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61. 发明申请

US20140042606A1 Low Loss Nano-aperture 失效
标题翻译：低损耗纳米孔径
公开(公告)号：US20140042606A1
公开(公告)日：2014-02-13
申请号：US13758829
申请日：2013-02-04
申请人： The Board of Trustees of the Leland Stanford Junior University
发明人： Sonny Vo , James S. Harris, JR.
IPC分类号： H01L23/04
CPC分类号： H01L33/007 , G11B7/127 , G11B7/1387 , H01L23/04 , H01L33/22 , H01L2924/0002 , H01S5/18305 , H01S5/18311 , H01S5/18341 , H01S5/18361 , H01S5/18388 , H01S5/18394 , H01S5/423 , H01L2924/00
摘要： Low loss optical apertures are provided. A silicon intermediate layer sandwiched between a metal aperture layer and a dielectric layer has been found to offer a good combination of low optical loss combined with superior mechanical properties.
摘要翻译：提供低损耗光学孔径。已经发现夹在金属孔径层和电介质层之间的硅中间层提供了低光学损耗与优异的机械性能的良好组合。

62. 发明授权

US08630325B2 Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus 有权
标题翻译：制造方法，表面发射激光器件，表面发射激光器阵列，光学扫描器和成像设备
公开(公告)号：US08630325B2
公开(公告)日：2014-01-14
申请号：US13766189
申请日：2013-02-13
申请人： Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
发明人： Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
IPC分类号： H01S5/00
CPC分类号： H01S5/18361 , H01S5/0202 , H01S5/18311 , H01S5/3202 , H01S5/423 , H01S2301/173 , H01S2301/176
摘要： A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
摘要翻译：一种制造表面发射激光器件的制造方法包括以下步骤：在基板上层压下反射镜，包括有源层的谐振器结构和具有选择性氧化层的上反射层的层叠体; 蚀刻层叠体以形成在其侧表面露出的选择性氧化层的台面结构; 从台面结构的侧面选择性地氧化选择氧化层，形成电流通过区被氧化物包围的收缩结构; 在远离台面结构的位置处形成分隔槽; 钝化形成分离槽时暴露的层叠体的至少一部分的最外表面; 并用绝缘体涂覆钝化部分。

63. 发明授权

US08611383B2 Optically-pumped surface-emitting semiconductor laser with heat-spreading compound mirror-structure 有权
标题翻译：具有散热复合镜面结构的光泵浦表面发射半导体激光器
公开(公告)号：US08611383B2
公开(公告)日：2013-12-17
申请号：US13093585
申请日：2011-04-25
申请人： Sergei Govorkov , Luis Spinelli
发明人： Sergei Govorkov , Luis Spinelli
IPC分类号： H01S5/024 , H01S5/183
CPC分类号： H01S5/02484 , B82Y20/00 , H01S3/109 , H01S5/0213 , H01S5/041 , H01S5/142 , H01S5/18361 , H01S5/18377 , H01S5/1838 , H01S5/34306
摘要： A gain-module for use in an OPS-laser includes a multilayer semiconductor gain-structure surmounting a multilayer compound mirror-structure. Within the multilayer compound mirror-structure is a relatively thick layer of diamond which serves as a heat-spreader.
摘要翻译：用于OPS激光器的增益模块包括跨越多层复合镜结构的多层半导体增益结构。在多层复合镜中，镜面结构是用作散热器的相对较厚的金刚石层。

