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71. 发明授权

US07724360B2 Method and apparatus for inspecting foreign particle defects 有权
标题翻译：用于检查外来颗粒缺陷的方法和装置
公开(公告)号：US07724360B2
公开(公告)日：2010-05-25
申请号：US12273174
申请日：2008-11-18
申请人： Sachio Uto , Hiroyuki Nakano
发明人： Sachio Uto , Hiroyuki Nakano
IPC分类号： G01N21/00
CPC分类号： G01N21/94 , G01N21/47 , G01N21/9501
摘要： The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus.
摘要翻译：本发明涉及用于在诸如半导体器件的衬底上形成电路图案的器件制造工艺。为了能够在高速，高灵敏度的装置的制造中能够稳定地检查微小的外来粒子和图案缺陷，对要形成透明膜的检查对象进行照射，从照明方向和照明角度从多个选择中选择为最佳的发光体发射，从而通过从形成的图案中消除噪声来有效地检测来自物体或透明膜上的微小异物缺陷的散射反射光并且通过利用图像形成性能检查器评估和调整包括在检查装置中的检测光学系统的图像形成性能来优化检测光学系统。

72. 发明授权

US07643139B2 Method and apparatus for detecting defects 失效
标题翻译：检测缺陷的方法和装置
公开(公告)号：US07643139B2
公开(公告)日：2010-01-05
申请号：US11206209
申请日：2005-08-18
申请人： Yoshimasa Ohshima , Minori Noguchi , Hiroyuki Nakano
发明人： Yoshimasa Ohshima , Minori Noguchi , Hiroyuki Nakano
IPC分类号： G01N21/00
CPC分类号： G01N21/9505 , G01N21/47 , G01N21/94 , G01N21/9501
摘要： An inspection apparatus projects a laser beam on the surface of a SOI wafer and detects foreign matter on and defects in the surface of the SOI wafer by receiving scattered light reflected from the surface of the SOI wafer. The wavelength of the laser beam used by the inspection apparatus is determined so that a penetration depth of the laser beam in a Si thin film may be 10 nm or below to detect only foreign matter on and defects in the outermost surface and not to detect foreign matter and defects in a BOX layer. Only the foreign matter on and defects in the outermost surface layer can be detected without being influenced by thin-film interference by projecting the laser beam on the surface of the SOI wafer and receiving scattered light rays.
摘要翻译：检查装置将激光束投射在SOI晶片的表面上，通过接收从SOI晶片的表面反射的散射光来检测SOI晶片的异物和表面的缺陷。确定检查装置使用的激光束的波长，使得Si薄膜中的激光束的穿透深度可以为10nm以下，仅检测异物和最外表面的缺陷，并且不检测外部 BOX层的物质和缺陷。只有通过将激光束投射在SOI晶片的表面上并且接收散射光线，才能够检测出最外层的异物和缺陷，而不受薄膜干涉的影响。

73. 发明授权

US07636980B2 Wiper blade having cover member 有权
标题翻译：刮水片具有盖构件
公开(公告)号：US07636980B2
公开(公告)日：2009-12-29
申请号：US11229605
申请日：2005-09-20
申请人： Hiroyuki Nakano
发明人： Hiroyuki Nakano
IPC分类号： B60S1/38 , B60S1/40
CPC分类号： B60S1/3806
摘要： A wiper blade includes a wiper strip, a lever assembly and a cover member. The lever assembly has a connecting arrangement and holding claws. The connecting arrangement is connected to a wiper arm. The holding claws hold the wiper strip. The cover member has a cover opening, which is opened on a wiper strip side thereof. The cover member receives the lever assembly through the cover opening. In an interior space between the cover member and the wiper strip, holder end side openings, each of which is a part of the cover opening, are covered by two connecting arrangement end side cover parts. In this way, in the interior space between the cover member and the wiper strip, spaces, into which fluid intrudes, are reduced.
摘要翻译：刮水片包括刮水条，杆组件和盖构件。杠杆组件具有连接装置和固定爪。连接装置连接到刮水臂。固定爪握住刮水条。盖构件具有在其刮片条侧上打开的盖开口。盖构件通过盖开口接收杠杆组件。在盖构件和擦拭带之间的内部空间中，保持器端侧开口（其中的每一个是盖开口的一部分）被两个连接装置端侧盖部分覆盖。以这种方式，在盖构件和擦拭带之间的内部空间中，流体侵入的空间减小。

