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71. 发明授权

US09986628B2 Method and apparatus for generating radiation 有权
公开(公告)号：US09986628B2
公开(公告)日：2018-05-29
申请号：US14440934
申请日：2013-10-10
申请人： ASML Netherlands B.V.
发明人： Erik Roelof Loopstra , Andrei Mikhailovich Yakunin , Vadim Yevgenyevich Banine , Andrey Nikipelov , Edgar Alberto Osorio Oliveros , Alexander Matthijs Struycken , Bert Pieter Van Drieënhuizen , Jan Bernard Plechelmus Van Schoot
IPC分类号： H05G2/00 , G03F7/20 , H01S3/08 , G21K1/06 , H01S3/23 , H01S3/07 , H01S3/081 , H01S3/13 , H01S3/223
CPC分类号： H05G2/006 , G03F7/70033 , G03F7/7085 , G21K1/062 , G21K2201/067 , H01S3/073 , H01S3/08059 , H01S3/0815 , H01S3/1307 , H01S3/2232 , H01S3/2383 , H05G2/008
摘要： A method of generating radiation for a lithography apparatus. The method comprises providing a continuously renewing fuel target (50) at a plasma formation location (12) and directing a continuous-wave excitation beam (6) at the plasma formation location such that fuel within the continuously renewing fuel target is excited by the continuous-wave excitation beam to a radiation generating plasma.

72. 发明授权

US09634456B2 Gas laser oscillation apparatus of orthogonal excitation type 有权
公开(公告)号：US09634456B2
公开(公告)日：2017-04-25
申请号：US15028775
申请日：2014-05-27
申请人： MITSUBISHI ELECTRIC CORPORATION
发明人： Kouji Funaoka , Yasunari Matsumoto
IPC分类号： H01S3/041 , H01S3/0971 , H01S3/036 , H01S3/032 , H01S3/038 , H01S3/07 , H01S3/223
CPC分类号： H01S3/041 , H01S3/03 , H01S3/0326 , H01S3/036 , H01S3/038 , H01S3/0407 , H01S3/073 , H01S3/0971 , H01S3/2232
摘要： A gas laser oscillation apparatus of orthogonal excitation type includes an electric discharge region having a pair of electric discharge electrodes, an axial flow blower having a plurality of rotor vanes and working by a permanent magnet motor, a first heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to an optical axis, a second heat exchanger having a plurality of cooling fins, the cooling fins arranged on a plane perpendicular to the optical axis, a gas duct having a gas passageway and arranged between the electric discharge region and the first heat exchanger, the axial flow blower being arranged on the gas passageway. The axial flow blower is arranged on a windward side of the first heat exchanger. The second heat exchanger is arranged on a windward side of the axial flow blower.

73. 发明授权

US09484704B2 Gas circulation type laser oscillator 有权
标题翻译：气体循环式激光振荡器
公开(公告)号：US09484704B2
公开(公告)日：2016-11-01
申请号：US14712348
申请日：2015-05-14
申请人： FANUC CORPORATION
发明人： Hiroyuki Yoshida
IPC分类号： H01S3/034 , H01S3/036 , H01S3/07 , H01S3/097 , H01S3/104 , H01S3/083 , H01S3/223 , H01S3/0971 , H01S3/03
CPC分类号： H01S3/036 , H01S3/03 , H01S3/0346 , H01S3/073 , H01S3/0835 , H01S3/09705 , H01S3/0971 , H01S3/104 , H01S3/223 , H01S3/2232
摘要： A laser oscillator comprising an electric discharge excitation part having a discharge tube, and generates laser by excitation discharge of a laser gas flow through the inside of the discharge tube, an optical resonance part which has optical components attached to outsides of end walls of the discharge tube, and resonates laser generated in the discharge tube, and blower piping which connects an intake port and exhaust port of the discharge tube to form a circulation path of laser gas. The end walls of the discharge tube are provided with through holes which connect the inside of the discharge tube and the optical components, and blocking members are arranged in the through holes so as to block the flow of laser gas through the through holes toward the optical components.
摘要翻译：一种激光振荡器，包括具有放电管的放电激励部分，并且通过激发气体流动通过放电管内部产生激光;光学谐振部件，其具有附接到放电端壁外侧的光学部件并且使在放电管中产生的激光谐振，以及连接放电管的进气口和排气口的鼓风机配管，以形成激光气体的循环路径。放电管的端壁设置有连接放电管内部和光学部件的通孔，并且阻挡部件布置在通孔中，以阻止激光气体通过通孔朝向光学组件。

