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    • 72. 发明申请
    • Methods of Fabricating Substrates
    • 制造基板的方法
    • US20120322269A1
    • 2012-12-20
    • US13596430
    • 2012-08-28
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • H01L21/311
    • H01L21/31138H01L21/0273H01L21/0337H01L21/0338
    • A method of fabricating a substrate includes forming first and second spaced features over a substrate. The first spaced features have elevationally outermost regions which are different in composition from elevationally outermost regions of the second spaced features. The first and second spaced features alternate with one another. Every other first feature is removed from the substrate and pairs of immediately adjacent second features are formed which alternate with individual of remaining of the first features. After such act of removing, the substrate is processed through a mask pattern comprising the pairs of immediately adjacent second features which alternate with individual of the remaining of the first features. Other embodiments are disclosed.
    • 一种制造衬底的方法包括在衬底上形成第一和第二间隔的特征。 第一间隔的特征具有与第二间隔特征的垂直最外区域不同的高度最外的区域。 第一和第二间隔的特征彼此交替。 每个其他第一特征从衬底移除,并且形成直接相邻的第二特征对,其与第一特征的剩余部分的个体交替。 在这样的去除动作之后,通过掩模图案来处理衬底,该掩模图案包括与第一特征剩余部分的个体交替的紧邻的第二特征对。 公开了其他实施例。
    • 76. 发明授权
    • Methods of fabricating substrates
    • 制造基板的方法
    • US08273634B2
    • 2012-09-25
    • US12328435
    • 2008-12-04
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • H01L21/331H01L21/8222
    • H01L21/31138H01L21/0273H01L21/0337H01L21/0338
    • A method of fabricating a substrate includes forming first and second spaced features over a substrate. The first spaced features have elevationally outermost regions which are different in composition from elevationally outermost regions of the second spaced features. The first and second spaced features alternate with one another. Every other first feature is removed from the substrate and pairs of immediately adjacent second features are formed which alternate with individual of remaining of the first features. After such act of removing, the substrate is processed through a mask pattern comprising the pairs of immediately adjacent second features which alternate with individual of the remaining of the first features. Other embodiments are disclosed.
    • 一种制造衬底的方法包括在衬底上形成第一和第二间隔的特征。 第一间隔的特征具有与第二间隔特征的垂直最外区域不同的高度最外的区域。 第一和第二间隔的特征彼此交替。 每个其他第一特征从衬底移除,并且形成直接相邻的第二特征对,其与第一特征的剩余部分的个体交替。 在这样的去除动作之后,通过掩模图案来处理衬底,该掩模图案包括与第一特征剩余部分的个体交替的紧邻的第二特征对。 公开了其他实施例。
    • 78. 发明授权
    • Methods of fabricating substrates
    • 制造基板的方法
    • US08247302B2
    • 2012-08-21
    • US12328464
    • 2008-12-04
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • Scott SillsGurtej S. SandhuAnton deVilliers
    • H01L21/331H01L21/8222
    • H01L21/31138G03F7/0035H01L21/0273H01L21/0337H01L21/0338
    • A method of fabricating a substrate includes forming spaced first features and spaced second features over a substrate. The first and second features alternate with one another and are spaced relative one another. Width of the spaced second features is laterally trimmed to a greater degree than any lateral trimming of width of the spaced first features while laterally trimming width of the spaced second features. After laterally trimming of the second features, spacers are formed on sidewalls of the spaced first features and on sidewalls of the spaced second features. The spacers are of some different composition from that of the spaced first features and from that of the spaced second features. After forming the spacers, the spaced first features and the spaced second features are removed from the substrate. The substrate is processed through a mask pattern comprising the spacers. Other embodiments are disclosed.
    • 一种制造衬底的方法包括在衬底上形成间隔开的第一特征和间隔开的第二特征。 第一和第二特征彼此交替并彼此间隔开。 间隔开的第二特征的宽度被横向修剪到比间隔开的第一特征的宽度的任何横向修剪更大的程度,同时横向修剪间隔开的第二特征的宽度。 在第二特征的横向修剪之后,间隔物形成在间隔开的第一特征的侧壁上并且在间隔开的第二特征的侧壁上。 间隔物与间隔开的第一特征和间隔开的第二特征的间隔物具有不同的组成。 在形成间隔物之后,从衬底移除间隔开的第一特征和间隔开的第二特征。 通过包括间隔物的掩模图案处理衬底。 公开了其他实施例。