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71. 发明授权

US08931506B2 Gas supply apparatus equipped with vaporizer 有权
标题翻译：配有蒸发器的供气装置
公开(公告)号：US08931506B2
公开(公告)日：2015-01-13
申请号：US12935870
申请日：2009-02-17
申请人： Atsushi Nagata , Masaaki Nagase , Atsushi Hidaka , Kaoru Hirata , Atsushi Matsumoto , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
发明人： Atsushi Nagata , Masaaki Nagase , Atsushi Hidaka , Kaoru Hirata , Atsushi Matsumoto , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda
IPC分类号： F16K49/00 , B01J4/02 , B01B1/00 , C23C16/448 , C23C16/455 , F02M21/06 , F02M21/02 , F02D19/02
CPC分类号： B01J4/02 , B01B1/005 , B01J2219/00162 , B01J2219/00164 , B01J2219/00191 , B01J2219/00198 , B01J2219/00213 , B01J2219/00231 , C23C16/4481 , C23C16/4485 , C23C16/45561 , F02D19/023 , F02D19/027 , F02M21/0239 , F02M21/06 , Y02T10/32 , Y10T137/6416 , Y10T137/6606
摘要： An energy-saving, downsized gas supply apparatus equipped with a vaporizer is provided, wherein the gas supply apparatus is capable of stably and easily performing highly accurate gas flow rate control without requiring rigorous temperature control on the vaporizer side. The present invention pertains to a gas supply apparatus equipped with a vaporizer that includes (a) a liquid receiving tank; (b) a vaporizer that vaporizes liquid; (c) a high-temperature type pressure type flow rate control device that adjusts a flow rate of a vaporized gas; and (d) heating devices that heat the vaporizer, the high-temperature type pressure type flow rate control device, and desired portions of pipe passages connected to the vaporizer and the high-temperature type pressure type flow rate control device.
摘要翻译：提供一种配备有蒸发器的节能的小型化气体供给装置，其中，气体供给装置能够稳定且容易地进行高精度的气体流量控制，而无需对蒸发器侧进行严格的温度控制。本发明涉及一种配备有蒸发器的气体供给装置，该蒸发器包括：（a）液体接收罐; （b）蒸发液体的蒸发器; （c）调节汽化气体的流量的高温型压力式流量控制装置; 以及（d）加热蒸发器，高温型压力式流量控制装置以及连接到蒸发器和高温型压力式流量控制装置的管道的期望部分的加热装置。

72. 发明授权

US08724974B2 Vaporizer 有权
标题翻译：汽化器
公开(公告)号：US08724974B2
公开(公告)日：2014-05-13
申请号：US13563983
申请日：2012-08-01
申请人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
发明人： Tadahiro Ohmi , Yasuyuki Shirai , Masaaki Nagase , Satoru Yamashita , Atsushi Hidaka , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda , Keiji Hirao
IPC分类号： B01D7/00
CPC分类号： C23C16/4483 , F22B1/284
摘要： A vaporizer, capable of stabilizing the behavior of pressure inside the vaporizer, includes a chamber having an inlet and an outlet, a heating device that heats the inside of the chamber, a partition wall structure 13 that is provided inside the vaporizer and partitions the liquid material inside the chamber into a plurality of sections, and liquid distribution portions 20 that are provided at the lower portion of the partition wall structure 13 and that allow liquid distribution among the sections partitioned by the partition wall structure 13, and the partition wall structure includes a grid-like, honeycomb-shaped, mesh-like, or pipe-shaped partition wall.
摘要翻译：能够稳定蒸发器内的压力行为的蒸发器包括具有入口和出口的室，加热室内的加热装置，设置在蒸发器内部并分隔液体的分隔壁结构13 室内的材料分成多个部分，分隔部分20设置在分隔壁结构13的下部并且允许在由分隔壁结构13分隔的部分之间进行液体分配，以及分隔壁结构包括网状，蜂窝状，网状或管状隔壁。

73. 发明授权

US08662471B2 Solenoid valve 有权
标题翻译：电磁阀
公开(公告)号：US08662471B2
公开(公告)日：2014-03-04
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ome，1KHz的等效串联电阻为0.03 为0.09Omega，并且包括比表面积为1〜500m 2 / g的玻璃碳制的可极化电极。