74. 发明授权

US09293885B2 Ultraviolet triply-optically-pumped atomic lasers (TOPAL) 有权
标题翻译：紫外线三光源泵浦原子激光器（TOPAL）
公开(公告)号：US09293885B2
公开(公告)日：2016-03-22
申请号：US14770778
申请日：2014-03-06
申请人： William F Krupke , David Eimerl
发明人： William F Krupke , David Eimerl
IPC分类号： H01S3/30 , H01S3/094 , H01S3/227
CPC分类号： H01S3/094092 , H01S3/073 , H01S3/08027 , H01S3/094096 , H01S3/1312 , H01S3/227 , H01S2301/02
摘要： A continuous-wave (CW), ultraviolet triply-optically-pumped atomic laser (TOPAL) is disclosed. The inventive laser device includes a laser active media comprising a mixture of a neutral atomic vapor and one or more buffer gases. The gain mixture is placed within a segmented gain cell, allowing for periodic, selected spectral filtering of deleterious ASE transitions; the segmented gain cell, in turn, is placed within an optical cavity with a high Q at a specified ultraviolet wavelength, and is successively, resonantly excited by three drive pump lasers, in three energy-contiguous visible/IR electric-dipole allowed transitions, producing a steady-state electron population inversion density between a high-lying electronic energy level and the ground electronic level, and producing laser emission on a UV transition (within the spectral range ˜230 to ˜370 nm) terminating on the ground electronic level.
摘要翻译：公开了连续波（CW），紫外三光轴泵浦原子激光器（TOPAL）。本发明的激光装置包括包含中性原子蒸汽和一种或多种缓冲气体的混合物的激光活性介质。增益混合物放置在分段增益单元内，允许对有害ASE过渡进行周期性选择的光谱滤波; 分段增益单元又被置于具有指定紫外线波长的高Q的光腔内，并且在三个能量连续的可见/ IR电偶极允许过渡中被三个驱动泵激光器相继地共振激发，在高电平的电子能级和地面电子级之间产生稳态电子群反演密度，并在地面电子水平上产生UV过渡（范围〜230〜〜370nm）内的激光发射。

75. 发明授权

US09130343B2 Gas laser oscillator having function of judging start of discharge 有权
标题翻译：气体激光振荡器具有判断放电开始的功能
公开(公告)号：US09130343B2
公开(公告)日：2015-09-08
申请号：US14223233
申请日：2014-03-24
申请人： FANUC CORPORATION
发明人： Tooru Nukui
IPC分类号： H01S3/00 , H01S3/097 , H01S3/07 , H01S3/036
CPC分类号： H01S3/09702 , H01S3/0014 , H01S3/036 , H01S3/073 , H01S3/09705
摘要： A gas laser oscillator including a discharge tube provided in a gas channel through which a laser gas circulates; an output command part outputting a power output command; a power supply part applying to the discharge tube a discharge tube voltage corresponding to a power output command value; a voltage detector detecting the discharge tube voltage; and a discharge start judging part judging if a discharge has been started in the discharge tube based on a ratio of change of the discharge tube voltage. The output command part increases the power output command value in steps by an increment obtained by dividing a power output command value corresponding to a discharge start voltage serving as a predetermined reference by a number of steps of 2 or more, at a step time interval determined by using as a reference the time required until the power supply part responds to the power output command.
摘要翻译：一种气体激光振荡器，包括设置在激光气体通过的气体通道中的放电管; 输出功率输出指令的输出指令部; 向放电管施加与功率输出指令值对应的放电管电压的电源部; 检测放电管电压的电压检测器; 以及放电开始判断部，其基于放电管电压的变化率来判断放电管中是否已经开始放电。输出指令部以步骤2以上的阶数将与对应于作为规定基准的放电开始电压对应的功率输出指令值除以与步骤2以上的步进值相对应的增量，逐步增加功率输出指令值通过使用电源部分响应电力输出命令所需的时间作为参考。

