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    • 71. 发明授权
    • Method of making a top spin valve sensor with an in-situ formed seed layer structure for improving sensor performance
    • 制造具有原位形成的种子层结构的顶部自旋阀传感器以提高传感器性能的方法
    • US06306266B1
    • 2001-10-23
    • US09574682
    • 2000-05-17
    • Serhat MetinMustafa PinarbasiPatrick Rush Webb
    • Serhat MetinMustafa PinarbasiPatrick Rush Webb
    • C23C1434
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3967G11B2005/3996
    • A method constructs first and second seed layers of a seed layer structure in-situ for a top spin valve sensor for increasing magnetoresistive coefficient dr/R of the sensor, reducing a ferromagnetic coupling field HFC between pinned and free layers of the sensor and reducing coercivity HC of the free layer. The first layer, which is aluminum oxide (Al2O3), is ion beam sputter deposited on a first shield layer in a sputtering chamber under a specified pressure. The second seed layer, which is nickel oxide based, is deposited on the first seed layer by ion beam sputter deposition without breaking the vacuum of the chamber. The free layer is then directly deposited on the second seed layer followed by formation of the remainder of the layers of the spin valve sensor. In one embodiment of the invention a read gap layer and the first seed layer are located between a first shield layer and the second seed layer while in the second embodiment of the invention the first seed layer is the only layer between the first shield layer and the second seed layer.
    • 一种方法为顶部自旋阀传感器原位构建种子层结构的第一种子层和第二种子层,用于增加传感器的磁阻系数dr / R,从而减小传感器的固定层和自由层之间的铁磁耦合场HFC,并降低矫顽力 HC的自由层。 作为氧化铝(Al 2 O 3)的第一层是在特定压力下溅射沉积在溅射室中的第一屏蔽层上的离子束。 基于氧化镍的第二种子层通过离子束溅射沉积而沉积在第一籽晶层上,而不破坏室的真空。 然后将自由层直接沉积在第二种子层上,随后形成自旋阀传感器的其余层。 在本发明的一个实施例中,读间隙层和第一种子层位于第一屏蔽层和第二种子层之间,而在本发明的第二实施例中,第一种子层是第一屏蔽层和第二屏蔽层之间的唯一层 第二种子层。
    • 74. 发明授权
    • Seed layer structure for spin valve sensor
    • 自旋阀传感器种子层结构
    • US06208492B1
    • 2001-03-27
    • US09311217
    • 1999-05-13
    • Mustafa Pinarbasi
    • Mustafa Pinarbasi
    • G11B539
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3967G11B2005/3996H01F10/3268H01F10/3295
    • A bilayer seed layer structure is employed between a first read gap layer and a spin valve sensor for increasing the magnetoresistive coefficient (dr/R). In a bottom spin valve sensor the bilayer seed layer structure is located between the first read gap layer and a pinning layer and in a top spin valve sensor the bilayer seed layer structure is located between the first read gap layer and the free layer. The pinning layer is preferably iridium manganese (IrMn). The bilayer seed layer structure includes a first seed layer which is a metallic oxide and a second seed layer that is a nonmagnetic metal. A preferred embodiment is a first seed layer of nickel manganese oxide (NiMnO) and a second seed layer of copper (Cu).
    • 在第一读取间隙层和自旋阀传感器之间采用双层种子层结构以增加磁阻系数(dr / R)。 在底部自旋阀传感器中,双层种子层结构位于第一读取间隙层和钉扎层之间,并且在顶部自旋阀传感器中,双层种子层结构位于第一读取间隙层和自由层之间。 钉扎层优选为铱锰(IrMn)。 双层种子层结构包括作为金属氧化物的第一籽晶层和作为非磁性金属的第二种子层。 优选的实施方案是镍锰氧化物(NiMnO)的第一籽晶层和铜(Cu)的第二种子层。