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    • 72. 发明申请
    • Method for producing saturated hydrocarbon compound
    • 饱和烃化合物的制备方法
    • US20070156003A1
    • 2007-07-05
    • US11635660
    • 2006-12-08
    • Taiichi FurukawaYong WangKinji Yamada
    • Taiichi FurukawaYong WangKinji Yamada
    • C07C7/17
    • C07C7/171C07C2602/28C07C13/50
    • A method for treating a saturated hydrocarbon compound suitable as a liquid for the immersion exposure method excelling in transmission in the deep ultraviolet region using sulfuric acid in an amount smaller than in a conventional method is provided. The above sulfuric acid washing treatment is the method for producing saturated hydrocarbon compound intended to reduce the absorbance, wherein the second sulfuric acid washing treatment step is conducted after the first sulfuric acid washing treatment step at a temperature 10° C. or more lower than the temperature of the first sulfuric acid washing treatment step. The absorbance of light with a wavelength of 193 nm of the saturated hydrocarbon compound to be treated in the above second sulfuric acid washing treatment step is 0.10 or less per 1 cm of a liquid optical path length, and the above saturated hydrocarbon compound is an alicyclic saturated hydrocarbon compound.
    • 提供一种处理适合作为浸渍曝光方法的饱和烃化合物的方法,其中使用比常规方法更小的硫酸,在深紫外区域中透射性优异。 上述硫酸洗涤处理是制造用于降低吸光度的饱和烃化合物的方法,其中第二硫酸洗涤处理步骤在第一硫酸洗涤处理步骤之后在10℃以上的温度下进行 第一硫酸洗涤处理步骤的温度。 在上述第二硫酸洗涤处理步骤中,待处理的饱和烃化合物的波长为193nm的光的吸光度为每1cm液体光程长度为0.10以下,上述饱和烃化合物为脂环式 饱和烃化合物。
    • 74. 发明申请
    • Acid generators, sulfonic acids, sulfonyl halides, and radiation sensitive resin compositions
    • 酸产生剂,磺酸,磺酰卤和辐射敏感性树脂组合物
    • US20070054214A1
    • 2007-03-08
    • US10547769
    • 2004-02-20
    • Satoshi EbataYong WangIsao Nishimura
    • Satoshi EbataYong WangIsao Nishimura
    • G03C1/00
    • C07C309/19C07C309/17C07C309/23C07C381/12C07C2602/42C07C2603/86C07D207/46G03F7/0045G03F7/0382G03F7/0392G03F7/0397G03F7/0757Y10S430/106Y10S430/111Y10S430/115Y10S430/122Y10S430/126
    • The invention provides novel acid generators which are unproblematic in combustibility and accumulation inside the human body and can generate acids having high acidities and high boiling points and exhibiting properly short diffusion lengths in resist coating films and which permit the formation of resist patterns excellent smoothness with little dependence on the denseness of a mask pattern; sulfonic acids generated from the acid generators; sulfonyl halides useful as raw material in the synthesis of the acid generators; and radiation-sensitive resin compositions containing the acid generators. The acid generators have structures represented by the general formula (I), wherein R1 is a monovalent substituent such as alkoxycarbonyl, alkylsulfonyl, or alkoxysulfonyl, R2 to R4 are each hydrogen or alkyl; k is an integer of 0 or above; and n is an integer of 0 to 5. Among the radiation-sensitive resin compositions, a positive one contains a resin having acid-dissociable groups in addition to the above acid generator, while a negative one contains an alkali-soluble resin and a crosslinking agent in addition to the acid generator.
    • 本发明提供了新颖的酸产生剂,其在人体内的可燃性和积聚中是无问题的,并且可以产生具有高酸度和高沸点的酸,并且在抗蚀剂涂膜中显示适当短的扩散长度,并且允许形成抗蚀剂图案,具有极好的平滑性 依赖于掩模图案的致密度; 酸产生器产生的磺酸; 用于合成酸发生剂的原料的磺酰卤; 和含有酸发生剂的辐射敏感性树脂组合物。 酸产生剂具有由通式(I)表示的结构,其中R 1是一价取代基,例如烷氧基羰基,烷基磺酰基或烷氧基磺酰基,R 2至R“ > 4个各自为氢或烷基; k为0以上的整数; 并且n为0〜5的整数。在这些辐射敏感性树脂组合物中,除了上述酸产生剂之外,阳性物质含有具有酸解离基团的树脂,而负极性物质含有碱溶性树脂和交联 除酸产生剂外还可加入。
    • 79. 发明申请
    • Compact and high performance opto-mechanical switch
    • 紧凑型高性能光机械开关
    • US20060133725A1
    • 2006-06-22
    • US11249886
    • 2005-10-12
    • Yong WangFeng Ye
    • Yong WangFeng Ye
    • G02B6/26G02B6/34G02B6/32G02B6/42
    • G02B6/3524G02B6/3528G02B6/3558
    • A system and method for a 1xN fiber optical switch is disclosed. The switch comprises (1) a pair of vertically oriented wedge prisms and (2) a collimator. The collimator comprises a four fiber ferrule and a lens. When no wedge prisms are inserted into the optical path, the signal is switched to port 1. When the first prism is inserted, the signal is switched to port 2. When the second prism is inserted (first prism not in), the signal is switched to port 3 which is in a vertical line. While both prisms are inserted into the optical path, the signal is switched to the diagonal port 4. Accordingly, a 1xN switch is provided that is more compact than a conventional 1xN switch. The 1xN fiber optical switch in accordance with the present invention have advantages over conventional opto-mechanical switches. The inventive 1xN switch is much smaller in size because all ports are held in one ferrule and only one lens is utilized.
    • 公开了一种1xN光纤开关的系统和方法。 开关包括(1)一对垂直取向的楔形棱镜和(2)准直器。 准直器包括四个光纤套圈和透镜。 当没有楔形棱镜插入光路时,信号切换到端口1.当插入第一棱镜时,信号切换到端口2.当第二个棱镜插入(第一个棱镜不在)时,信号为 切换到垂直线上的端口3。 当两个棱镜都插入到光路中时,信号被切换到对角端口4.因此,提供比常规1xN开关更紧凑的1xN开关。 根据本发明的1xN光纤光开关具有优于常规光机械开关的优点。 本发明的1xN开关的尺寸要小得多,因为所有的端口被保持在一个套圈中,并且仅使用一个透镜。