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    • 71. 发明申请
    • METHOD FOR PRODUCING A MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, MONOLITHIC PIEZO ACTUATOR WITH STACK ELEMENTS, AND USE OF THE PIEZO ACTUATOR
    • 用于生产具有堆叠元件的单片式致动器的方法,具有堆叠元件的单片式致动器,以及PIEZO致动器的使用
    • US20110138593A1
    • 2011-06-16
    • US13031398
    • 2011-02-21
    • Carsten SchuhClaus Zumstrull
    • Carsten SchuhClaus Zumstrull
    • H01L41/24
    • H01L41/257H01L41/0471H01L41/0838H01L41/273Y10T29/42
    • A piezo actuator has a stack element and at least one further stack element, wherein each of the stack elements has stacked piezoceramic layers and electrode layers arranged between the piezoceramic layers, each of the electrode layers extends to at least one of at least two lateral surface sections of the stack element which have external metallizations on them, and are connected to the electrode layers such that adjacently stacked electrode layers can have different electrical potentials applied to them indirectly via the external metallizations, the stack elements are arranged above one another to form a monolithic total stack, and connected to one another by at least one connecting layer. The following steps are provided: a) provision of the total stack and b) production of a load-relieving crack in the connecting layer. An electrical connector in the form of a wire can be fitted on the relevant external metallization regions.
    • 压电致动器具有堆叠元件和至少一个另外的堆叠元件,其中每个堆叠元件具有堆叠的压电陶瓷层和布置在压电陶瓷层之间的电极层,每个电极层延伸到至少两个侧表面中的至少一个 堆叠元件的在其上具有外部金属化的部分,并且连接到电极层,使得相邻堆叠的电极层可以经由外部金属化间接施加到它们的不同电位,堆叠元件彼此上下排列以形成 并且通过至少一个连接层彼此连接。 提供以下步骤:a)提供总堆叠,以及b)在连接层中生产减轻负载的裂纹。 电线形式的电连接器可以安装在相关的外部金属化区域上。