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    • 78. 发明授权
    • Optical-waveguide-element module
    • 光波导元件模块
    • US09335570B2
    • 2016-05-10
    • US14369511
    • 2012-12-28
    • SUMITOMO OSAKA CEMENT CO., LTD.
    • Kei KatouNorikazu Miyazaki
    • G02F1/035G02F1/01G02F1/225G02F1/21
    • G02F1/035G02F1/0121G02F1/225G02F1/2255G02F2001/212
    • An object of the present invention is to provide an optical waveguide element module where the bonding wires can be prevented from disengaging or disconnecting so as to provide high reliability. Another object is to provide an optical waveguide element module that can be made compact and where an increase in the manufacturing cost can be minimized. An optical waveguide element module having: a waveguide substrate 1 on which an optical waveguide (not shown) and control electrodes (E1 to E4) for controlling light waves that propagate through the optical waveguide are formed; external substrates (21 to 24) having wire circuits (TM1, C1), which are connected to control electrodes electrically, disposed proximity to the waveguide substrate; a housing 3 in which the external substrate and the waveguide substrate are arranged; and terminals (T21 to T24) which are connected to an external electric circuit (not shown) for supplying electrical signals to the control electrode or deriving electrical signals from the control electrode provided with the housing, wherein relay electrode pads (CP1, CP4) which are electrically isolated from both of the wiring circuit and the control electrode are formed in any portion of the waveguide substrate 1 and the external substrates (21 to 24), and at least one bonding wire (W21, W22, W41, W42) is connected from a control electrode to the terminal or from the wire circuit to the terminal via the relay electrode pad.
    • 本发明的目的是提供一种光波导元件模块,其中可以防止接合线脱离或断开,从而提供高可靠性。 另一个目的是提供一种光波导元件模块,该光波导元件模块可以制造得紧凑并且可以最小化制造成本的增加。 一种光波导元件模块,具有:波导基板1,其上形成有用于控制通过光波导传播的光波的光波导(未示出)和控制电极(E1至E4); 具有布置在波导基板附近的电连接到控制电极的线路电路(TM1,C1)的外部基板(21至24) 设置有外部基板和波导基板的壳体3; 和连接到用于向控制电极提供电信号或从设置有壳体的控制电极导出电信号的外部电路(未示出)连接的端子(T21至T24),其中继电器电极焊盘(CP1,CP4) 与布线电路电气隔离,并且控制电极形成在波导基板1和外部基板(21〜24)的任意部分,并且至少一个接合线(W21,W22,W41,W42)被连接 从控制电极到终端,或者通过中继电极焊盘从线电路到终端。
    • 79. 发明授权
    • Electrostatic chucking device
    • 静电吸盘装置
    • US09287156B2
    • 2016-03-15
    • US14155591
    • 2014-01-15
    • Sumitomo Osaka Cement Co., Ltd.
    • Yoshiaki MoriyaYukio MiuraShinichi Maeta
    • H01L21/683H01L21/67
    • H01L21/6833H01L21/67103
    • The electrostatic chucking device 1 of the invention includes an electrostatic chucking portion 2 which includes a plate-like body 11, a top surface 11a of which is used as a mounting surface that mounts a plate-like specimen W, an electrostatic adsorption electrode 12 provided in the plate-like body 11 and a power-feeding terminal 13 that applies a direct-current voltage to the electrostatic adsorption electrode 12; and a base portion 31 that supports the electrostatic chucking portion 2, in which the plate-like body 11 is a corrosion-resistant ceramic, a circular insulation member 21 is provided in a circumferential edge portion between the electrostatic chucking portion 2 and the base portion 31, and a heat radiation plate 34 is provided on the top surface 31a of the base portion 31.
    • 本发明的静电吸附装置1包括静电吸附部分2,其包括板状体11,其顶表面11a用作安装板状样本W的安装表面,设置有静电吸附电极12 在板状体11和向静电吸附电极12施加直流电压的供电端子13; 以及支撑静电吸附部2的基部31,其中板状体11是耐腐蚀陶瓷,在静电吸附部2和基部之间的周缘部设置有圆形绝缘部件21 31,在基部31的顶面31a上设有散热板34。