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71. 发明申请

US20080002291A1 Plated perpendicular magnetic recording main pole process and enhancements 失效
标题翻译：电镀垂直磁记录主极过程和增强
公开(公告)号：US20080002291A1
公开(公告)日：2008-01-03
申请号：US11411561
申请日：2006-04-25
申请人： Hamid Balamane , Christian Bonhote , Yimin Hsu , Aaron Neuhaus , Aron Pentek , Yi Zheng
发明人： Hamid Balamane , Christian Bonhote , Yimin Hsu , Aaron Neuhaus , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is formed by depositing an electrically conductive seed layer over a substrate, and then depositing a photo resist layer over the seed layer. The photo resist layer is photolithographically exposed and developed to form an opening or trench in the photoreist layer, the opening defining the pattern of the write pole. A magnetic material is then plated into the opening in the photoresist layer. The photo resist layer can then be removed by a chemical lift off, and portions of the seed layer that are not covered by the write pole can be removed by ion milling.
摘要翻译：一种制造用于垂直磁记录的磁写头的方法，其具有具有非常窄的轨道宽度和良好控制的临界尺寸的写极。写极通过在衬底上沉积导电种子层，然后在种子层上沉积光致抗蚀剂层而形成。光致抗蚀剂层被光刻地曝光和显影以在光致镜层中形成开口或沟槽，该开口限定写入极的图案。然后将磁性材料电镀在光致抗蚀剂层的开口中。然后可以通过化学剥离去除光致抗蚀剂层，并且可以通过离子铣削除去未被写入极覆盖的种子层的部分。

72. 发明申请

US20070268625A1 Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness 有权
标题翻译：一种制造具有后挡板的磁写头的方法，其具有精确控制的后屏蔽间隙厚度
公开(公告)号：US20070268625A1
公开(公告)日：2007-11-22
申请号：US11439297
申请日：2006-05-22
申请人： Ming Jiang , Aron Pentek , Yi Zheng
发明人： Ming Jiang , Aron Pentek , Yi Zheng
IPC分类号： G11B5/147 , G11B5/127
CPC分类号： G11B5/3143 , G11B5/112 , G11B5/1278 , G11B5/3163 , Y10T29/49021 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. The exposed thin alumina layer over the trailing edge of the write pole can then either be removed or left intact to form a portion of a trailing shield gap layer. Another Rh layer can then be deposited to provide a non-magnetic trailing shield gap. A magnetic material is then deposited to form the trailing shield. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
摘要翻译：一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。随后沉积一层薄薄的Rh。然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。然后可以将写入极的后缘上的暴露的薄氧化铝层去除或保持不变，以形成后屏蔽间隙层的一部分。然后可以沉积另一个Rh层以提供非磁性的后屏蔽间隙。然后沉积磁性材料以形成尾部屏蔽。由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

73. 发明申请

US20070245545A1 Method of manufacturing a wrap around shield for a perpendicular write pole using a laminated mask 失效
标题翻译：使用层压掩模制造用于垂直写入极的环绕屏蔽的方法
公开(公告)号：US20070245545A1
公开(公告)日：2007-10-25
申请号：US11412038
申请日：2006-04-25
申请人： Aron Pentek , Yi Zheng
发明人： Aron Pentek , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163 , Y10T29/49021 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield that wraps around the write pole. The method allows the trailing shield to be constructed with a very well controlled trailing gap thickness and also allows the write pole to be constructed with a well controlled track width and a straight, flat trailing edge. The method includes depositing a magnetic write pole over a substrate and forming a mask structure over the write pole layer. The mask structure includes an end point detection layer that can be removed by reactive ion etching. An ion mill is performed to form a write pole by removing magnetic write pole material that is not covered by the mask layer. A layer of non-magnetic material such as alumina is deposited and is ion milled to expose the end point detection layer. The end point detection layer is then removed by reactive ion etch and a magnetic wrap around trailing shield is deposited.
摘要翻译：一种用于构造用于垂直磁记录的磁写头的方法，该写头具有一个写磁极，带有围绕写磁极的后屏蔽。该方法允许尾部屏蔽件构造得非常好地控制拖尾间隙厚度，并且还允许写极构造具有良好控制的轨道宽度和直的平坦后缘。该方法包括在衬底上沉积磁性写入极，并在写入极层上形成掩模结构。掩模结构包括可以通过反应离子蚀刻去除的端点检测层。通过去除未被掩模层覆盖的磁性写入极材料来执行离子磨以形成写入极。沉积一层非磁性材料如氧化铝，并将其离子研磨以露出终点检测层。然后通过反应离子蚀刻除去端点检测层，并且沉积围绕后屏蔽的磁性卷。