76. 发明授权

US08752465B2 Laser weapon system and method 有权
标题翻译：激光武器系统和方法
公开(公告)号：US08752465B2
公开(公告)日：2014-06-17
申请号：US13692620
申请日：2012-12-03
申请人： Lasermax, Inc.
发明人： William Houde-Walter
IPC分类号： F41F5/00 , F42B5/00 , H01S3/0979
CPC分类号： F41H13/005 , F41A33/02 , H01S3/03 , H01S3/073 , H01S3/0953
摘要： A laser weapon system includes a chamber configured to direct a post-detonation gas flow between a first mirror and a second mirror, and an ejectable ammunition cartridge containing a first gas and a second gas. The cartridge is fluidly connected to the chamber.
摘要翻译：激光武器系统包括：腔室，被配置为引导第一反射镜和第二反射镜之间的后引爆气流，以及包含第一气体和第二气体的可弹出弹药盒。墨盒流体连接到腔室。

77. 发明授权

US08279902B2 Laser device that stably controls very low laser power 有权
标题翻译：稳定地控制非常低的激光功率的激光装置
公开(公告)号：US08279902B2
公开(公告)日：2012-10-02
申请号：US13039715
申请日：2011-03-03
申请人： Masahiro Honda , Koji Hayano , Atsushi Mori
发明人： Masahiro Honda , Koji Hayano , Atsushi Mori
IPC分类号： H01S3/00 , H01S3/13
CPC分类号： H01S3/134 , H01S3/036 , H01S3/073 , H01S3/0971
摘要： A laser device comprises: first and second laser excitation regions that are disposed in series each other; a first power supply unit (PSU1) that injects a first energy into the first laser excitation region; and a second power supply unit (PSU2) that injects a second energy into the second laser excitation region, wherein the first power supply unit injects a predetermined excitation energy equal to or higher than a critical injection energy at which laser oscillation starts into the first laser excitation region as the first energy and the second power supply unit injects energy between a preliminary excitation energy needed for preliminary discharge and the critical injection energy into the second laser excitation region as the second energy, so as to control laser power. Consequently, the laser device can stably output very low laser even though it is a high power laser.
摘要翻译：激光装置包括：彼此串联布置的第一和第二激光激发区域; 第一电源单元（PSU1），其向第一激光激发区域注入第一能量; 以及将第二能量注入到所述第二激光激发区域的第二电源单元（PSU2），其中，所述第一电源单元注入等于或高于激光振荡开始到所述第一激光器的临界注入能量的预定激发能量作为第一能量的激发区域和第二电力供给单元将预备放电所需要的预备激励能量与进入第二激光激励区域的临界注入能量之间的能量注入第二能量，以控制激光功率。因此，尽管激光装置是高功率激光器，但激光装置可以稳定地输出非常低的激光。

78. 发明授权

US08238396B2 Gas laser oscillator having function for judging discharge initiation 有权
标题翻译：具有判断放电起始功能的气体激光振荡器
公开(公告)号：US08238396B2
公开(公告)日：2012-08-07
申请号：US13038548
申请日：2011-03-02
申请人： Hajime Ikemoto , Masahiro Honda
发明人： Hajime Ikemoto , Masahiro Honda
IPC分类号： H01S3/13 , H01S3/00 , H01S3/22 , H01S3/223
CPC分类号： H01S3/0971 , H01S3/036 , H01S3/073 , H01S3/134
摘要： A gas laser oscillator capable of initiating discharge, without applying excess voltage to a discharge tube, and correctly and rapidly judging the initiation of discharge. The oscillator has a laser power commanding part adapted to generate a laser power command including a pulse superimposed on a forefront of each step, a voltage applying part adapted to apply a voltage to a discharge tube based on the laser power command, a discharge tube voltage detecting part adapted to detect the discharge tube voltage, a discharge tube voltage monitoring part adapted to monitor the discharge tube voltage, and a discharge initiation judging part adapted to judge that the discharge is initiated when the difference, between a change rate of the monitored voltage and a change rate of the discharge tube voltage predetermined based on data obtained while the discharge is normally carried out, is smaller than a predetermined threshold.
摘要翻译：能够在不向放电管施加过电压的情况下开始放电的气体激光振荡器，能够正确，快速地判断放电的开始。所述振荡器具有激光功率指令部，其适于产生包括叠加在每一步最前面的脉冲的激光功率指令，适用于基于所述激光功率指令向放电管施加电压的电压施加部，放电管电压用于检测放电管电压的检测部分，适于监测放电管电压的放电管电压监测部分，以及适于在所监视电压的变化率之间的差异判断放电开始的放电开始判定部分并且基于在正常进行放电时获得的数据预先确定的放电管电压的变化率小于预定阈值。

