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    • 72. 发明申请
    • Disordered Nanowire Solar Cell
    • 无序纳米线太阳能电池
    • US20110083728A1
    • 2011-04-14
    • US12579379
    • 2009-10-14
    • Robert A. StreetWilliam S. Wong
    • Robert A. StreetWilliam S. Wong
    • H01L31/0352H01L31/00H01L31/0376H01L31/0232
    • H01L31/035227H01L31/075Y02E10/548
    • A disordered nanowire solar cell includes doped silicon nanowires disposed in a disordered nanowire mat, a thin (e.g., 50 nm) p-i-n coating layer formed on the surface of the silicon nanowires, and a conformal conductive layer disposed on the upper (e.g., n-doped) layer of the p-i-n coating layer. The disordered nanowire mat is grown from a seed layer using VLS processing at a high temperature (e.g., 450° C.), whereby the crystalline silicon nanowires assume a random interwoven pattern that enhances light scattering. Light scattered by the nanowires is absorbed by p-i-n layer, causing, e.g., electrons to pass along the nanowires to the first electrode layer, and holes to pass through the conformal conductive layer to an optional upper electrode layer. Fabrication of the disordered nanowire solar cell is large-area compatible.
    • 无序的纳米线太阳能电池包括设置在无序纳米线垫中的掺杂硅纳米线,形成在硅纳米线表面上的薄(例如50nm)的针涂层,以及设置在上层(例如, 掺杂)层。 无序纳米线垫在高温(例如450℃)下使用VLS处理从种子层生长,由此晶体硅纳米线呈现增强光散射的随机交织图案。 由纳米线散射的光被p-i-n层吸收,导致例如电子沿着纳米线传递到第一电极层,并且空穴通过共形导电层到可选的上电极层。 无序纳米线太阳能电池的制造是大面积兼容的。
    • 74. 发明申请
    • Method For The Printing Of Homogeneous Electronic Material With A Multi-Ejector Print Head
    • 使用多功能喷头打印头打印均匀电子材料的方法
    • US20100231638A1
    • 2010-09-16
    • US12787371
    • 2010-05-25
    • Steven E. ReadyWilliam S. Wong
    • Steven E. ReadyWilliam S. Wong
    • B41J29/393
    • H05K3/125H01L21/288H01L21/76838H01L23/544H01L2924/0002H01L2924/00
    • Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes positioning the printhead and printing a spot onto the substrate from each ejector, determining a vertical offset between an expected location of each spot along a vertical axis and the actual location of the spot along the vertical axis, calculating a linear fit line for the vertical offset of each spot plotted against an expected location of the spot along a horizontal axis, calculating the slope of the linear fit line, and rotating the printhead relative to the substrate according to an angle defined by the slope of the linear fit line.
    • 打印系统被公开,通过分离图案布局成离散的设计层仅具有平行布局特征产生均匀​​,平滑边缘的印刷图案(诸如集成电路(IC)图案),并且通过使用沉积到各个打印溶液液滴打印每个设计层 基质。 打印头对准操作包括定位打印头并从每个喷射器将斑点印刷到基板上,确定沿着垂直轴线的每个光点的预期位置与光点沿着垂直轴的实际位置之间的垂直偏移,计算线性拟合 每个点的垂直偏移的线对应于点沿水平轴的预期位置,计算线性拟合线的斜率,并且根据由线性拟合的斜率限定的角度相对于基底旋转打印头 线。
    • 75. 发明申请
    • Method For The Printing Of Homogeneous Electronic Material With A Multi-Ejector Print Head
    • 使用多功能喷头打印头打印均匀电子材料的方法
    • US20100231637A1
    • 2010-09-16
    • US12787367
    • 2010-05-25
    • Steven E. ReadyWilliam S. Wong
    • Steven E. ReadyWilliam S. Wong
    • B41J29/393
    • H05K3/125H01L21/288H01L21/76838H01L23/544H01L2924/0002H01L2924/00
    • Printing systems are disclosed that produce homogenous, smooth edged printed patterns (such as integrated circuit (IC) patterns) by separating pattern layouts into discrete design layers having only parallel layout features, and by printing each design layer using individual print solution droplets deposited onto the substrate. A printhead alignment operation includes printing a first spot from a first printhead ejector on a first substrate location, positioning a second ejector over the first substrate location and printing a second spot, measuring a distance between the first spot and the second spot, adjusting a rotational orientation between the print head and the substrate to reduce the distance between the first spot and the second spot, and then repeating the printing, measuring and adjusting processes until the first and second spots are separated by a predefined threshold value apart. The design layers are then printed.
    • 公开了印刷系统,其通过将图案布局分离成仅具有平行布局特征的离散设计层,并且通过使用沉积在该图案上的各个印刷液滴印刷每个设计层来产生均匀的平滑边缘印刷图案(例如集成电路(IC)图案) 基质。 打印头对准操作包括在第一基板位置上从第一打印头喷射器打印第一斑点,将第二喷射器定位在第一基板位置上并打印第二光斑,测量第一光斑和第二光点之间的距离, 打印头和基板之间的取向以减小第一点和第二点之间的距离,然后重复打印,测量和调整过程,直到第一和第二点间隔一预定阈值。 然后打印设计图层。
    • 80. 发明授权
    • Detecting defective ejector in digital lithography system
    • 在数字光刻系统中检测有缺陷的喷射器
    • US07514114B2
    • 2009-04-07
    • US11218416
    • 2005-09-01
    • William S. WongSteven E. ReadyAna Claudia Arias
    • William S. WongSteven E. ReadyAna Claudia Arias
    • C23C16/52B05D5/12
    • B41J29/393
    • A digital lithography system prints a large-area electronic device by dividing the overall device printing process into a series of discrete feature printing sub-processes, where each feature printing sub-process involves printing both a predetermined portion (feature) of the device in a designated substrate area, and an associated test pattern in a designated test area that is remote from the feature. At the end of each feature printing sub-process, the test pattern is analyzed, e.g., using a camera and associated imaging system, to verify that the test pattern has been successfully printed. A primary ejector is used until an unsuccessfully printed test pattern is detected, at which time a secondary (reserve) ejector replaces the primary ejector and reprints the feature associated with the defective test pattern. When multiple printheads are used in parallel, analysis of the test pattern is used to efficiently identify the location of a defective ejector.
    • 数字光刻系统通过将整个设备打印过程划分成一系列离散特征打印子过程来打印大面积电子设备,其中每个特征打印子过程涉及将设备的预定部分(特征)打印在一个 指定的基板区域以及远离该特征的指定测试区域中的关联测试图案。 在每个特征打印子过程结束时,分析测试图案,例如使用相机和相关联的成像系统来验证测试图案是否已被成功打印。 使用初级喷射器,直到检测到未成功打印的测试图案,此时次要(预留)喷射器取代主喷射器并重印与缺陷测试图案相关的特征。 当并行使用多个打印头时,使用测试图案的分析来有效地识别有缺陷的喷射器的位置。