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61. 发明授权

US08973199B2 Photomask cleaning device 有权
标题翻译：光掩模清洗装置
公开(公告)号：US08973199B2
公开(公告)日：2015-03-10
申请号：US13761236
申请日：2013-02-07
申请人： Gudeng Precision Industrial Co, Ltd.
发明人： Yung-Chin Pan
IPC分类号： G03F1/82 , B08B1/00 , B08B3/02
CPC分类号： G03F1/82
摘要： A photomask cleaning device includes a stage, a fluid dispenser, a scrubbing unit, a cover and a fixing unit. The fluid dispenser includes a direct dispensing unit disposed correspondingly to the scrubbing unit, and an oblique dispensing unit obliquely spraying water onto a photomask. Majority of the particles can be removed with the combined application of the oblique dispensing unit and the scrubbing unit.
摘要翻译：光掩模清洁装置包括台，流体分配器，擦洗单元，盖和定影单元。流体分配器包括对应于洗涤单元设置的直接分配单元和倾斜分配单元，其将水喷射到光掩模上。可以通过倾斜分配单元和洗涤单元的组合应用来去除大部分颗粒。

62. 发明申请

US20140137356A1 Device for Cleaning Photomask 审中-公开
标题翻译：清洁光罩设备
公开(公告)号：US20140137356A1
公开(公告)日：2014-05-22
申请号：US13770942
申请日：2013-02-19
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHARNG-SHIUAN SUEN , YUNG-CHIN PAN
IPC分类号： B08B1/00
CPC分类号： B08B1/006 , B08B1/007 , G03F1/82
摘要： The invention proposes a device for cleaning photomask comprising a wiping member wrapped on the surface of a central axle and unceasingly washed by cleaning fluid. When the photomask contacts the central axle, the washed wiping member can clean the photomask by rotation of the central axle in light of direction of the photomask's moving. After being wiped clean, the photomask will not be stained with dust or dirt.
摘要翻译：本发明提出了一种用于清洁光掩模的装置，其包括缠绕在中心轴的表面上并由清洁液不断洗涤的擦拭构件。当光掩模接触中心轴时，洗涤的擦拭构件可以根据光掩模移动的方向通过中心轴的旋转来清洁光掩模。擦拭干净后，光掩模不会被灰尘或污垢污染。

63. 发明申请

US20140076773A1 FRONT OPENING UNIFIED POD HAVING INLET AND OUTLET 审中-公开
标题翻译：正面打开统一的入口和出口的POD
公开(公告)号：US20140076773A1
公开(公告)日：2014-03-20
申请号：US13719428
申请日：2012-12-19
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHI-TE HUANG , SHAO-WEI LU , YU-LIANG CHOU
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , H01L21/67393
摘要： The present invention relates to a front opening unified pod (FOUP) having three inlets and one outlet. Thereby, the mixing region for the moisture, oxygen, and the filled gas can be increased and the removing efficiency of the moisture and oxygen in the FOUP is enhanced, improving the purging efficiency of the FOUP and shortening the time required for filling gas. In addition, the humidity in the FOUP can be reduced effectively so that the internal environment of the FOUP can reach rapidly the condition suitable for semiconductor fabrication. Hence, the subsequent semiconductor processes can be performed and the preparation time for the processes can be shortened.
摘要翻译：本发明涉及具有三个入口和一个出口的前开口统一舱（FOUP）。由此，能够提高水分，氧气和填充气体的混合区域，提高FOUP中的水分和氧气的除去效率，提高FOUP的净化效率，缩短填充气体所需的时间。此外，可以有效地降低FOUP中的湿度，使得FOUP的内部环境能够迅速达到适合于半导体制造的条件。因此，可以执行随后的半导体处理，并且可以缩短处理的准备时间。

