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    • 80. 发明授权
    • Laser mask and crystallization method using the same
    • 激光掩模和结晶法使用相同
    • US07816196B2
    • 2010-10-19
    • US12495377
    • 2009-06-30
    • Hyun Sik SeoYun Ho JungYoung Joo KimJaeSung You
    • Hyun Sik SeoYun Ho JungYoung Joo KimJaeSung You
    • H01L21/84
    • H01L21/0268B23K26/066H01L21/2026H01L27/1285H01L29/66757H01L29/78675
    • An embodiment of a laser crystallization method includes providing a substrate on which an amorphous silicon thin film is deposited, positioning a laser mask over the substrate, the laser mask including a mask pattern that contains transmitting regions and a blocking region, irradiating a first laser beam onto a surface of the substrate through the pattern of the laser mask to first crystallize a predetermined region of the silicon thin film, moving the laser mask or a stage on which the substrate is loaded in an X-axis direction to perform second crystallization using the laser mask, repeatedly performing the crystallization to an end of the substrate in the X-axis direction, moving the laser mask or the stage in a Y-axis direction, and repeatedly performing the crystallization in the Y-axis direction to complete crystallization.
    • 激光结晶方法的一个实施例包括提供沉积非晶硅薄膜的衬底,将激光掩模定位在衬底上,激光掩模包括含有透射区域和阻挡区域的掩模图案,照射第一激光束 通过激光掩模的图案在基板的表面上,首先使硅薄膜的预定区域结晶,使激光掩模或其上载置基板的载台沿X轴方向移动,以使用第二结晶 激光掩模,在X轴方向上重复地向基板的端部进行结晶,使激光掩模或载物台沿Y轴方向移动,并且在Y轴方向上反复进行结晶以完成结晶。