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    • 63. 发明授权
    • Repair of dielectric-coated electrode or circuit defects
    • 修复电介质电极或电路缺陷
    • US06211080B1
    • 2001-04-03
    • US08741480
    • 1996-10-30
    • Abdelkrim Tatah
    • Abdelkrim Tatah
    • H01L2144
    • H05K3/225B23K26/351C23C14/046C23C16/045H05K1/0306H05K3/0017H05K3/146H05K3/28H05K2203/0528H05K2203/0769H05K2203/107H05K2203/1338H05K2203/173
    • A method of repairing or augmenting a metal line buried beneath at least one cover layer comprising the steps of creating a via through the cover layer to the metal line, repairing or augmenting the metal line, and filling the via. Also provided is apparatus for repairing or augmenting a metal line buried beneath at least one cover layer comprising means for creating a via through the cover layer to the metal line, means for repairing or augmenting the metal line, and means for filling the via. Also provided is a substrate having a metal line buried beneath at least one cover layer wherein the metal line has been repaired or augmented according to the process comprising the steps of creating a via through the cover layer to the metal line, repairing or augmenting the metal line, and filling the via.
    • 一种修复或增加掩埋在至少一个覆盖层下面的金属线的方法,包括以下步骤:通过覆盖层形成通向金属线的通孔,修复或增加金属线,以及填充通孔。 还提供了用于修复或增加掩埋在至少一个覆盖层下面的金属线的装置,包括用于通过覆盖层形成到金属线的通孔,用于修复或增加金属线的装置,以及用于填充通孔的装置。 还提供了一种衬底,其具有埋在至少一个覆盖层下面的金属线,其中金属线已经被修复或增加,根据包括以下步骤的金属线:通过覆盖层形成通孔到金属线,修复或增加金属 线,填充通孔。