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    • 62. 发明授权
    • Ultra-sensitive magnetoresistive displacement sensing device
    • 超敏感磁阻位移传感装置
    • US06507187B1
    • 2003-01-14
    • US09384363
    • 1999-08-24
    • John D. OlivasBruce M. LairsonRajeshuni Ramesham
    • John D. OlivasBruce M. LairsonRajeshuni Ramesham
    • G01B714
    • G01L9/0042G01B7/24G01L9/007G01P15/105
    • An ultrasensitive displacement sensing device for use in accelerometers, pressure gauges, temperature transducers, and the like, comprises a sputter deposited, multilayer, magnetoresistive field sensor with a variable electrical resistance based on an imposed magnetic field. The device detects displacement by sensing changes in the local magnetic field about the magnetoresistive field sensor caused by the displacement of a hard magnetic film on a movable microstructure. The microstructure, which may be a cantilever, membrane, bridge, or other microelement, moves under the influence of an acceleration a known displacement predicted by the configuration and materials selected, and the resulting change in the electrical resistance of the MR sensor can be used to calculate the displacement. Using a micromachining approach, very thin silicon and silicon nitride membranes are fabricated in one preferred embodiment by means of anisotropic etching of silicon wafers. Other approaches include reactive ion etching of silicon on insulator (SOI), or Low Pressure Chemical Vapor Deposition of silicon nitride films over silicon substrates. The device is found to be improved with the use of giant magnetoresistive elements to detect changes in the local magnetic field.
    • 用于加速度计,压力表,温度传感器等的超灵敏位移传感装置包括基于施加磁场的具有可变电阻的溅射沉积的多层磁阻场传感器。 该装置通过感测由可移动微结构上的硬磁性膜的位移引起的磁阻场传感器的局部磁场的变化来检测位移。 可以是悬臂,膜,桥或其他微量元件的微结构在受所选配置和材料预测的已知位移的加速度的影响下移动,并且可以使用MR传感器的电阻的所得变化 计算排量。 使用微加工方法,通过硅晶片的各向异性蚀刻,在一个优选实施例中制造非常薄的硅和氮化硅膜。 其他方法包括绝缘体上的硅的反应离子蚀刻(SOI),或硅衬底上的氮化硅膜的低压化学气相沉积。 发现该装置通过使用巨磁阻元件来改善局部磁场的变化。
    • 63. 发明授权
    • Force detector and acceleration detector and method of manufacturing the same
    • 力检测器和加速度检测器及其制造方法
    • US06477903B2
    • 2002-11-12
    • US09907444
    • 2001-07-17
    • Kazuhiro Okada
    • Kazuhiro Okada
    • G01D700
    • G01P15/18B81B3/0021B81B2201/0235G01L1/144G01L5/165G01L5/167G01P1/023G01P15/0802G01P15/0922G01P15/105G01P15/125G01P2015/084
    • An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
    • 在第一基板的上表面上形成电极层,进行部分除去基板的处理,以使基板具有挠性。 连接到第一基板的下表面,连接第二基板。 然后,通过切割第二基板,形成工作体和基座。 另一方面,在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板,使得两个电极以彼此之间的预定间隔彼此面对。 最后,第一,第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时,第一基板弯曲。 结果,两个电极之间的距离变化。 因此,通过两个电极之间的静电电容的变化来检测施加的加速度。
    • 64. 发明授权
    • Acceleration sensor
    • 加速度传感器
    • US6131457A
    • 2000-10-17
    • US287156
    • 1999-04-06
    • Kaoru Sato
    • Kaoru Sato
    • B81B3/00G01P15/08G01P15/105G01P15/11G01P15/18H01L29/84G01P15/00
    • G01P15/105G01P15/0885G01P15/11G01P15/18G01P2015/084
    • A three-dimensional acceleration sensor having a magnetic body including a mass point, mounted to a vibrator having three-dimensional freedom and an axis in line with a Z-axis within the orthogonal spatial coordinate axes of X, Y and Z. The acceleration sensor includes four or more detector elements including at least two positioned along the X-axis and at least two positioned along the Y-axis with their centers located along a concentric circle around the origin point of the coordinate axes. The sensor detects acceleration in a direction of the X-axis through a relative difference in output voltage between two of the detector elements positioned along the X-axis due to a variation of magnetic field intensity from the magnetic body, acceleration in a direction of the Y-axis through a relative difference in output voltage between two of the detector elements positioned along the Y-axis, and acceleration in a direction of the Z-axis through an aggregate sum of the output voltages of all the detector elements. The acceleration sensor thus has a wide dynamic range as well as high detection accuracy, and may be produced having a reduced size.