74. 发明申请

US20070124917A1 Integration of small flash field, zero bias, and non-reactive ion milling for pole tip uniformity 有权
标题翻译：集成小闪场，零偏置和非反应离子铣削，使刀尖均匀
公开(公告)号：US20070124917A1
公开(公告)日：2007-06-07
申请号：US11297228
申请日：2005-12-07
申请人： Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
发明人： Hamid Balamame , Daniel Bedell , Mary Gutberlet , Clarence Hsieh , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49039 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
摘要翻译：一种制造磁写头的方法，其提供改进的极关键尺寸控制，例如改进的轨道宽度控制（改进的σ）和改进的闪点控制。该方法涉及几个工艺改进的组合，例如使用零印刷偏压光刻地图案化限定光致抗蚀剂框架的P 2极尖端并且还使用小的闪光场。该方法还涉及使用非反应性离子蚀刻来使用第二极（P 2）作为掩模将第一极（P1）切口。

75. 发明授权

US08547660B2 Magnetic write head manufactured by an enhanced damascene process producing a tapered write pole with a non-magnetic spacer and non-magnetic bump 有权
标题翻译：通过增强的镶嵌工艺制造的磁性写头，其产生具有非磁性间隔物和非磁性凸块的锥形写柱
公开(公告)号：US08547660B2
公开(公告)日：2013-10-01
申请号：US12641251
申请日：2009-12-17
申请人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
发明人： Donald G. Allen , Amanda Baer , Yingjian Chen , Andrew Chiu , Liubo Hong , Wen-Chien D. Hsiao , Edward H. P. Lee , Fenglin Liu , Aron Pentek , Katalin Pentek , Kyusik Shin , Yi Zheng , Qiping Zhong , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/314 , G11B5/3143 , G11B5/3146 , G11B5/315 , Y10T428/11 , Y10T428/1171
摘要： A magnetic write head having a tapered trailing edge and having a magnetic layer formed over a trailing edge of the write pole at a location recessed from the ABS, the magnetic layer being separated from the trailing edge of the write pole by a thin non-magnetic layer. The thin non-magnetic layer is preferably sufficiently thin that the magnetic layer can function as a portion of the write pole in a region removed from the ABS. A trailing magnetic shield is formed over the write pole and is separated from the write pole by a non-magnetic trailing gap layer. A non-magnetic spacer layer can be formed over the magnetic layer to provide additional separation between the magnetic layer and the trailing magnetic shield.
摘要翻译：一种具有锥形后缘并具有磁性层的磁性写头，该磁性层形成在从ABS的凹陷处的写入极的后缘上，该磁性层通过薄的非磁性的方式与写入极的后缘分离层。薄的非磁性层优选地足够薄，使得磁性层可以在从ABS去除的区域中用作写入极的一部分。尾磁屏蔽形成在写极上，并且通过非磁性拖尾间隙层与写极分离。可以在磁性层之上形成非磁性间隔层，以在磁性层和尾部磁屏蔽之间提供额外的间隔。

76. 发明授权

US08054586B2 Write head design and method for reducing adjacent track interference at very narrow track widths 有权
标题翻译：用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
公开(公告)号：US08054586B2
公开(公告)日：2011-11-08
申请号：US11286077
申请日：2005-11-23
申请人： Hamid Balamane , Yimin Hsu , Aron Pentek , Yi Zheng
发明人： Hamid Balamane , Yimin Hsu , Aron Pentek , Yi Zheng
IPC分类号： G11B5/33 , G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49021
摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.
摘要翻译：垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

77. 发明申请

US20110261485A1 MAGNETIC WRITE HEAD HAVING A WRAP AROUND TRAILING SHIELD WITH AN ASYMETRICAL SIDE GAP 有权
标题翻译：带有边界边缘的带有纹理的磁带头磁头
公开(公告)号：US20110261485A1
公开(公告)日：2011-10-27
申请号：US12766764
申请日：2010-04-23
申请人： Aron Pentek , Yi Zheng
发明人： Aron Pentek , Yi Zheng
IPC分类号： G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A magnetic write head having a magnetic write pole with a wrap around magnetic trailing shield. The wrap around magnetic trailing shield is separated by a first non-magnetic side gap at a first side of the write pole and by a second non-magnetic side gap at a second side of the write pole. The first second non-magnetic side gap is larger than the first non-magnetic side gap and is preferably at least twice the thickness of the first non-magnetic side gap. This design provides additional protection adjacent track interference at one side of the write pole and additional protection against magnetic write field loss at the other side of the write pole.
摘要翻译：一种具有磁性写磁极的磁性写头，其具有围绕磁性后屏蔽的环绕。绕磁屏蔽的缠绕由写磁极的第一侧的第一非磁性侧隙和写极的第二侧的第二非磁性侧间隙分开。第一第二非磁性侧间隙大于第一非磁性侧间隙，优选为第一非磁性侧间隙的厚度的至少两倍。该设计提供了额外的保护，在写入极的一侧附近有跟踪干扰，并且在写入极的另一侧具有额外的防磁磁场损耗的保护。