79. 发明授权

US08017924B2 Drive laser delivery systems for EUV light source 有权
标题翻译：驱动用于EUV光源的激光输送系统
公开(公告)号：US08017924B2
公开(公告)日：2011-09-13
申请号：US12322669
申请日：2009-02-04
申请人： Alexander N. Bykanov , Igor V. Fomenkov , Alexander I. Ershov
发明人： Alexander N. Bykanov , Igor V. Fomenkov , Alexander I. Ershov
IPC分类号： H01J35/20
CPC分类号： H05G2/003 , G03F7/70033 , H01S3/0064 , H01S3/073 , H01S3/0805 , H01S3/08054 , H01S3/08059 , H01S3/083 , H01S3/10092 , H01S3/105 , H01S3/1066 , H01S3/115 , H01S3/121 , H01S3/127 , H01S3/2232 , H01S3/2316 , H01S3/2325 , H01S3/2383 , H05G2/008
摘要： An LPP EUV light source is disclosed having an optic positioned in the plasma chamber for reflecting EUV light generated therein and a laser input window. For this aspect, the EUV light source may be configured to expose the optic to a gaseous etchant pressure for optic cleaning while the window is exposed to a lower gaseous etchant pressure to avoid window coating deterioration. In another aspect, an EUV light source may comprise a target material positionable along a beam path to participate in a first interaction with light on the beam path; an optical amplifier; and at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.
摘要翻译：公开了一种LPP EUV光源，其具有位于等离子体室中的光学器件，用于反射在其中产生的EUV光和激光输入窗口。对于该方面，EUV光源可以被配置为将窗口暴露于更低的气体蚀刻剂压力以将窗口暴露于气体蚀刻剂压力以进行光学清洁，以避免窗口涂层变质。在另一方面，EUV光源可以包括沿着光束路径定位以参与与光束路径上的光的第一相互作用的目标材料; 光放大器; 以及至少一个光导向光子从第一相互作用散射到光放大器中以在光束路径上产生激光束，用于随后与目标材料的相互作用以产生EUV发光等离子体。

80. 发明授权

US07782922B2 Excimer laser device operable at high repetition rate and having high band-narrowing efficiency 有权
标题翻译：准分子激光装置可以高重复率操作并且具有高带窄效率
公开(公告)号：US07782922B2
公开(公告)日：2010-08-24
申请号：US12071048
申请日：2008-02-14
申请人： Tsukasa Hori , Takanobu Ishihara , Kouji Kakizaki
发明人： Tsukasa Hori , Takanobu Ishihara , Kouji Kakizaki
IPC分类号： H01S3/22 , H01S3/223 , H01S3/03
CPC分类号： H01S3/225 , H01S3/0057 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/073 , H01S3/08036 , H01S3/0805 , H01S3/2251 , H01S3/2316 , H01S3/2325
摘要： A narrow-band discharge excited laser device including a laser chamber having a laser gas sealed therein, a pair of electrodes provided within the laser chamber to face each other with a predetermined distance therebetween, a band-narrowing module having a magnifying prism and a grating and receiving laser light passing through a slit, and a cross-flow fan circulating the laser gas passing between the electrodes, in which a pulsed voltage is applied from a high-voltage power supply to the pair of electrodes to generate electric discharge between the electrodes, and the pair of electrodes have a width of 1 to 2 mm, a ratio between the electrode width and the inter-electrode distance (electrode with inter-electrode distance) being 0.25 to 0.125.
摘要翻译：一种窄带放电激发激光装置，包括：激光腔，其内部密封有激光气体;一对电极，设置在激光腔内，以相互间隔预定距离彼此面对;具有放大棱镜和光栅的带窄模块并且接收通过狭缝的激光，并且横流风扇循环通过电极之间的激光气体，其中从高压电源向该对电极施加脉冲电压，以在电极之间产生放电，一对电极的宽度为1〜2mm，电极宽度与电极间距离（电极间距离的电极）的比例为0.25〜0.125。

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