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    • 73. 发明授权
    • Ceramic composition with improved electrical and mechanical properties
    • 陶瓷组合物具有改善的电气和机械性能
    • US4791078A
    • 1988-12-13
    • US89456
    • 1987-08-26
    • Susumu SaitoMasatomo YonezawaKazuaki Utsumi
    • Susumu SaitoMasatomo YonezawaKazuaki Utsumi
    • C04B35/00C04B35/46C04B35/499H01B3/12H01G4/12
    • C04B35/499H01G4/1218H01G4/1254
    • A ceramic composition comprising a solid solution of the ternary system consisting essentially of lead magnesium-niobate (Pb(Mg.sub.1/3 Nb hd 2/3)O.sub.3), lead nickel-niobate (Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3) and lead titanate (PbTiO.sub.3) as a major constituent, and an additional constituent consisting essentially of lead manganese-niobate (Pb(Mn.sub.1/3 Nb.sub.2/3)O.sub.3). The ternary system is expressed by the general formula [Pb(Mg.sub.1/3 Nb.sub.2/3)O.sub.3 ].sub.x -[Pb(Ni.sub.1/3 Nb.sub.2/3)O.sub.3 ].sub.y -[PbTiO.sub.3 ].sub.z wherein the subscripts x, y and z satisfy the equation x+y+z=1 and fall within the region defined by the line segments joining the seven points A, B, C, D, E, F and G within the triangular ternary-system diagram shown in the accompanying drawing. Preferably, the lead manganese-niobate (Pb(Mn.sub.1/3 Nb.sub.2/3)O.sub.3) is contained in a proportion of 0.01 mol % to 10 mol % to the major constituent.
    • 一种陶瓷组合物,其包含三元体系的固溶体,其基本上由铌酸镁镁(Pb(Mg1 / 3NbHd2 / 3)O3),镍铌酸铅(Pb(Ni1 / 3Nb2 / 3)O3)和钛酸铅 (PbTiO3)作为主要成分,以及主要由铌酸铅(Pb(Mn1 / 3Nb2 / 3)O3)组成的附加成分。 三元体系由通式[Pb(Mg1 / 3Nb2 / 3)O3] x- [Pb(Ni1 / 3Nb2 / 3)O3] y- [PbTiO3] z表示,其中下标x,y和z满足等式 x + y + z = 1,并且落入由附图所示的三角形三元系统图内的连接七个点A,B,C,D,E,F和G的线段限定的区域内。 铅铌酸铅(Pb(Mn1 / 3Nb2 / 3)O3)的含量优选为主成分的0.01mol%〜10mol%。
    • 77. 发明授权
    • Plasma processing apparatus for performing accurate end point detection
    • 用于执行精确终点检测的等离子体处理装置
    • US08580077B2
    • 2013-11-12
    • US12637955
    • 2009-12-15
    • Kosuke OgasawaraSusumu SaitoSyuji Nozawa
    • Kosuke OgasawaraSusumu SaitoSyuji Nozawa
    • H01L21/66H01L21/3065
    • H01J37/32935H01J37/32963H01L22/26
    • A plasma processing apparatus for generating a plasma of a processing gas by applying a high frequency power to an electrode provided in a processing chamber and processing a substrate using the plasma is provided. The plasma processing apparatus includes an optical data detection unit, a data storage unit and a control unit. The optical data detection unit detects optical data when plasma processing the substrate. The data storage unit stores correlation data representing a correlation between type data corresponding to a plurality of types classified based on a type of a mask or a film to be processed disposed on the substrate and optical data to be detected by the optical data detection unit, and end point detection setting data sets, each of the setting data sets serving to detect a plasma processing end point and corresponding to one of the types.
    • 提供了一种等离子体处理装置,其通过向设置在处理室中的电极施加高频功率并使用等离子体处理衬底来产生处理气体的等离子体。 等离子体处理装置包括光学数据检测单元,数据存储单元和控制单元。 光学数据检测单元在等离子体处理衬底时检测光学数据。 数据存储单元存储表示与基于掩膜的类型分类的多种类型的类型数据之间的相关性的相关数据,以及由光学数据检测单元检测的要被检测的光学数据, 和终点检测设定数据组,每个设定数据组用于检测等离子体处理终点并对应于其中一种类型。