64. 发明授权

US08526471B2 High contrast grating based saturable absorber for mode-locked lasers and its applications in passively mode-locked vertical-cavity surface-emitting lasers 有权
标题翻译：用于锁模激光器的高对比度光栅基可饱和吸收器及其在被动锁模垂直腔表面发射激光器中的应用
公开(公告)号：US08526471B2
公开(公告)日：2013-09-03
申请号：US13593407
申请日：2012-08-23
申请人： Connie Chang-Hasnain , Weijian Yang , Christopher Chase , Forrest G. Sedgwick
发明人： Connie Chang-Hasnain , Weijian Yang , Christopher Chase , Forrest G. Sedgwick
IPC分类号： H01S3/113 , H01S3/098 , G02B5/18
CPC分类号： G02B5/1809 , H01S5/18319 , H01S5/18361
摘要： A saturable absorber (SA) based on a high-contrast grating (HCG) having a buried layer of quantum structures for absorption, and which is particularly well suited for use in a mode-locked application. The HCG-SA provides three times the bandwidth compared with traditional DBR structures, while exhibiting a lower saturation fluence due to the field enhancement inside the grating. Varying grating bar width over one or two axis provides lensing effects on the optical output, while chirping of the period and duty cycle changes optical phase relationships. Novel VCSEL embodiments with external or internal cavities are described using the HCG-SA.
摘要翻译：基于具有用于吸收的量子结构的掩埋层的高对比度光栅（HCG）的可饱和吸收体（SA），特别适用于锁模应用。与传统的DBR结构相比，HCG-SA提供了三倍的带宽，同时由于光栅内的场增强而呈现较低的饱和能量密度。在一个或两个轴上变化的光栅条宽度对光输出提供透镜效应，而周期和占空比的啁啾会改变光学相位关系。使用HCG-SA描述具有外部或内部空腔的新型VCSEL实施例。

65. 发明申请

US20130223466A1 OPTICAL ELEMENT FOR VERTICAL EXTERNAL-CAVITY SURFACE-EMITTING LASER 有权
标题翻译：用于垂直外部表面发射激光的光学元件
公开(公告)号：US20130223466A1
公开(公告)日：2013-08-29
申请号：US13882998
申请日：2011-11-01
申请人： Stephan Gronenborn , Holger Moench
发明人： Stephan Gronenborn , Holger Moench
IPC分类号： H01S5/183
CPC分类号： H01S5/18361 , G02B19/0057 , H01S3/08059 , H01S5/026 , H01S5/0267 , H01S5/14 , H01S5/18388 , H01S5/4062 , H01S5/423
摘要： The present invention relates to an optical element for VEC-SELs or VECSEL arrays. The optical element is formed of a substrate (200) which is transparent at least in a wavelength region of optical radiation. A first interface of the- substrate (200) comprises one or several curved regions forming part of an optical lens or of an array of optical lenses (220) integrated in the substrate (200). The substrate (200) further comprises one or several optical mirrors (210) formed on a second interface of the substrate (200) opposing the first interface or embedded in the substrate (200). The optical mirrors (210) are arranged and designed to back reflect a fraction of optical radiation incident on the first or second interface. The optical mirrors (210) are flat mirrors or curved mirrors having a radius of curvature different from the radius of curvature of the curved region (220). The optical element allows the fabrication of a VECSEL or VECSEL array having a high brightness without the requirement of additional adjustments during fabrication. The VECSEL are arranged at a distance (L) to the optical mirrors (210) and this equals the length of the external cavity. The ROC of the optical lens may be chosen to ROC=L/2 and for the optical mirror ROC>L. The cavity length may be adjusted by a monolithic spacer (120)
摘要翻译：本发明涉及一种用于VEC-SEL或VECSEL阵列的光学元件。光学元件由至少在光辐射的波长区域中透明的基板（200）形成。衬底（200）的第一界面包括形成光学透镜的一部分或整合在衬底（200）中的光学透镜阵列的一个或多个弯曲区域。衬底（200）还包括形成在与第一界面相对或嵌入在衬底（200）中的衬底（200）的第二界面上的一个或多个光学镜（210）。光学镜（210）被布置和设计成反射入射在第一或第二界面上的一部分光学辐射。光学镜（210）是具有不同于弯曲区域（220）的曲率半径的曲率半径的平面镜或曲面镜。光学元件允许制造具有高亮度的VECSEL或VECSEL阵列，而不需要在制造期间进行额外的调整。 VECSEL布置在与光学镜（210）的距离（L）处，并且这等于外腔的长度。光学透镜的ROC可以选择为ROC = L / 2，对于光学镜ROC> L。空腔长度可以通过整体式隔离件（120）

