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    • 71. 发明授权
    • Stage apparatus, exposure apparatus using the same, and a device manufacturing method
    • 舞台装置,使用其的曝光装置和装置制造方法
    • US06359677B2
    • 2002-03-19
    • US09210801
    • 1998-12-15
    • Hiroshi ItohNobushige Korenaga
    • Hiroshi ItohNobushige Korenaga
    • G03B2742
    • G03F7/70716G03F7/70758
    • A stage apparatus includes a base having a reference plane, a stage mounted on the base, a plurality of static-pressure bearings forming a gap between the reference plane and the stage, a plurality of preloading mechanisms producing a preload between the stage and the reference plane, a guideless motor for driving the stage, and a controller for controlling driving of the stage in (i) at least one of a direction perpendicular to the reference plane and in a tilting direction by controlling at least one of the static-pressure bearings and the preloading mechanism, and (ii) in a direction within the reference plane by the guideless motor. Positioning of the stage in a Z-direction and in tilting directions can be carried out by electromagnets and air pads. Positioning in directions (X, Y, &thgr;) within a plane parallel to the reference plane of the base can be accomplished by guideless motors.
    • 舞台装置包括具有参考平面的基座,安装在基座上的平台,在基准平面和舞台之间形成间隙的多个静压轴承,在舞台与参考线之间产生预载的多个预加载机构 平面,用于驱动舞台的无引导电动机和控制器,用于通过控制至少一个静压轴承来控制(i)垂直于参考平面的方向和倾斜方向中的至少一个上的舞台的驱动 和预载机构,以及(ii)通过无引导电动机在参考平面内的方向上。 舞台在Z方向和倾斜方向上的定位可以由电磁铁和气垫进行。 在平行于基座的参考平面的平面内的方向(X,Y,θ)定位可以通过无引导电动机来实现。
    • 72. 发明授权
    • Ophthalmologic apparatus
    • 眼科仪器
    • US06193372B1
    • 2001-02-27
    • US09472821
    • 1999-12-28
    • Toshiaki OkumuraHiroshi Itoh
    • Toshiaki OkumuraHiroshi Itoh
    • A61B310
    • A61B3/1233
    • An ophthalmologic apparatus which has namer for naming and designating an eye to be examined and the fundus portion of the eye to be examined, an examiner device for examining the fundus portion, a memory for storing therein a set state regarding the examination by the examining means of the named fundus portion, and a controller for controlling the examiner device to assume the set state on the basis of the stored set state when the fundus portion is designated by the namer, thereby being capable of effecting the next examination of the fundus of the eye within a short time.
    • 一种眼科装置,其具有用于命名和指定要检查的眼睛和指定要检查的眼睛的眼底部分的眼镜,用于检查眼底部分的检查器装置,用于在其中存储关于检查装置的检查的设定状态的存储器 的指定的眼底部分,以及控制器,用于当眼睛部分被指示者时,根据存储的设置状态控制检查器装置采取设定状态,从而能够进行下一次检查 眼睛在短时间内。
    • 76. 发明授权
    • Eye fundus examining apparatus
    • 眼底检查仪
    • US5894337A
    • 1999-04-13
    • US921356
    • 1997-08-29
    • Satoru OkinishiShinya TanakaYasuyuki NumajiriToshiaki OkumuraShigeaki OnoHiroshi ItohTomoyuki Iwanaga
    • Satoru OkinishiShinya TanakaYasuyuki NumajiriToshiaki OkumuraShigeaki OnoHiroshi ItohTomoyuki Iwanaga
    • A61B3/10A61B3/12A61B3/14A61B5/0285A61B3/00
    • A61B3/1241
    • A eye fundus examining apparatus includes a first optical system for projecting measurement light onto the fundus of an eye, a deflecting member provided in the first optical system for deflecting the measurement light, a light receiving element for receiving the reflected light of the measurement light from the fundus of the eye, a predetermined parameter of a target on the fundus of the eye being measured from the light reception information of the light receiving element, a second optical system for projecting a tracking light beam to an area including the target on the fundus of the eye, an image pickup element for receiving the image of the target illuminated by the tracking light beam, and a control system for driving the deflecting member and directing the measurement light onto the target so that the distance of deviation from the illuminated point by the measurement light under an ideal condition on the fundus of the eye to the target image received on the image pickup element may become a set value, the set value being suitably resettable.
    • 眼底检查装置包括用于将测量光投射到眼底的第一光学系统,设置在第一光学系统中用于偏转测量光的偏转构件,用于接收测量光的反射光的光接收元件 眼睛的眼底,根据光接收元件的光接收信息测量眼睛的眼底上的目标的预定参数,用于将跟踪光束投射到眼底的包括目标的区域的第二光学系统 用于接收由跟踪光束照射的目标的图像的图像拾取元件,以及用于驱动偏转构件并将测量光引导到目标上的控制系统,使得偏离照明点的距离由 在眼睛的眼底上的理想条件下的测量光到在图像拾取元件上接收的目标图像 可能成为设定值,设定值可以适当地重置。