = KP1（其中K是比例常数）或Qc = KP2m（P1-P2）n（其中K是比例常数，m和n常数）通过使用孔口上游侧压力P1和/或孔口下游侧压力P2。控制阀的下游侧和压力式流量控制装置的流体供给管之间的流体通道平行地包括至少2个流体通道，并且为每个这些流体通道设置具有不同流量特性的孔，其中小流量区域中的流体流向一个孔，用于在小流量区域中的流体的流量控制，而大流量区域中的流体流向另一个孔口，用于大流量区域中的流体的流量控制。

82. 发明申请

US20140230911A1 PRESSURE TYPE FLOW CONTROL SYSTEM WITH FLOW MONITORING, AND METHOD FOR DETECTING ANOMALY IN FLUID SUPPLY SYSTEM AND HANDLING METHOD AT ABNORMAL MONITORING FLOW RATE USING THE SAME 有权
标题翻译：具有流量监测的压力型流量控制系统和用于检测流体供给系统中的异常的方法和使用异步监测流量的处理方法
公开(公告)号：US20140230911A1
公开(公告)日：2014-08-21
申请号：US14075890
申请日：2013-11-08
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Katsuyuki Sugita
IPC分类号： G05D7/06
CPC分类号： G05D7/0623 , F16K37/0083 , G01F1/36 , G01F1/363 , G01F1/50 , G01F1/6842 , G01F1/6965 , G01F5/00 , G01F15/005 , G01F25/0007 , G05D7/0617 , G05D7/0635 , Y10T137/0368 , Y10T137/7759 , Y10T137/7761
摘要： A pressure type flow control system with flow monitoring includes an inlet, a control valve including a pressure flow control unit connected downstream of the inlet, a thermal flow sensor connected downstream of the control valve, an orifice installed on a fluid passage communicatively connected downstream of the thermal flow sensor, a temperature sensor provided near the fluid passage between the control valve and orifice, a pressure sensor provided for the fluid passage between the control valve and orifice, an outlet communicatively connected to the orifice, and a control unit including a pressure type flow rate arithmetic and control unit receiving a pressure signal from the pressure sensor and a temperature signal from the temperature sensor, and a flow sensor control unit to which a flow rate signal from the thermal flow sensor is input.
摘要翻译：具有流量监测的压力型流量控制系统包括入口，控制阀，其包括连接在入口下游的压力流量控制单元，连接在控制阀下游的热流传感器，安装在流体通道上的通孔，热流传感器，设置在控制阀和孔之间的流体通道附近的温度传感器，为控制阀和孔口之间的流体通道设置的压力传感器，与孔口连通地连接的出口，以及包括压力接收来自压力传感器的压力信号和来自温度传感器的温度信号的流量计算和控制单元以及来自热流传感器的流量信号输入到其中的流量传感器控制单元。

83. 发明申请

US20140124064A1 RAW MATERIAL VAPORIZING AND SUPPLYING APPARATUS 审中-公开
标题翻译：原料气化和供应装置
公开(公告)号：US20140124064A1
公开(公告)日：2014-05-08
申请号：US14065078
申请日：2013-10-28
申请人： Fujikin Incorporated
发明人： Atsushi Hidaka , Kaoru Hirata , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： C23C16/455
CPC分类号： C23C16/45512 , C23C16/4481 , C23C16/45557 , C23C16/52 , Y10T137/7837
摘要： A raw material vaporizing and supplying apparatus includes a carrier gas supply source, a source tank storing raw material, a flow passage supplying carrier gas to an internal upper space portion of the source tank, an automatic pressure regulating device installed on the flow passage, controlling pressure in the internal upper space portion to a set pressure, another flow passage supplying mixed gas (a mixture of raw material steam and carrier gas) from the internal upper space portion to a process chamber, a flow control system installed on this other flow passage, and automatically regulates a flow rate of the mixed gas supplied to the process chamber to a set flow rate, and a constant temperature heating unit that heats the source tank, a portion of the automatic pressure regulating device, a portion of the flow control system, the pipe passage, and the other pipe passage, to a set temperature.
摘要翻译：原料蒸发供给装置包括载气供给源，储存原料的源罐，向原料罐的内部上部空间部供给载气的流路，安装在流路上的自动调压装置，控制内部上部空间部分的压力达到设定压力，从内部上部空间部分向处理室供应混合气体（原料蒸汽和载体气体的混合物）的另一个流路，安装在该另一个流动通道并且自动调节供给到处理室的混合气体的流量到设定的流量;以及恒温加热单元，其将源箱加热，自动调压装置的一部分，流量控制系统的一部分，管道通道和另一个通道，达到设定温度。

