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    • 80. 发明授权
    • Vertical bipolar transistor
    • 垂直双极晶体管
    • US07880270B2
    • 2011-02-01
    • US11792015
    • 2005-12-12
    • Bernd HeinemannHolger RückerJürgen DrewsSteffen Marschmeyer
    • Bernd HeinemannHolger RückerJürgen DrewsSteffen Marschmeyer
    • H01L29/732
    • H01L29/66287H01L29/1004H01L29/66242H01L29/732H01L29/7378
    • A vertical heterobipolar transistor comprising a substrate of semiconductor material of a first conductivity type and an insulation region provided therein, a first semiconductor electrode arranged in an opening of the insulation region and comprising monocrystalline semiconductor material of a second conductivity type, which is either in the form of a collector or an emitter, and which has a first heightwise portion and an adjoining second heightwise portion which is further away from the substrate interior in a heightwise direction, wherein only the first heightwise portion is enclosed by the insulation region in lateral directions perpendicular to the heightwise direction, a second semiconductor electrode of semiconductor material of the second conductivity type, which is in the form of the other type of semiconductor electrode, a base of monocrystalline semiconductor material of the first conductivity type, and a base connection region having a monocrystalline portion which in a lateral direction laterally surrounds the second heightwise portion, which is further towards the substrate interior as viewed from the base, of the first semiconductor electrode, and which rests with its underside directly on the insulation region.
    • 一种垂直异双极晶体管,包括第一导电类型的半导体材料的衬底和设置在其中的绝缘区域,布置在绝缘区域的开口中的第一半导体电极,并且包括第二导电类型的单晶半导体材料, 收集器或发射器的形式,并且具有第一高度部分和相邻的第二高度部分,其在高度方向上远离基板内部,其中只有第一高度方向部分被垂直的横向方向上的绝缘区域包围 第二导电类型的半导体材料的第二半导体电极是另一种类型的半导体电极的形式的第二半导体电极,第一导电类型的单晶半导体材料的基底和具有第一导电类型的基底连接区域 单晶部分 横向方向横向地围绕第二高度方向部分,第二高度方向部分从第一半导体电极的基部朝向基板内部,并且其下侧直接位于绝缘区域上。