74. 发明授权

US08601976B2 Gas supply system for semiconductor manufacturing facilities 有权
标题翻译：半导体制造设备供气系统
公开(公告)号：US08601976B2
公开(公告)日：2013-12-10
申请号：US12680159
申请日：2008-07-17
申请人： Kouji Nishino , Ryousuke Dohi , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Nobukazu Ikeda
发明人： Kouji Nishino , Ryousuke Dohi , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Nobukazu Ikeda
IPC分类号： C23C16/52 , H01L21/306 , C23F1/00 , C23C16/06 , C23C16/22
CPC分类号： C23C16/455 , C23C16/45561 , C23C16/52
摘要： A gas supply system includes a main gas supply line; a vent gas supply line; a plurality of gas supply mechanisms disposed in middle of both gas supply lines; a pressure type flow-rate control system disposed on an inlet side of the main gas supply line so a flow of carrier gas is supplied to the main gas supply line; a pressure control system disposed on an inlet side of the vent gas supply line, a carrier gas having a predetermined pressure is supplied to the vent gas supply line while the pressure control system performs a pressure adjustment, a gas pressure of the main gas supply line detected downstream from an orifice of the pressure type flow-rate control system and a gas pressure of the vent gas supply line are compared, and the gas pressure of the vent gas supply line is adjusted so a difference therebetween becomes zero.
摘要翻译：气体供应系统包括主气供应管线; 排气供气管线; 设置在两个气体供给管线的中间的多个气体供给机构; 压力型流量控制系统，设置在主气体供给管线的入口侧，从而将载气流供应到主气体供应管线; 设置在排出气体供给管路的入口侧的压力控制系统，在压力控制系统进行压力调整，主气体供给管线的气体压力的情况下，将具有规定压力的载气供给到排气供给管线从压力式流量控制系统的孔口下游检测出气体供给管路的气体压力，调整排出气体供给管路的气体压力，使其间的差为零。

75. 发明申请

US20120223265A1 CAM CONTROL VALVE 有权
标题翻译： CAM控制阀
公开(公告)号：US20120223265A1
公开(公告)日：2012-09-06
申请号：US13389671
申请日：2010-11-05
申请人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
发明人： Yohei Sawada , Ryousuke Dohi , Kouji Nishino , Nobukazu Ikeda
IPC分类号： F16K31/524 , F16K31/04 , F16K7/16
CPC分类号： F16K7/16 , F16K31/047 , F16K31/52408
摘要： A cam control valve includes a valve casing having a fluid passage and valve seat, a valve disc seated on the valve seat to open and close the fluid passage, a valve stem holding down the valve disc so it contacts the valve seat, a cam acting on the valve stem to hold it down, a motor rotating the cam, a motor holder holding the motor, a supporting frame fixed to the valve casing and supporting the motor holder so it moves vertically, an elastic member biasing the motor holder towards spacing from an upper side portion of the supporting frame, and height adjustable screws suspending the motor holder from the supporting frame, and adjusting a height of the motor holder with respect to the supporting frame, wherein the height adjustable screws are slidably inserted into the upper side portion of the supporting frame and screwed into the motor holder.
摘要翻译：凸轮控制阀包括具有流体通道和阀座的阀壳体，阀座位于阀座上以打开和关闭流体通道;阀杆，其压紧阀盘，使其接触阀座;凸轮作用在阀杆上保持下降，电动机旋转凸轮，保持电动机的电动机支架，固定在阀壳体上的支撑框架，并支撑电动机支架使其垂直移动;弹性构件，将电动机支架偏压支撑框架的上侧部分和高度可调节的螺钉，使马达夹持器从支撑框架上悬挂起来，并且相对于支撑框架调节马达夹持器的高度，其中高度可调节螺钉可滑动地插入到上侧部分的支撑框架并拧入电机支架。