84. 发明申请

US20130220433A1 APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AND SUPPLYING GAS BY USE OF THIS APPARATUS 有权
标题翻译：用于分配和供应气体的装置和使用本装置分配和供应气体的方法
公开(公告)号：US20130220433A1
公开(公告)日：2013-08-29
申请号：US13779101
申请日：2013-02-27
申请人： Fujikin Incorporated
发明人： Yohei Sawada , Nobukazu Ikeda , Ryousuke Dohi , Kouji Nishino
IPC分类号： G05D7/06
CPC分类号： G05D7/0641 , G05D7/0664 , Y10T137/0368 , Y10T137/776
摘要： A gas dividing/supplying apparatus includes a pressure-type flow control system, a plurality of divided flow passages connected in parallel with each other and through which gas flowing from the pressure-type flow control system is divided and supplied to a process chamber, thermal-type mass flow sensors disposed in the divided flow passages, respectively, motor-operated valves disposed on a downstream side of the thermal-type mass flow sensors, respectively, and switching-type controllers that control opening and closing of the motor-operated valves, respectively, and, in the apparatus, the switching-type controllers perform switching between valve opening control for maintaining the motor-operated valves at a predetermined fixed valve opening degree based on a valve opening control command signal and divided flow control for regulating an opening degree of each of the motor-operated valves by feedback control based on a flow detection signal of the thermal-type mass flow sensor by a divided flow control command signal.
摘要翻译：气体分配/供给装置包括压力式流量控制系统，多个彼此并联连接的分流流路，从压力式流量控制系统流出的气体通过该流路分配并供给到处理室，热量分别设置在分流道中的质量流量传感器分别设置在热型质量流量传感器的下游侧的电动阀以及控制电动阀的开闭的开关型控制器并且在该装置中，开关型控制器基于开阀控制命令信号进行将电动阀维持在预定的固定阀开度的开阀控制之间的切换，以及用于调节开度的分流控制通过基于热型质量流量传感器的流量检测信号的反馈控制来计算每个电动阀的程度分流控制指令信号。

85. 发明授权

US12105019B2 Density measurement device 有权
公开(公告)号：US12105019B2
公开(公告)日：2024-10-01
申请号：US17637617
申请日：2020-08-31
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Masahiko Takimoto , Kazuteru Tanaka , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01N21/27 , G01N21/05 , G01N21/17
CPC分类号： G01N21/274 , G01N21/05 , G01N21/1717 , G01N2021/1731
摘要： The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, a first light-transmission member 11 for transmitting light from the light source to the measurement cell, a second light transmission member 12 for transmitting light from the measurement cell to the photodetector, a lens 3A provided in the fluid unit, the lens 3A being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensor 5 for measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuit 28 for detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

86. 发明授权

US12078590B2 Concentration measuring method, and concentration measuring device 有权
公开(公告)号：US12078590B2
公开(公告)日：2024-09-03
申请号：US17905486
申请日：2021-03-04
申请人： TOKUSHIMA UNIVERSITY , FUJIKIN INCORPORATED
发明人： Yoshihiro Deguchi , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01N21/3504 , G01N21/27 , G01N21/31
CPC分类号： G01N21/274 , G01N21/314 , G01N21/3504
摘要： A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas. When the absorption peak wavelength of the measurement gas is longer than the peak wavelength of the light source, a reference gas having a longer absorption peak wavelength than the peak wavelength of the light source is used, and when the absorption peak wavelength of the measurement gas is shorter than the peak wavelength of the light source, a reference gas having a shorter absorption peak wavelength than the peak wavelength of the light source is used.