66. 发明授权

US08488646B2 HCG reflection enhancement in diverse refractive index material 有权
$HCG reflection enhancement in diverse refractive index material$
标题翻译：各种折射率材料的HCG反射增强
公开(公告)号：US08488646B2
公开(公告)日：2013-07-16
申请号：US13593375
申请日：2012-08-23
申请人： Connie Chang-Hasnain , Christopher Chase , Igor Karagodsy
发明人： Connie Chang-Hasnain , Christopher Chase , Vadim Karagodsky
IPC分类号： H01S5/00
CPC分类号： G02B5/1809 , H01S5/18319 , H01S5/18361
摘要： Enhanced reflectivity High-Contrast Gratings are described which operate in different medium. An HCG is described with a deep/buried metallization layer separated at a distance of least three to four grating thicknesses from the grating. Reflective bandwidth of the HCG is substantially increased, such as by a factor or five, by inclusion of the deep/buried metallization layer. An HCG is described which provides high reflectivity, even when embedded into materials of a moderate to high index of refraction, such as semiconductor material. Vertical cavity surface emitting laser embodiments are described which utilize these reflectivity enhancements, and preferably utilize HCG reflectors for top and/or bottom mirrors.
摘要翻译：增强的反射率描述了在不同介质中工作的高对比度光栅。 HCG被描述为具有从光栅至少三到四个光栅厚度的距离分开的深/掩埋金属化层。 HCG的反射带宽通过包含深/掩埋金属化层而显着增加，例如通过因子或五。描述了提供高反射率的HCG，即使当嵌入中等至高折射率的材料（例如半导体材料）时也是如此。描述了利用这些反射率增强的垂直腔表面发射激光器实施例，并且优选地使用用于顶部和/或底部反射镜的HCG反射器。

67. 发明授权

US08481350B2 Asymmetric DBR pairs combined with periodic and modulation doping to maximize conduction and reflectivity, and minimize absorption 有权
标题翻译：非对称DBR对与周期性和调制掺杂结合，以最大限度地提高传导和反射率，并使吸收最小化
公开(公告)号：US08481350B2
公开(公告)日：2013-07-09
申请号：US13537340
申请日：2012-06-29
申请人： Ralph H. Johnson , James Guenter
发明人： Ralph H. Johnson , James Guenter
IPC分类号： H01L21/00
CPC分类号： H01S5/18361 , H01L33/0045 , H01L33/105 , H01S5/0425 , H01S5/18344 , H01S5/305 , H01S5/3054 , H01S5/3077
摘要： Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
摘要翻译：制造具有改善的导电性和反射性以及最小吸收的光学器件的方法。步骤包括形成设计成反射具有峰值和零点的光场的多个反射镜周期。形成多个次周期的一部分包括形成厚度小于光场四分之一波长的第一层; 在第一层上形成第一组合斜面; 并且在所述组成斜面上形成第二层，所述第二层具有与所述第一层不同的折射率，并且具有使得所述光学场的零点发生在所述第二层内而不在所述组成斜面内的厚度，并且其中形成第二层还包括在光场的零点的位置处重掺杂第二层。

68. 发明授权

US08311073B2 Semiconductor laser, semiconductor laser device, and fabrication method of semiconductor laser 有权
标题翻译：半导体激光器，半导体激光器件和半导体激光器的制造方法
公开(公告)号：US08311073B2
公开(公告)日：2012-11-13
申请号：US12879541
申请日：2010-09-10
申请人： Kazutaka Takeda , Takashi Kondo , Hideaki Ozawa
发明人： Kazutaka Takeda , Takashi Kondo , Hideaki Ozawa
IPC分类号： H01S3/08
CPC分类号： H01S5/18388 , H01L2224/48091 , H01S5/0071 , H01S5/02284 , H01S5/026 , H01S5/18308 , H01S5/18313 , H01S5/18361 , H01S5/2215 , H01S5/3215 , H01L2924/00014
摘要： A semiconductor laser that includes: a substrate; a first semiconductor multilayer reflector of a first conductive type formed on the substrate; an active region formed on the first semiconductor multilayer reflector; a second semiconductor multilayer reflector of a second conductive type formed on the active region; and an intermediate semiconductor layer of a first conductive type or a second conductive type formed under the first semiconductor multilayer reflector or above the second semiconductor multilayer reflector. An oxidized region formed by oxidizing a part of the intermediate semiconductor layer and an un-oxidized region contacting with the oxidized region are formed in the intermediate semiconductor layer, the un-oxidized region is electrically connected to the first or second semiconductor multilayer reflector, and a beam generated in the active region is reflected at a boundary between the oxidized region and the un-oxidized region to a direction parallel to a principal surface of the substrate, and is emitted from a side surface of the intermediate semiconductor layer.
摘要翻译：一种半导体激光器，包括：基板; 形成在所述基板上的第一导电类型的第一半导体多层反射器; 形成在所述第一半导体多层反射器上的有源区; 形成在有源区上的第二导电类型的第二半导体多层反射器; 以及形成在所述第一半导体多层反射器之下或所述第二半导体多层反射器之下的第一导电类型或第二导电类型的中间半导体层。在中间半导体层中形成通过氧化中间半导体层的一部分而形成的氧化区域和与氧化区域接触的未氧化区域，未氧化区域与第一或第二半导体多层反射体电连接，在有源区域中产生的光束在氧化区域和未氧化区域之间的边界处反射到与基板的主表面平行的方向，并且从中间半导体层的侧表面发射。