    • 一种三维加速度传感器,其具有包括质点的磁体,安装到具有三维自由度的振动器和在X,Y和Z的正交空间坐标轴内的Z轴的轴线。加速度传感器 包括四个或更多个检测器元件,包括沿着X轴定位的至少两个和沿着Y轴定位的至少两个,其中心沿着围绕坐标轴的原点的同心圆定位。 传感器通过由于来自磁体的磁场强度的变化而沿着X轴定位的两个检测器元件之间的输出电压的相对差异来检测X轴方向上的加速度, Y轴,通过沿着Y轴定位的两个检测器元件之间的输出电压的相对差,以及通过所有检测器元件的输出电压的总和的Z轴方向的加速度。 因此,加速度传感器具有宽动态范围以及高检测精度,并且可以制造具有减小的尺寸。
    • 66. 发明授权
    • Accelerometer with a cantilever beam formed as part of the housing
structure
    • 具有悬臂梁的加速度计形成为壳体结构的一部分
    • US5627315A
    • 1997-05-06
    • US423196
    • 1995-04-18
    • Bruce B. FigiThomas R. Giuffre
    • Bruce B. FigiThomas R. Giuffre
    • G01P1/02G01P15/105G01P15/08
    • G01P1/023G01P15/105G01P2015/0817G01P2015/0828
    • An accelerometer is provided in which a magnet structure is encapsulated within a distal end of a cantilever beam that is formed as an integral part of a housing structure. The cantilever beam, the distal end and the housing structure are formed of a nonmagnetic material, such as plastic, during a single injection molding procedure. The magnetic structure within the distal end of the cantilever beam can comprise two magnets associated with a pole piece and disposed within an opening formed in a nonmagnetic bracket. Although many types of magnet structures are possible within the scope of the present invention, a particularly preferred magnet structure comprises two magnets that are arranged in opposite polarity with the opposite poles of the two magnets being located adjacent to each other on opposite sides of a centerline. The magnet structure can be held in place during the injection molding process by the magnetic attraction between the magnet structure and a ferromagnetic portion of the mold. The magnetically sensitive component, which is held in place within a wall of the housing structure, can be a Hall effect element.
    • 提供一种加速度计,其中磁体结构被封装在形成为壳体结构的整体部分的悬臂梁的远端内。 在单次注射成型过程中,悬臂梁,远端和壳体结构由非磁性材料(例如塑料)形成。 悬臂梁远端内部的磁性结构可以包括与极片相关联的两个磁体,并且设置在形成于非磁性支架中的开口内。 尽管在本发明的范围内许多类型的磁体结构是可能的,但是特别优选的磁体结构包括两个磁体,这两个磁体以相反的极性排列,两个磁体的相对的磁极位于中心线的相对侧上彼此相邻 。 在注射成型过程中,磁体结构可以通过磁体结构和模具的铁磁部分之间的磁吸引力保持就位。 保持在壳体结构的壁内的适当的磁敏部件可以是霍尔效应元件。
    • 67. 发明授权
    • Vehicle safety restraint system with linear output impact sensor
    • 带线性输出冲击传感器的车辆安全系统
    • US5608270A
    • 1997-03-04
    • US423323
    • 1995-04-17
    • Jack B. Meister
    • Jack B. Meister
    • B60R21/01G01P15/093G01P15/105G01P15/11G01P15/135G01P21/00H01H35/14
    • B60R21/01332B60R21/0132B60R21/0136G01P15/093G01P15/105G01P15/11G01P15/135G01P21/00H01H35/14B60R2021/01068B60R2021/01322H01H2300/052H01H35/147
    • A vehicle restraint system that includes an impact sensor for sensing a vehicle impact to provide an electrical impact signal, an occupant restraint such as an air bag to restrain motion of a vehicle occupant, and an electronic control circuit responsive to the impact signal for operating the occupant restraint. The impact sensor includes a permanent magnet axially slidable within a linear cavity and resiliently biased to one end of the cavity, such that vehicle impact forces on the sensor urge the magnet to slide axially toward the opposing end of the cavity against the biasing forces. A magnetic sensor is disposed adjacent to the cavity and is characterized by providing the electrical impact signal as an analog electrical signal that varies in magnitude as a continuous monotonic function of axial position of the magnet within the cavity. The electronic control circuit is responsive to the impact signal for analyzing magnitude, slope and duration of the impact signal in order to predict necessity for activating the restraint system, and activating the restraint system when the magnitude slope and duration of the impact signal meet predetermined signal conditions or criteria.
