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    • 72. 发明申请
    • Nanotube probe and method for manufacturing the same
    • 纳米管探头及其制造方法
    • US20070018098A1
    • 2007-01-25
    • US10570525
    • 2004-09-08
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • Yoshikazu NakayamaTakashi OkawaShigenobu YamanakaAkio Harada
    • G21K7/00
    • G01Q70/12
    • The present invention realizes a nanotube probe with high durability that can be manufactured in short time with less impurities adhered to the holder sustaining the nanotube. The nanotube probe according to this invention is constructed by fastening a nanotube 8 on the protruded portion 4 of a cantilever by way of at least two partial coating films 12a and 12b. One or more additional partial coating films may be formed in the intermediate area between these two partial coating films. Each partial coating film is formed by irradiating electron beam 10 on the position where the nanotube 8 is in contact with the protruded portion 4 of the cantilever. The partial coating films are separated not to overlap each other. By minimizing the size of partial coating film as well as by narrowing down the beam diameter, coating time may be further shortened. With the beam diameter narrowed down, excessive deposit of impurities can be put under control.
    • 本发明实现了具有高耐久性的纳米管探针,其可以在短时间内制造,而较少的杂质附着在支撑纳米管的支架上。 根据本发明的纳米管探针通过至少两个部分涂膜12a和12b将纳米管8紧固在悬臂的突出部分4上而构成。 可以在这两个部分涂膜之间的中间区域中形成一个或多个附加的部分涂膜。 每个部分涂膜通过在纳米管8与悬臂的突出部分4接触的位置上照射电子束10而形成。 将部分涂膜分离成不重叠。 通过最小化部分涂膜的尺寸以及通过使光束直径变窄,可以进一步缩短涂布时间。 随着光束直径变窄,可以控制杂质沉积过多。
    • 76. 发明授权
    • Device and method for positioning a notched wafer
    • 用于定位缺口晶圆的装置和方法
    • US5851102A
    • 1998-12-22
    • US931549
    • 1997-09-16
    • Takashi OkawaShigeharu Iizuka, deceased
    • Takashi OkawaShigeharu Iizuka, deceased
    • G01B5/00G01B5/28G01B11/00G01B21/00G01N21/88G01N21/94G01N21/956H01L21/66H01L21/68B65G47/24
    • H01L21/682Y10S414/136
    • A detector is provided to optically monitor the outer periphery of a wafer rotated by rotation of a rotary stage, so as to detect how much the center of the wafer placed on the rotary inspection stage is offset from the rotational center of the rotary stage as well as an angular position, on the stage, of a V-shaped notch formed in the wafer. From the detected eccentricity of the wafer, it is determined whether a precise positioning operation, using at least three positioning pins, to locate the center of the wafer at the rotational center of the rotary stage should be performed or not. When the detected eccentricity is so great as to necessitate the precise positioning operation, one of the positioning pins is caused to fit into the V-shaped notch of the wafer on the basis of the detected angular position of the notch and then the precise positioning of the wafer is performed using the other two positioning pins. In this manner, the wafer can be properly positioned so that the center of the wafer lies exactly at the rotational center of the rotary stage, using the at least three positioning pins.
    • 提供检测器以光学监测旋转台旋转旋转的晶片的外周,以便检测放置在旋转检查台上的晶片的中心与旋转台的旋转中心偏移多少 作为在晶片上形成的V形切口的台阶上的角位置。 根据检测到的晶片的偏心率,确定是否应该执行使用至少三个定位销来将晶片的中心定位在旋转台的旋转中心处的精确定位操作。 当检测到的偏心度如此之大以至于需要精确的定位操作时,基于检测到的凹口的角位置,使定位销中的一个被配置到晶片的V形凹口中,然后精确定位 使用其他两个定位销执行晶片。 以这种方式,晶片可以被适当地定位,使得晶片的中心恰好位于旋转台的旋转中心处,使用至少三个定位销。
    • 77. 发明授权
    • Process for producing isocyanate compound
    • 异氰酸酯化合物的制造方法
    • US5166414A
    • 1992-11-24
    • US744734
    • 1991-08-14
    • Takashi Okawa
    • Takashi Okawa
    • C07C263/12C07C269/00
    • C07C263/04C07C263/12C07C269/00
    • There is disclosed a process for producing an isocyanate compound from a formamide compound or an amine compound which comprises (a) the first reaction step of reacting a formamide compound with dimethyl carbonate in the presence of an alkali catalyst, or reacting methyl formate and an amine compound with dimethyl carbonate in the presence of an alkali catalyst, to produce a corresponding urethane compound, and (b) the second reaction step of thermally decomposing the urethane compound at a temperature of 150.degree.-350.degree. C. and separately recovering the methanol and the corresponding isocyanate compound thus formed.
    • 公开了一种由甲酰胺化合物或胺化合物制备异氰酸酯化合物的方法,该方法包括(a)在碱催化剂存在下使甲酰胺化合物与碳酸二甲酯反应或使甲酸甲酯和胺反应的第一反应步骤 在碱催化剂存在下与碳酸二甲酯混合,生成相应的氨基甲酸酯化合物,和(b)在150-350℃下热分解氨基甲酸酯化合物的第二反应步骤,分别回收甲醇和 由此形成相应的异氰酸酯化合物。