87. 发明授权

US11994482B2 Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method 有权
公开(公告)号：US11994482B2
公开(公告)日：2024-05-28
申请号：US17604982
申请日：2020-04-20
申请人： FUJIKIN INCORPORATED
发明人： Atsushi Hidaka , Katsuyuki Sugita , Takatoshi Nakatani , Kouji Nishino , Nobukazu Ikeda
IPC分类号： B06B1/06 , F16K37/00 , G01N27/02
CPC分类号： G01N27/028 , F16K37/0083
摘要： The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.

88. 发明授权

US11976748B2 Diaphragm valve 有权
公开(公告)号：US11976748B2
公开(公告)日：2024-05-07
申请号：US17638772
申请日：2020-06-12
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Masaaki Nagase , Atsushi Hidaka , Kazuyuki Morisaki , Keisuke Ideguchi , Kosuke Sugimoto , Masafumi Kitano , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K7/17 , C09D127/12 , F16K7/14 , F16K25/00
CPC分类号： F16K7/17 , C09D127/12 , F16K7/14 , F16K25/005
摘要： A diaphragm valve includes a body (3) having a flow path (2), a seat (4) formed in the flow path (2), a metal diaphragm (5) for opening and closing the flow path (2), a pair of clamping parts (6) and (7) for claiming peripheral edge portions of the metal diaphragm (5) to fix the metal diaphragm (5) to the body (3), and an actuator (8) for abutting the metal diaphragm (5) to the seat (4) or separating the metal diaphragm from the seat (4), wherein a fluorine resin coating is formed on a seat side surface (5a) of the metal diaphragm (5) at least in a contact region (B-A) with the seat (4) in a region (C) surrounded by a clamping region (D-C) between the seat side surface (5a) and one of the pair of clamping portions (6, 7), excluding the clamping region (D-C).

89. 发明授权

US11873916B2 Fluid control device, fluid supply system, and fluid supply method 有权
公开(公告)号：US11873916B2
公开(公告)日：2024-01-16
申请号：US18003259
申请日：2021-06-15
申请人： FUJIKIN INCORPORATED
发明人： Masahiko Takimoto , Toshihide Yoshida , Tsutomu Shinohara , Kouji Nishino
IPC分类号： F16K31/02 , G05D7/06 , H01L21/67 , F16K37/00
CPC分类号： F16K31/02 , G05D7/0623 , G05D7/0635 , F16K37/00 , F16K37/005 , G05D7/0652 , H01L21/67017
摘要： A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

90. 发明授权

US11630058B2 Concentration measurement device 有权
公开(公告)号：US11630058B2
公开(公告)日：2023-04-18
申请号：US17806349
申请日：2022-06-10
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Kazuteru Tanaka , Keiji Hirao , Tadayuki Yakushijin , Kouji Nishino , Michio Yamaji , Nobukazu Ikeda
IPC分类号： G01N21/33
摘要： A concentration measuring device 100 comprises: a measurement cell 4 having a flow path, a light source 1, a photodetector 7 for detecting light emitted from the measurement cell, and an arithmetic circuit 8 for calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portion 3 fixed to the cell body so as to contact the flow path, and a reflective member 5 for reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell body 40 by a window holding member 30 via a gasket 15, an annular sealing protrusion 15a is provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusion 42a is also provided on a support surface 42 of the cell body for supporting the second surface opposite to the first surface of the gasket.

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