69. 发明申请

US20120270346A1 ASYMMETRIC DBR PAIRS COMBINED WITH PERIODIC AND MODULATION DOPING TO MAXIMIZE CONDUCTION AND REFLECTIVITY, AND MINIMIZE ABSORPTION 有权
标题翻译：结合周期性和调制功能的不对称DBR配对以最大限度地提高导电性和反射性，并最小化吸收
公开(公告)号：US20120270346A1
公开(公告)日：2012-10-25
申请号：US13537340
申请日：2012-06-29
申请人： Ralph H. Johnson , James Guenter
发明人： Ralph H. Johnson , James Guenter
IPC分类号： H01L33/60
CPC分类号： H01S5/18361 , H01L33/0045 , H01L33/105 , H01S5/0425 , H01S5/18344 , H01S5/305 , H01S5/3054 , H01S5/3077
摘要： Methods for fabricating an optical device that exhibits improved conduction and reflectivity, and minimized absorption. Steps include forming a plurality of mirror periods designed to reflect an optical field having peaks and nulls. The formation of a portion of the plurality of minor periods includes forming a first layer having a thickness of less than one-quarter wavelength of the optical field; forming a first compositional ramp on the first layer; and forming a second layer on the compositional ramp, the second layer having a different index of refraction than the first layer and having a thickness such that the nulls of the optical field occur within the second layer and not within the compositional ramp, and wherein forming the second layer further comprises heavily doping the second layer at a location of the nulls of the optical field.
摘要翻译：制造具有改善的导电性和反射性以及最小吸收的光学器件的方法。步骤包括形成设计成反射具有峰值和零点的光场的多个反射镜周期。形成多个次周期的一部分包括形成厚度小于光场四分之一波长的第一层; 在第一层上形成第一组合斜面; 并且在所述组成斜面上形成第二层，所述第二层具有与所述第一层不同的折射率，并且具有使得所述光学场的零点发生在所述第二层内而不在所述组成斜面内的厚度，并且其中形成第二层还包括在光场的零点的位置处重掺杂第二层。

70. 发明授权

US08031752B1 VCSEL optimized for high speed data 有权
标题翻译： VCSEL针对高速数据进行了优化
公开(公告)号：US08031752B1
公开(公告)日：2011-10-04
申请号：US12340286
申请日：2008-12-19
申请人： Ralph H. Johnson , James K. Guenter , James R. Biard
发明人： Ralph H. Johnson , James K. Guenter , James R. Biard
IPC分类号： H01S5/00
CPC分类号： H01S5/18358 , H01S5/18311 , H01S5/18344 , H01S5/18361 , H01S5/305 , H01S5/3077 , H01S5/3211
摘要： A Vertical Cavity Surface Emitting Laser (VCSEL) is optimized for longer life of the VCSEL by controlling the distance of doped and undoped layers near an active region. In addition, the VCSEL optimized for reduced parasitic lateral current under an oxide of the VCSEL by forming a high Al confinement region and placing the oxide at a null in a standing optical wave. Further, the VCSEL is optimized to reduce resistance.
摘要翻译：垂直腔表面发射激光器（VCSEL）通过控制有源区域附近的掺杂层和未掺杂层的距离来优化VCSEL的更长寿命。此外，VCSEL通过形成高Al限制区域并将氧化物置于无效的静态光波中而优化用于在VCSEL的氧化物下降低的寄生横向电流。此外，VCSEL被优化以降低电阻。

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