    • 一种车辆限制系统,其包括用于感测车辆撞击以提供电击的信号的碰撞传感器,用于抑制车辆乘员的运动的诸如气囊的乘员约束,以及响应于所述撞击信号的电子控制电路, 乘员约束 冲击传感器包括在线性空腔内可轴向滑动并且弹性地偏压到空腔的一端的永磁体,使得传感器上的车辆冲击力促使磁体抵抗偏压力朝着空腔的相对端轴向滑动。 磁传感器被设置在与空腔相邻的位置,其特征在于提供电冲击信号作为模拟电信号,该模拟电信号的大小随着磁体在空腔内的轴向位置的连续单调函数而变化。 电子控制电路响应于冲击信号来分析冲击信号的幅度,斜率和持续时间,以便预测激活约束系统的必要性,并且当冲击信号的幅度斜率和持续时间满足预定信号时激活约束系统 条件或标准。
    • 68. 发明授权
    • Multi-dimensional force detector
    • 多维力检测器
    • US5421213A
    • 1995-06-06
    • US764159
    • 1991-09-20
    • Kazuhiro Okada
    • Kazuhiro Okada
    • B81B3/00G01L1/14G01L5/16G01P15/08G01P15/09G01P15/105G01P15/125G01P15/18G01L3/00
    • G01P15/18G01L1/144G01L5/165G01L5/167G01P15/0802G01P15/0922G01P15/105G01P15/125G01P2015/084Y10S73/04Y10T29/43Y10T29/49005Y10T29/49007
    • An electrode layer is formed on the upper surface of a first substrate, and a processing for partially removing the substrate is carried out in order to allow the substrate to have flexibility. To the lower surface of the first substrate, a second substrate is connected. Then, by cutting the second substrate, a working body and a pedestal are formed. On the other hand, a groove is formed on a third substrate. An electrode layer is formed on the bottom surface of the groove. The third substrate is connected to the first substrate so that both the electrodes face to each other with a predetermined spacing therebetween. Finally, the first, second and third substrates are cut off every respective unit regions to form independent sensors, respectively. When an acceleration is exerted on the working body, the first substrate bends. As a result, the distance between both the electrodes changes. Thus, an acceleration exerted is detected by changes in an electrostatic capacitance between both the electrodes.
    • 在第一基板的上表面上形成电极层,进行部分除去基板的处理,以使基板具有挠性。 连接到第一基板的下表面,连接第二基板。 然后,通过切割第二基板,形成工作体和基座。 另一方面,在第三基板上形成槽。 在槽的底面上形成电极层。 第三基板连接到第一基板,使得两个电极以彼此之间的预定间隔彼此面对。 最后,第一,第二和第三基板分别切断各个单元区域以分别形成独立的传感器。 当对工作体施加加速度时,第一基板弯曲。 结果,两个电极之间的距离变化。 因此,通过两个电极之间的静电电容的变化来检测施加的加速度。