74. 发明申请

US20090142057A1 OPTICAL TRANSMISSION EQUIPMENT AND OPTICAL NETWORK 有权
标题翻译：光传输设备和光网络
公开(公告)号：US20090142057A1
公开(公告)日：2009-06-04
申请号：US12275427
申请日：2008-11-21
申请人： Hiroyuki Nakano
发明人： Hiroyuki Nakano
IPC分类号： H04J14/02 , H04B10/00
CPC分类号： H04Q11/0062 , H04J14/0206 , H04J14/0209 , H04J14/0212 , H04J14/0213 , H04J14/0217 , H04J14/022 , H04J14/0283 , H04J14/0286 , H04Q2011/0079
摘要： In order to insert a regenerator into a wavelength cross-connect equipment, there is provided at least one port that demultiplexes one wavelength among the wavelength multiplexed signals that are input to a wavelength selective switch. An output of the port that demultiplexes one wavelength is input to the regenerator, and an output of the regenerator is again input to the WSS. The wavelength output from the regenerator is converted into another wavelength different from the wavelength that is input to the regenerator and can be processed by the WSS in advance. The output from the regenerator is input to the WSS through an optical coupler or another input port of the WSS.
摘要翻译：为了将再生器插入波长交叉连接设备中，提供了至少一个端口，其将输入到波长选择开关的波长多路复用信号中的一个波长解复用。将一个波长解复用的端口的输出输入到再生器，再生器的输出再次输入到WSS。从再生器输出的波长转换成与输入到再生器的波长不同的另一个波长，并且可以由WSS预先处理。再生器的输出通过光耦合器或WSS的另一个输入端口输入到WSS。

75. 发明申请

US20090122303A1 Apparatus And Method For Inspecting Defects 有权
标题翻译：检查缺陷的装置和方法
公开(公告)号：US20090122303A1
公开(公告)日：2009-05-14
申请号：US12328357
申请日：2008-12-04
申请人： Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
发明人： Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
IPC分类号： G01N21/88
CPC分类号： G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/9513 , G01N2021/95638 , H01L22/12
摘要： A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which includes an image sensor for receiving reflected/scattered light from the substrate by irradiation of the slit-shaped light beam and converting the received light into a signal, and an image processor which processes the signal. The irradiation optical system includes a cylindrical lens and a coherency reduction optical system, which receives the light beam and emits a plurality of slit-shaped light sub-beams which are spatially reduced in coherency in a light-converging direction of the cylindrical lens. The cylindrical lens focuses the plurality of slit-shaped light sub-beams into the slit-shaped light beam irradiated to the surface of the substrate.
摘要翻译：缺陷检查装置包括：可移动台，用于安装具有作为检查对象的电路图案的基板;照射光学系统，其将来自倾斜方向的狭缝状光束照射到基板的电路图案;检测光学系统，包括图像传感器，用于通过照射狭缝状光束并将接收到的光转换成信号来从基板接收反射/散射光，以及处理该信号的图像处理器。照射光学系统包括柱面透镜和相干性降低光学系统，其接收光束并发射在柱面透镜的聚光方向上空间相减的多个狭缝状光子束。柱面透镜将多个狭缝状光子束聚焦成照射到基板表面的狭缝状光束。