64. 发明申请

US20130248400A1 CONTAINER FOR STORING SEMICONDUCTOR DEVICE 审中-公开
标题翻译：用于存储半导体器件的容器
公开(公告)号：US20130248400A1
公开(公告)日：2013-09-26
申请号：US13537661
申请日：2012-06-29
申请人： Chen-Wei KU , Sheng-Yuan WANG , Cheng-Ju LEE
发明人： Chen-Wei KU , Sheng-Yuan WANG , Cheng-Ju LEE
IPC分类号： B65D55/00 , B65D85/00
CPC分类号： H01L21/67373
摘要： A container for storing semiconductor devices is revealed. The container includes a receiving body and a cover. The receiving body is disposed with at least one fastener and at least one driver therein. The fastener includes a rolling element that is in contact with the driver. When the driver is rotated, it drives the fastener to move in the receiving body. At least one fixing part of the fastener is moved toward at least one fastening part of the cover. The cover is fixed on the receiving body by the fixing part locked in the fastening part. Moreover, friction between the fastener and the driver is minimized by the rolling element which reduces contact area between the fastener and the driver so as to prevent production of contaminants in the container and protect semiconductor devices stored in the container from being polluted. Thus the container is of high cleanness.
摘要翻译：揭示了用于存储半导体器件的容器。容器包括接收体和盖。接收体设置有至少一个紧固件和至少一个驱动器。紧固件包括与驱动器接触的滚动元件。当驾驶员旋转时，它驱动紧固件在接收体中移动。紧固件的至少一个固定部分朝向盖的至少一个紧固部分移动。通过锁定在紧固部分中的固定部分将盖固定在接收体上。此外，通过滚动元件使紧固件和驱动器之间的摩擦力减到最小，该滚动元件减小了紧固件和驱动器之间的接触面积，从而防止容器中污染物的产生，并保护储存在容器中的半导体器件免受污染。因此容器的清洁度高。

65. 发明授权

US08353404B2 Pod with guiding-locking piece therein 有权
标题翻译：具有导向锁定件的荚
公开(公告)号：US08353404B2
公开(公告)日：2013-01-15
申请号：US13110211
申请日：2011-05-18
申请人： Ming-Lung Chiu
发明人： Ming-Lung Chiu
IPC分类号： B65D85/00
CPC分类号： H01L21/67373
摘要： The present invention discloses a pod which includes a lower cover member, an upper cover member and a guiding locking piece. The guiding locking piece deployed on one side of the upper cover member of pod, the overall structure of which is formed by a flat base linking to a first slope that links to a second slope, two openings deployed on two side areas of the overall structure, and an upper locking piece and a lower locking piece deployed in each of two openings. When the mask is placed into the lower cover member of pod and is covered by the upper cover member, the mask is pushed to certain position and supported and locked by the upper locking piece and the lower locking piece.
摘要翻译：本发明公开了一种吊舱，其包括下盖构件，上盖构件和引导锁定件。所述引导锁定件部署在所述荚的上盖部件的一侧上，其整体结构由连接到连接到第二倾斜部的第一斜坡的平坦基部形成，所述第一倾斜部分布在所述整个结构的两个侧面区域上，以及在两个开口中的每一个中展开的上部锁定件和下部锁定件。当掩模被放置在容器的下盖构件中并且被上盖构件覆盖时，掩模被推到某个位置并被上锁定件和下锁定件支撑并锁定。

66. 发明授权

US08220631B2 Container and liner thereof 有权
标题翻译：集装箱及其内衬
公开(公告)号：US08220631B2
公开(公告)日：2012-07-17
申请号：US13104066
申请日：2011-05-10
申请人： Chih-Ming Lin , Ming-Chien Chiu
发明人： Chih-Ming Lin , Ming-Chien Chiu
IPC分类号： B65D85/48
CPC分类号： H01L21/67359 , B65D2585/86 , H01L21/67379 , H01L21/67386
摘要： A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.
摘要翻译：提供了具有顶盖和底盖的容器，其包括设置在底盖上的盖子，以形成容纳物品的空间。多个定位器设置在底盖的表面上，使得当底盖与顶盖紧密结合时，定位器被夹在底盖和顶盖之间，以将罩盖定位在固定位置。

67. 发明授权

US08083063B2 Reticle POD and supporting components therebetween 有权
标题翻译：掩模版POD及其间的支撑部件
公开(公告)号：US08083063B2
公开(公告)日：2011-12-27
申请号：US12726170
申请日：2010-03-17
申请人： Pao-Yi Lu , Sheng-Hung Wang
发明人： Pao-Yi Lu , Sheng-Hung Wang
IPC分类号： B65D85/48
CPC分类号： H01L21/67353 , G03F1/66 , H01L21/67359 , H01L21/67373
摘要： A reticle POD, comprising a top cover, a bottom cover, and a plurality of supporting components deployed in the four corners of the bottom cover, the supporting component comprising: a base body perpendicularly assembled, on two sides of which being disposed with mounting blocks; a pair of elastic elements respectively placed on the base body; a pair of leading elements connecting respectively to the horizontal extension of the elastic elements and then extending lengthwise to form a tip, a first bevel and a second bevel being formed on the side of the tip located on the inner side of the base body; a supporting base plate, the first and the second ends of which being connected to the second bevel of the leading element and a supporting pillar being disposed on the third end of the supporting base plate.
摘要翻译：一种掩模版POD，包括顶盖，底盖和布置在底盖的四个角部中的多个支撑部件，支撑部件包括：垂直组装的基体，其两侧设置有安装块 ; 分别放置在基体上的一对弹性元件; 一对引导元件分别连接到弹性元件的水平延伸部分，然后纵向延伸以形成尖端，第一斜面和第二斜面形成在位于基体内侧的尖端上; 支撑基板，其第一端和第二端连接到引导元件的第二斜面，支撑柱设置在支撑基板的第三端上。