78. 发明申请

US20110135962A1 PMR WRITER AND METHOD OF FABRICATION 有权
标题翻译： PMR WRITER和制造方法
公开(公告)号：US20110135962A1
公开(公告)日：2011-06-09
申请号：US12634480
申请日：2009-12-09
申请人： LIUBO HONG , Aron Pentek , Yi Zheng
发明人： LIUBO HONG , Aron Pentek , Yi Zheng
IPC分类号： G11B5/33
CPC分类号： G11B5/1278 , G11B5/23 , G11B5/3116 , G11B5/315 , G11B5/3163 , Y10T428/1171
摘要： Methods for fabrication of tapered magnetic poles with a non-magnetic front bump layer. A magnetic pole may have a tapered surface at or near and air bearing surface (ABS), wherein a thickness of the write pole increases in a direction away from the ABS. A non-magnetic front bump layer may be formed on the tapered surface of the magnetic pole and away from the ABS. The front bump layer may increase the separation distance between a shield layer and the magnetic pole near the tapered surface, thereby improving the performance of the write head.
摘要翻译：用非磁性前凸块层制造锥形磁极的方法。磁极可以在空气轴承表面（ABS）处或附近具有锥形表面，其中写入极的厚度在远离ABS的方向上增加。可以在磁极的锥形表面上远离ABS形成非磁性前凸块层。前凸块层可以增加在锥形表面附近的屏蔽层和磁极之间的间隔距离，从而提高写入头的性能。

79. 发明授权

US07818875B2 Method of manufacturing a magnetic head with integration of a small flash field, zero bias, and non-reactive ion milling for pole tip uniformity 有权
标题翻译：制造具有小闪电场，零偏压和非反应离子铣削的磁头的磁头的均匀性的制造方法
公开(公告)号：US07818875B2
公开(公告)日：2010-10-26
申请号：US11297228
申请日：2005-12-07
申请人： Hamid Balamame , Daniel Wayne Bedell , Mary Kathryn Gutberlet , Clarence Kai-Sheng Hsieh , Aron Pentek , Yi Zheng
发明人： Hamid Balamame , Daniel Wayne Bedell , Mary Kathryn Gutberlet , Clarence Kai-Sheng Hsieh , Aron Pentek , Yi Zheng
IPC分类号： G11B5/187
CPC分类号： G11B5/3163 , G11B5/3116 , Y10T29/49039 , Y10T29/49041 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method of manufacturing a magnetic write head that provides improved pole critical dimension control, such as improved track width control (improved sigma) and improved flare point control. The method involves a combination of several process improvements, such as photolithographically patterning a P2 pole tip defining photoresist frame using a zero print bias and also using a small flash field. The method also involves the use of a non-reactive ion etch to notch the first pole (P1) using the second pole (P2) as a mask.
摘要翻译：一种制造磁写头的方法，其提供改进的极关键尺寸控制，例如改进的轨道宽度控制（改进的σ）和改进的闪点控制。该方法涉及几个工艺改进的组合，例如使用零印刷偏压光刻地图案化限定光致抗蚀剂框架的P2极尖端并且还使用小的闪光场。该方法还涉及使用非反应性离子蚀刻来使用第二极（P2）作为掩模来切割第一极（P1）。

80. 发明申请

US20080148552A1 METHOD OF MANUFACTURING A WRAP AROUND SHIELD FOR A PERPENDICULAR WRITE POLE USING A LAMINATED MASK WITH AN ENDPOINT DETECTION LAYER 有权
标题翻译：使用具有端点检测层的层叠掩模制造平面写入层的封装的方法
公开(公告)号：US20080148552A1
公开(公告)日：2008-06-26
申请号：US11615818
申请日：2006-12-22
申请人： Aron Pentek , Yi Zheng , Howard Gordon Zolla
发明人： Aron Pentek , Yi Zheng , Howard Gordon Zolla
IPC分类号： G11B5/127 , G11B5/33
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write pole and trailing wrap around magnetic shield for use in a perpendicular magnetic data recording system. The method includes the use of a hard mask structure with end point detection material embedded in a hard mask material. The novel hard mask structure provides the mill resistance of a hard mask, with the end point detection advantages of an end point detection layer.
摘要翻译：用于制造用于垂直磁数据记录系统的磁性写入磁极和磁性屏蔽的尾部缠绕的方法。该方法包括使用具有嵌入硬掩模材料中的端点检测材料的硬掩模结构。新颖的硬掩模结构提供了硬掩模的磨机电阻，具有终点检测层的终点检测优点。

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