76. 发明授权

US07513034B2 Rim disk assembling device for full face wheel for vehicle 有权
标题翻译：车轮全轮车轮盘装配装置
公开(公告)号：US07513034B2
公开(公告)日：2009-04-07
申请号：US10596233
申请日：2003-12-26
申请人： Hiroyuki Nakano
发明人： Hiroyuki Nakano
IPC分类号： B23P19/00
CPC分类号： B21D53/26 , B23K9/0026 , B60B31/00 , Y10T29/49481 , Y10T29/49499 , Y10T29/53448
摘要： A mounting device for a rim disk of a full face wheel for a vehicle has a disk disposed on a rotating table rotated by a rotating device about the center axis (X) of a full face wheel and radially positioned by a hub hole fitting piece and a rim disposed on the disk and radially positioned by arresting a rim drop part by a rim position arresting means, with the disk and rim being pressingly held between a disk support piece and a rim support piece by upwardly pulling an aligning rod connected to the rotating table through a rod connection means along the center axis (X) of the full face wheel while downwardly pressing a rim flange part by the rim support piece to bring the disk and the rim into a pressed state. By the rim disk mounting device, the disk and the rim radially positioned with high accuracy can be brought into pressed state with a strong holding pressure, and both the disk and the rim can be stably rotated. Thus, a thermal deformation can be suppressed and welding can be uniformly and accurately performed.
摘要翻译：用于车辆的全轮的轮辋盘的安装装置具有设置在由旋转装置围绕全面轮的中心轴线（X）旋转并由轮毂孔配件片径向定位的旋转台上的盘，设置在盘上的边缘，并且通过边缘位置限制装置阻止边缘落下部分径向定位，其中盘和边缘通过向上拉动连接到旋转的对准杆而被压紧地保持在盘支撑件和轮辋支撑件之间通过杆连接装置沿着全面轮的中心轴线（X）工作，同时通过轮辋支撑件向下按压轮辋凸缘部分，以使盘和轮辋处于压制状态。通过轮辋盘安装装置，以高精度径向定位的盘和轮辋可以以较高的保持压力进入压力状态，并且盘和轮辋可以稳定地旋转。因此，可以抑制热变形，并且能够均匀且准确地进行焊接。

77. 发明申请

US20090059088A1 BROADCAST RECEIVING APPARATUS AND PROGRAM REFERENCE CHART DISPLAYING METHOD 审中-公开
标题翻译：广播接收装置和程序参考图显示方法
公开(公告)号：US20090059088A1
公开(公告)日：2009-03-05
申请号：US12183985
申请日：2008-07-31
申请人： Hiroyuki Nakano
发明人： Hiroyuki Nakano
IPC分类号： H04N5/50
CPC分类号： H04N5/4401 , G11B27/329 , G11B27/34 , H04N5/44543 , H04N5/775 , H04N5/781 , H04N5/85 , H04N5/907 , H04N9/8205 , H04N21/42684 , H04N21/4312 , H04N21/4334 , H04N21/436 , H04N21/43622 , H04N21/4622 , H04N21/482 , H04N21/84
摘要： According to one embodiment, a broadcast receiving apparatus includes: a tuner selecting and receiving a broadcast signal of digital broadcast; a recording control module making video data obtained by the tuner receiving the broadcast signal recorded in a recording medium; a video reproducing module reproducing a video signal by using the video data recorded in the recording medium; a video data selecting module selecting only identical apparatus video data obtained by the tuner of the identical apparatus receiving the broadcast signal, among the video data recorded in the recording medium; and a displaying control module making a program reference chart corresponding to the identical apparatus video data selected by the video data selecting module displayed.
摘要翻译：根据一个实施例，广播接收装置包括：调谐器，选择和接收数字广播的广播信号; 记录控制模块，使由调谐器获得的视频数据接收记录在记录介质中的广播信号; 视频再现模块，通过使用记录在记录介质中的视频数据再现视频信号; 视频数据选择模块，在记录在记录介质中的视频数据中，仅选择由接收广播信号的同一设备的调谐器获得的相同设备视频数据; 以及显示控制模块，其制作与由所显示的视频数据选择模块所选择的相同装置视频数据相对应的节目参考图。

