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    • 73. 发明授权
    • Semiconductor device and method of manufacturing the same
    • 半导体装置及其制造方法
    • US07084510B2
    • 2006-08-01
    • US10765833
    • 2004-01-29
    • Kazuyuki HigashiNoriaki Matsunaga
    • Kazuyuki HigashiNoriaki Matsunaga
    • H01L29/40H01L21/44
    • H01L21/76844H01L21/76874H01L21/76877H01L23/53238H01L2924/0002H01L2924/00
    • A semiconductor device has an active element structure formed on a semiconductor substrate. A first insulating film is provided above the semiconductor substrate. A first interconnect layer composed of copper is provided in a surface of the first insulating film. A second insulating film is provided on the first insulating film. A connection hole is formed in the second insulating film and has its bottom connected to the first insulating layer. A connection plug composed of a single crystal of copper is filled in the connection hole so that no other crystals of copper are provided in the connection hole. An interconnect trench is formed in a surface of the second insulating film and has its bottom connected to the connection hole. A second interconnect layer is provided in the interconnect trench.
    • 半导体器件具有形成在半导体衬底上的有源元件结构。 第一绝缘膜设置在半导体衬底的上方。 由铜构成的第一互连层设置在第一绝缘膜的表面上。 在第一绝缘膜上设置第二绝缘膜。 连接孔形成在第二绝缘膜中,并且其底部连接到第一绝缘层。 在连接孔中填充由铜单晶组成的连接插头,使得连接孔中不设置其他的铜晶体。 互连沟槽形成在第二绝缘膜的表面中,并且其底部连接到连接孔。 第二互连层设置在互连沟槽中。