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    • 89. 发明授权
    • Integrated extraction electrode manipulator for ion source
    • 用于离子源的集成提取电极操纵器
    • US09318302B1
    • 2016-04-19
    • US14674694
    • 2015-03-31
    • Axcelis Technologies, Inc.
    • Bo VanderbergJoseph ValinskiMichael Cristoforo
    • H01J27/02H01J37/08H01J37/30H01J37/317
    • H01J37/3171H01J27/024H01J37/08H01J2237/024H01J2237/061
    • A modular ion source and extraction apparatus comprises an ion source chamber selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture. An extraction electrode is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is electrically grounded and configured to extract ions from the ion source chamber. One or more linkages operably couple to the ion source chamber, and one or more insulators couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes.
    • 模块化离子源和提取装置包括选择性地电耦合到电压电位的离子源室,其中离子源室包括提取孔。 提取电极位于靠近离子源室的提取孔的位置,其中提取电极被电接地并被配置为从离子源室提取离子。 一个或多个键可操作地耦合到离子源室,并且一个或多个绝缘体将引出电极耦合到相应的一个或多个键,其中一个或多个绝缘体将相应的一个或多个键与引出电极电绝缘,其中电 将引出电极与离子源室绝缘。 一个或多个致动器可操作地将所述一个或多个连杆耦合到所述离子源室,其中所述一个或多个致动器被配置成相对于所述离子源室平移所述一个或多个连杆,其中在所述离心源室中平移所述引出电极 。
    • 90. 发明授权
    • Locking pin clamp
    • 锁定销夹
    • US09314905B2
    • 2016-04-19
    • US14509770
    • 2014-10-08
    • Zaytran, Inc.
    • Theodore Stanley Zajac, Jr.Steven Eric Wallace
    • B23Q3/08B25B5/16B25B5/06
    • B25B5/16B25B5/062Y10T403/32861
    • A pin clamp is provided, comprising a housing having a bore extending therethrough, therein defining an axis. A shaft in sliding engagement with at least a first portion of the bore comprises an axial hole. A piston coupled to the shaft is in sliding engagement with a second portion of the bore. A clevis has a clevis base and two clevis prongs extending along the axis. The clevis base an axial hole and first and second radial clevis holes, wherein the first and second radial clevis holes are opposed to one another by 90-degrees. The axial hole accepts the shaft, and the clevis base is coupled to the shaft in one of four 90-degree-opposed positions by a screw passing through one of the first and second radial clevis holes and the axial hole. Each clevis prong has a radial prong hole. A locating pin has a mounting portion configured to be coupled to the housing in one of the four 90-degree-opposed positions. A clevis pin selectively couples a tang end of a clamping arm to the clevis through radial prong holes of the clevis prongs. The clamping arm extends and retracts based on a position of the shaft and an engagement between an actuator pin coupled to the housing and a slot in the clamping arm.
    • 提供了一种销夹,包括一具有延伸穿过其中的孔的壳体,其中限定一轴线。 与孔的至少第一部分滑动接合的轴包括轴向孔。 联接到轴的活塞与孔的第二部分滑动接合。 U形夹具有一个U形夹座和两个沿轴线延伸的U形夹爪。 U形夹座具有轴向孔和第一和第二径向U形夹孔,其中第一和第二径向U形夹孔彼此相对90度。 轴向孔接受轴,并且U型夹座通过穿过第一和第二径向U形夹孔中的一个和轴向孔的螺钉在四个90度相对位置中的一个中联接到轴。 每个U形夹脚都有一个径向插孔。 定位销具有安装部分,其构造成在四个90度相对位置中的一个中联接到壳体。 U形夹针通过U形夹插脚的径向插孔选择性地将夹持臂的柄端连接到U形夹上。 夹持臂基于轴的位置和联接到壳体的致动器销和夹紧臂中的槽之间的接合而延伸和缩回。