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    • 74. 发明授权
    • Semiconductor device and manufacturing method of the same
    • 半导体器件及其制造方法相同
    • US08558227B2
    • 2013-10-15
    • US13567235
    • 2012-08-06
    • Gen Fujii
    • Gen Fujii
    • H01L29/10
    • H01L21/288C23C18/1216C23C18/14C23C18/1608C23C18/165C23C18/1651C23C18/1893H01L27/1285H01L27/1292H01L29/458H01L29/4908
    • The manufacturing method of the present invention includes steps of selectively forming a photocatalyst material or a material including an amino group by discharging a composition including the photocatalyst material or the material including an amino group; immersing the photocatalyst material or the material including an amino group in a solution including a plating catalyst material so as to adsorb or deposit the plating catalyst material onto the photocatalyst material or the material including an amino group; and immersing the plating catalyst material in a plating solution including a metal material so as to form a metal film on a surface of the photocatalyst material or the material including an amino group adsorbing or depositing the plating catalyst material, thereby manufacturing a semiconductor device. The pH of the solution including the plating catalyst material is adjusted in a range of 3 to 6.
    • 本发明的制造方法包括通过排出包含光催化剂材料的组合物或包含氨基的材料来选择性地形成光催化剂材料或包含氨基的材料的步骤; 将光催化剂材料或包含氨基的材料浸入包括镀催化剂材料的溶液中以将镀催化剂材料吸附或沉积到光催化剂材料或包含氨基的材料上; 以及将镀催化剂材料浸渍在包含金属材料的镀液中,以在光催化剂材料的表面上形成金属膜,或者包含吸附或沉积镀催化剂材料的氨基的材料,从而制造半导体器件。 包括电镀催化剂材料的溶液的pH调节在3至6的范围内。
    • 77. 发明申请
    • Display Device and Method for Manufacturing Display Device
    • 显示设备和显示设备制造方法
    • US20120091444A1
    • 2012-04-19
    • US13333304
    • 2011-12-21
    • Gen FujiiErika TakahashiErumu KikuchiSachiko Kawakami
    • Gen FujiiErika TakahashiErumu KikuchiSachiko Kawakami
    • H01L51/54
    • H01L51/0004H01L27/3246H01L27/3283
    • To provide a display device with higher image quality and reliability or a large-sized display device with a large screen at low cost with high productivity. A function layer (such as a coloring layer or a pixel electrode layer) used in the display device is formed by discharging a liquid function-layer-forming material to an opening formed with a layer including a first organic compound which has a C—N bond or a C—O bond in the main chain as a base and a layer including a second organic compound as a partition. The fluorine density exhibiting liquid repellency to the liquid function-layer-forming material, which is attached to a surface of the layers including organic compounds, is controlled, whereby a liquid repellent region and a lyophilic region can be selectively formed.
    • 提供具有更高图像质量和可靠性的显示设备或具有低成本且高生产率的大屏幕的大尺寸显示设备。 在显示装置中使用的功能层(例如着色层或像素电极层)通过将液体功能层形成材料排出到形成有包含第一有机化合物的层的开口而形成,该第一有机化合物具有C-N 键或作为碱的主链中的C-O键和包含第二有机化合物作为隔板的层。 控制附着在包含有机化合物的层的表面上对液体功能层形成材料具有疏液性的氟密度,从而可以选择性地形成疏液区域和亲液性区域。
    • 79. 发明授权
    • Method for manufacturing thin film transistor and display device
    • 制造薄膜晶体管和显示装置的方法
    • US07951710B2
    • 2011-05-31
    • US10586661
    • 2005-02-15
    • Gen Fujii
    • Gen Fujii
    • H01L21/44H01L21/00
    • H01L29/66742G02F2001/136295H01L21/288H01L27/1285H01L27/1292H05K3/1241
    • The present invention discloses a display device and a manufacturing method thereof by which a manufacturing process can be simplified. Further, the present invention discloses technique for manufacturing a pattern such as a wiring into a desired shape with good controllability. A method for forming a pattern for constituting the display device according to the present invention comprises the steps of forming a first region and a second region; discharging a composition containing a pattern formation material to a region across the second region and the first region; and flowing a part of the composition discharged to the first region into the second region; wherein wettability with respect to the composition of the first region is lower than that of the second composition.
    • 本发明公开了一种可以简化制造工艺的显示装置及其制造方法。 此外,本发明公开了一种用于将诸如布线的图案制造成具有良好可控性的期望形状的技术。 根据本发明的用于形成用于构成显示装置的图案的方法包括以下步骤:形成第一区域和第二区域; 将含有图案形成材料的组合物排放到横跨第二区域和第一区域的区域; 并将排出到第一区域的组合物的一部分流入第二区域; 其中相对于第一区域的组合物的润湿性低于第二组合物的润湿性。
    • 80. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07827521B2
    • 2010-11-02
    • US11964251
    • 2007-12-26
    • Gen FujiiErika Takahashi
    • Gen FujiiErika Takahashi
    • G06F17/50
    • H01L22/12H01L2924/0002H01L2924/00
    • When a design diagram of the semiconductor device by a conventional CAD tool is used, a pattern which can be formed with the ink-jet apparatus is limited; therefore, there is a possibility that some circuits of the desired semiconductor device cannot be formed as they are designed. A plurality of basic patterns which can be obtained by discharging with the ink-jet apparatus are prepared, and layout of a desired integrated circuit is performed by combining the patterns. A light-exposure mask is formed based on the layout obtained. Light exposure is performed using the light-exposure mask. Then, development is performed, and the resist film remains in the light-exposed region of which width is narrower than the diameter of the droplet landed. Liquid repellent treatment is performed to an exposed portion on the surface, and then the material droplet is dropped over the resist film. Discharging is selectively performed by a droplet discharging method to form a wiring of which width is narrower than the dot diameter.
    • 当使用通过常规CAD工具的半导体器件的设计图时,可以用喷墨设备形成的图案是有限的; 因此,有可能在设计期间不能形成期望的半导体器件的一些电路。 准备通过喷墨装置放电可获得的多种基本图案,并通过组合图案来执行期望的集成电路的布局。 基于获得的布局形成曝光掩模。 使用曝光掩模进行曝光。 然后,进行显影,并且抗蚀剂膜保持在其暴露的区域中,其宽度比着落的液滴的直径窄。 对表面上的暴露部分进行疏液处理,然后将材料滴落在抗蚀剂膜上。 通过液滴喷射法选择性地进行排出,形成宽度比点直径窄的布线。