78. 发明授权

US07453561B2 Method and apparatus for inspecting foreign particle defects 有权
标题翻译：用于检查外来颗粒缺陷的方法和装置
公开(公告)号：US07453561B2
公开(公告)日：2008-11-18
申请号：US11325548
申请日：2006-01-05
申请人： Sachio Uto , Hiroyuki Nakano
发明人： Sachio Uto , Hiroyuki Nakano
IPC分类号： G01N21/00
CPC分类号： G01N21/94 , G01N21/47 , G01N21/9501
摘要： The invention relates to a device production process for forming a circuit pattern on a substrate such as semiconductor device. To enable a stable inspection of a minute foreign particle and a pattern defect occurring in manufacture of a device at a high speed and with a high sensitivity, an object to be inspected on which a transparent film is formed, is irradiated with a beam which is emitted from an illuminator whose illumination direction and illumination angle are selected from a plurality of choices to be optimum, so that scattered reflected light from a minute foreign particle defect on the object or the transparent film is effectively detected by eliminating a noise from the pattern formed on the object, and a detection optical system is optimized by evaluating and adjusting, with an image forming performance checker, an image forming performance of the detection optical system included in an inspecting apparatus.
摘要翻译：本发明涉及用于在诸如半导体器件的衬底上形成电路图案的器件制造工艺。为了能够在高速，高灵敏度的装置的制造中能够稳定地检查微小的外来粒子和图案缺陷，对要形成透明膜的检查对象进行照射，从照明方向和照明角度从多个选择中选择为最佳的发光体发射，从而通过从形成的图案中消除噪声来有效地检测来自物体或透明膜上的微小异物缺陷的散射反射光并且通过利用图像形成性能检查器评估和调整包括在检查装置中的检测光学系统的图像形成性能来优化检测光学系统。

79. 发明申请

US20080199181A1 OPTICAL TRANSMISSION APPARATUS WITH OPTICAL AMPLIFIERS 失效
标题翻译：光学放大器的光传输装置
公开(公告)号：US20080199181A1
公开(公告)日：2008-08-21
申请号：US11946151
申请日：2007-11-28
申请人： Hiroyuki Nakano , Hiroshi Takeuchi , Hiroshi Masuda
发明人： Hiroyuki Nakano , Hiroshi Takeuchi , Hiroshi Masuda
IPC分类号： H04J14/02
CPC分类号： H04B10/40 , H04J14/0206 , H04J14/0212 , H04J14/0221
摘要： An optical transmission apparatus including an optical amplifier for providing a high-power optical amplifier on the receive side, in which a wavelength of pumping light for an optical amplifier on the transmission side is suitably shifted to be different from a wavelength of pumping light for an optical amplifier on the receive side, pumping optical power for the optical amplifier on the transmission side is not all consumed in a doped fiber in amplification process, and remnant pump light that was left surplus is added by a wavelength multiplex coupler to the pumping light for the optical amplifier on the receive side, thereby enhancing a gain and light output without an increase in output power of the pumping light used for the optical amplifier on the receive side.
摘要翻译：一种光传输装置，包括用于在接收侧提供高功率光放大器的光放大器，其中用于发射侧的光放大器的泵浦光的波长适当地偏移为与用于在放大过程中，在接收侧的光放大器，用于发射侧的光放大器的泵浦光功率并不是全部在掺杂光纤中消耗，剩余的剩余泵浦光由波长多路耦合器加到泵浦光接收侧的光放大器，从而增强增益和光输出，而不增加用于接收侧的光放大器的泵浦光的输出功率。

80. 发明授权

US07333192B2 Apparatus and method for inspecting defects 有权
标题翻译：用于检查缺陷的装置和方法
公开(公告)号：US07333192B2
公开(公告)日：2008-02-19
申请号：US11653322
申请日：2007-01-16
申请人： Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
发明人： Hiroyuki Nakano , Akira Hamamatsu , Sachio Uto , Yoshimasa Oshima , Hidetoshi Nishiyama , Yuta Urano , Shunji Maeda
IPC分类号： G01N21/88
CPC分类号： G01N21/94 , G01N21/9501 , G01N21/95607 , G01N21/95623 , G01N2021/9513 , G01N2021/95638 , H01L22/12
摘要： A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.
摘要翻译：缺陷检查装置包括照射光学系统20，检测光学系统30和图像处理器40。在照射光学系统中，设置反射镜2603以向下反射已经被引导到第一或第二光路的光束，并且设置柱面透镜251和倾斜镜2604以聚焦已导向的光束作为狭缝状光束90，通过反射镜向下倾斜，从与水平方向延伸的所需倾斜方向倾斜的角度，到被检查的基板1上。

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