76. 发明申请

US20110121217A1 SOLENOID VALVE 有权
标题翻译：电磁阀
公开(公告)号：US20110121217A1
公开(公告)日：2011-05-26
申请号：US12935119
申请日：2009-03-26
申请人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
发明人： Tadahiro Ohmi , Kouji Nishino , Tsuyoshi Tanigawa , Michio Yamaji , Nobukazu Ikeda , Ryousuke Dohi
IPC分类号： F16K31/02
CPC分类号： F16K31/0658 , F16K31/0675 , H01F7/1816 , H01F2007/1822
摘要： There is provided a solenoid valve that realizes space-saving by reducing the size of a dedicated driving power source. There is provided a solenoid valve capable of instantaneously opening and closing that includes an electric double layer capacitor having a low direct current internal resistance and a low equivalent series resistance as a motive power supply. The electric double layer capacitor has single-cell electrical properties including a capacitance of 1 to 5 F, a rated voltage of 21 to 2.7 V, a direct current internal resistance of 0.01 to 0.1 Ω, and an equivalent series resistance at 1 KHz of 0.03 to 0.09 Ω, and includes a polarizable electrode made of glassy carbon having a specific surface area of 1 to 500 m2/g.
摘要翻译：提供了一种通过减小专用驱动电源的尺寸实现节省空间的电磁阀。提供了能够瞬时打开和关闭的电磁阀，其包括具有低直流内阻和作为动力源的低等效串联电阻的双电层电容器。双电层电容器具有单电池电特性，包括1至5F的电容，额定电压为21至2.7V，直流内阻为0.01至0.1Ω，OHgr为1KHz的等效串联电阻 0.03〜0.09＆OHgr，并且包括由比表面积为1〜500m 2 / g的玻璃碳制成的极化电极。

77. 发明授权

US07849869B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US07849869B2
公开(公告)日：2010-12-14
申请号：US10597343
申请日：2005-01-13
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： F17D5/06
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

78. 发明授权

US07798167B2 Internal pressure controller of chamber and internal pressure subject-to-control type chamber 有权
标题翻译：内部压力控制器和内部压力控制型室
公开(公告)号：US07798167B2
公开(公告)日：2010-09-21
申请号：US11278909
申请日：2006-04-06
申请人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
摘要翻译：气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制剩余的气体流量范围。此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

79. 发明申请

US20090326719A1 METHOD FOR DETECTING ABNORMALITY IN FLUID SUPPLY LINE USING FLUID CONTROL APPARATUS WITH PRESSURE SENSOR 有权
标题翻译：使用压力传感器的流体控制装置检测流体输送管线异常的方法
公开(公告)号：US20090326719A1
公开(公告)日：2009-12-31
申请号：US12065438
申请日：2006-08-28
申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
IPC分类号： G05D7/06 , G06F3/048
CPC分类号： G01F1/42 , F16K37/0091 , G05D7/0635
摘要： A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof. is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
摘要翻译：提供了一种用于检测流体供应管线中的异常的方法，其使用具有压力传感器的流体控制装置，使得能够容易地，迅速和准确地检查结合到流体供应管线中的多个阀的故障和片材泄漏的异常操作具有压力传感器的流量控制装置。具体而言，使用设有具有流量设定机构，流量/压力显示机构和/或流量自诊断机构的压力传感器的流量控制装置的流体供给管线，控制阀的异常安装有流量控制装置，并且在其上游侧和下游侧。通过使用显示的压力值和/或用流量控制装置的自诊断机构诊断的值来检测。

80. 发明申请

US20090171507A1 GASKET TYPE ORIFICE AND PRESSURE TYPE FLOW RATE CONTROL APPARATUS FOR WHICH THE ORIFICE IS EMPLOYED 有权
标题翻译：垫片类型流量和压力类型流量控制装置，用于使用ORIFICE
公开(公告)号：US20090171507A1
公开(公告)日：2009-07-02
申请号：US11913271
申请日：2006-05-10
申请人： Tadahiro Ohmi , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Tsutomu Shinohara , Takashi Hirose , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
发明人： Tadahiro Ohmi , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Tsutomu Shinohara , Takashi Hirose , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
IPC分类号： G05D7/06 , F16L55/027 , F16K31/12
CPC分类号： F16K27/003 , F16L55/02718 , G01F1/36 , G01F15/001 , G01F15/005 , G05D7/0635
摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.
摘要翻译：节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。

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