68. 发明授权

US07581639B2 Photo mask retainer for photo mask delivery box 有权
标题翻译：照片面具保护罩用于照片面膜传送箱
公开(公告)号：US07581639B2
公开(公告)日：2009-09-01
申请号：US11518201
申请日：2006-09-11
申请人： Ming-Chien Chiu
发明人： Ming-Chien Chiu
IPC分类号： B65D85/48
CPC分类号： G03F7/70741 , G03F1/66 , H01L21/67353 , H01L21/67359 , H01L21/67369
摘要： A photo mask retainer, mounted inside a photo mask delivery box for holding a photo mask, in which the photo mask retainer includes a base, a U-turn extending from the top of the rear side of the base and curving toward the top side of the base, a bearing portion formed on the free end of the U-turn for pressing on the vertical peripheral sidewall of the photo mask, a retaining end portion formed on the free end of the U-turn for pressing on the top surface of the photo mask, and a clamp extending from the front side of the base for fastening to a respective locating block on the wall surface of the photo mask delivery box
摘要翻译：安装在用于保持光掩模的光掩模传送箱内的光掩模保持器，其中光掩模保持器包括基座，从基座的后侧的顶部延伸的U形转弯朝向所述基座，形成在所述U形转弯的自由端上用于按压在所述光罩的垂直外周侧壁上的支承部，形成在所述U形转弯的自由端上的保持端部，光掩模和从基座的前侧延伸的夹具，用于紧固到光掩模输送箱的壁表面上的相应定位块

69. 发明申请

US20080251414A1 Container and metal actuator of latching mechanism thereof 审中-公开
标题翻译：集装箱和金属制动器的闩锁机构
公开(公告)号：US20080251414A1
公开(公告)日：2008-10-16
申请号：US11979622
申请日：2007-11-06
申请人： Pao-Yi Lu
发明人： Pao-Yi Lu
IPC分类号： H01L21/673 , B65D85/90 , B65D55/14 , H01L21/67
CPC分类号： H01L21/67373 , Y10T70/5031
摘要： A container having a box door and a box is disclosed in this invention, which has an internal area within the box for storage; when the box is joined with the box door, the internal area is sealed off from the external environment. A latching mechanism is disposed within the box door and comprises a metal actuator and a latch plate, and the metal actuator and the latch plate are connected. Movements of the metal actuator allow the latch plate to shift positionally, and thus the latch plate is moved from a first position to a second position. When the latch plate is in the first position, the box and the box door may be separated from each other, whereas when the latch plate is in the second position, the box and the box door are inseparable.
摘要翻译：在本发明中公开了一种具有箱门和箱子的容器，其具有用于存储的箱内的内部区域; 当箱子与箱门连接时，内部区域与外部环境密封。闭锁机构设置在箱门内，包括金属致动器和闩锁板，并且金属致动器和闩锁板连接。金属致动器的移动允许闩锁板在位置上移动，因此闩锁板从第一位置移动到第二位置。当闩锁板处于第一位置时，箱体和箱门可以彼此分离，而当闩锁板处于第二位置时，箱体和箱门是不可分离的。

70. 发明申请

US20070287375A1 Air cabinet 审中-公开
标题翻译：空气柜
公开(公告)号：US20070287375A1
公开(公告)日：2007-12-13
申请号：US11509698
申请日：2006-08-25
申请人： Pan Yung Shuen
发明人： Pan Yung Shuen
IPC分类号： B01L1/04
CPC分类号： G03F1/66 , G03F7/70741 , H01L21/67017 , H01L21/67769
摘要： An air cabinet for photomask box is disclosed. A plurality of laminates each formed with punching holes are provided in the air cabinet. These laminates are arranged in parallel with the punching holes of the upper one facing the punching holes of the lower one, so that the caused laminar flow improves the cleanliness of the photomask box and ensures the mask inside the box against pollution when air flow through these punching ho
摘要翻译：公开了一种用于光掩模箱的空气柜。在空气柜中设置有多个形成有冲孔的层叠体。这些层叠体与上部的冲孔平行布置，面向下部的冲孔，从而使得所产生的层流提高了光掩模盒的清洁度，并确保了当空气流过这些空气时，箱内的面罩受到污染冲孔

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