专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 外观设计

USD712364S1 EUV pod 有权
标题翻译： EUV荚
公开(公告)号：USD712364S1
公开(公告)日：2014-09-02
申请号：US29420457
申请日：2012-05-09
申请人： Pao-Yi Lu , Cheng-Ju Lee , Chen-Wei Ku
设计人： Pao-Yi Lu , Cheng-Ju Lee , Chen-Wei Ku

2. 发明授权

US08474626B2 FOUP and robotic flange thereof 有权
标题翻译： FOUP及其机器人凸缘
公开(公告)号：US08474626B2
公开(公告)日：2013-07-02
申请号：US12766103
申请日：2010-04-23
申请人： Ming-Chien Chiu , Pao-Yi Lu , Kuo Chun Hung
发明人： Ming-Chien Chiu , Pao-Yi Lu , Kuo Chun Hung
IPC分类号： B65D85/00
CPC分类号： H01L21/67379 , Y10T29/49826
摘要： A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.
摘要翻译：晶片容器包括容器主体，其包括多个侧壁，底部和顶部，以限定用于容纳晶片的空间，形成在一个侧壁上的开口，以及具有外表面和内表面的门。容器主体的顶部设置有机器人法兰，其包括防盗结构和半圆形卡扣钩部分，其设置在机器人法兰的下表面的中心并且其周边面向顶部。防盗结构具有用于插入容器主体顶部上的突出部分的几何孔。在突出部分插入几何孔中之后，机器人凸缘沿着容器主体进一步旋转约180度，用于半 - 圆形卡钩部分，以接合在容器主体的顶部上的半圆形支撑部分中。

3. 发明授权

US07942269B2 Carrier of reticle pod and the fixing element thereof 有权
标题翻译：光罩荚的载体及其固定元件
公开(公告)号：US07942269B2
公开(公告)日：2011-05-17
申请号：US12247316
申请日：2008-10-08
申请人： Pao-Yi Lu
发明人： Pao-Yi Lu
IPC分类号： B65D85/30 , B65D81/02
CPC分类号： H01L21/67359 , H01L21/67005 , H01L21/67369
摘要： This invention is related to a carrier of reticle pod. The carrier of reticle pod comprises an upper cover and a lower cover, and the upper cover is configured to be coupled to the lower cover to form an interior space for accommodation. The lower cover includes several pairs of guide tracks disposed on two opposite lateral sides of inner surface of the lower cover. Clapboards are set into the lower cover via the guide tracks to separate the space for accommodation into a plurality of spaces for accommodation for storing reticle pod. Fixing elements including a clipping portion and a resisting portion are disposed on the top surface of the inner surface of upper cover. When the upper cover closes the lower cover, each fixing element of the upper cover is configured to be coupled to each reticle pod stored in the carrier.
摘要翻译：本发明涉及标线舱的载体。标线舱的托架包括上盖和下盖，并且上盖构造成联接到下盖以形成用于容纳的内部空间。下盖包括设置在下盖的内表面的两个相对侧面上的若干对导轨。隔板通过引导轨道设置在下盖中，以便将用于容纳的空间分隔成多个空间，用于容纳用于存放掩模版舱的空间。包括夹持部分和阻力部分的固定元件设置在上盖的内表面的顶表面上。当上盖关闭下盖时，上盖的每个固定元件构造成联接到存储在载体中的每个标线盒。

4. 发明申请

US20100051504A1 Wafer Container with Integrated Wafer Restraint Module 审中-公开
标题翻译：具有集成晶片约束模块的晶圆容器
公开(公告)号：US20100051504A1
公开(公告)日：2010-03-04
申请号：US12206860
申请日：2008-09-09
申请人： Pao-Yi Lu , Chin-Ming Lin
发明人： Pao-Yi Lu , Chin-Ming Lin
IPC分类号： B65D85/90
CPC分类号： H01L21/67369
摘要： A wafer container includes a container body, the internal of which is disposed with a plurality of slots for supporting a plurality of wafers and an opening is formed on one sidewall of which for importing and exporting said plurality of wafers, and a door with an outer surface and an inner surface, which is joined with opening of the container body with its inner surface for protecting the plurality of wafers in the container body, the characteristic in that: a recess is integrated with the inner surface of the door for separating the inner surface into two platforms, a restraint module is formed respectively on each of two platforms, and each restraint module includes a base which is disposed with a plurality of notches arranged at interval for contacting said plurality of wafers.
摘要翻译：晶片容器包括容器体，其内部设置有多个用于支撑多个晶片的槽，并且在其一个侧壁上形成有用于导入和导出所述多个晶片的开口，以及具有外部的门表面和内表面，其与其内表面与容器主体的开口接合，用于保护容器主体中的多个晶片，其特征在于：凹部与门的内表面一体化，用于将内部表面分成两个平台，分别在两个平台中的每一个上形成约束模块，并且每个约束模块包括基部，该基部设置有间隔设置的多个凹口，用于接触所述多个晶片。

5. 发明授权

US09097980B2 Transmission box for reticle POD 有权
标题翻译：光罩POD传输箱
公开(公告)号：US09097980B2
公开(公告)日：2015-08-04
申请号：US13250395
申请日：2011-09-30
申请人： Chen-Wei Ku , Pao-Yi Lu , Kun-Hong Liao , Jain-Ping Sheng
发明人： Chen-Wei Ku , Pao-Yi Lu , Kun-Hong Liao , Jain-Ping Sheng
IPC分类号： B65D85/30 , G03F1/66 , B65D25/04
CPC分类号： G03F1/66
摘要： A transmission box using AMHS for transferring reticle pod is provided, wherein an OHT (Overhead Hoist Transfer) system is disposed on the transmission box to perform mechanical transferring of the reticle pod for greatly reducing risks of damaging reticles caused by operators when transferring, streamlining the allocation of operators, and thus decreasing the time needed for process to complete.
摘要翻译：提供了一种使用AMHS传送光罩舱的传输箱，其中在传输箱上设置了一个OHT（顶起式起重机转移）系统，以进行标线舱的机械转移，从而大大降低了运营商在转运时造成的损坏标线的风险，分配运营商，从而减少流程完成所需的时间。

6. 发明申请

US20120175279A1 EUV POD WITH FASTENING STRUCTURE 有权
标题翻译：具有紧凑结构的EUV POD
公开(公告)号：US20120175279A1
公开(公告)日：2012-07-12
申请号：US13094911
申请日：2011-04-27
申请人： Chen-Wei Ku , Pao-Yi Lu , Chin-Ming Lin , Jain-Ping Sheng
发明人： Chen-Wei Ku , Pao-Yi Lu , Chin-Ming Lin , Jain-Ping Sheng
IPC分类号： B65D85/48
CPC分类号： G03F1/66 , G03F7/70741
摘要： An EUV pod with fastening structure comprises an outer pod and an inner pod, wherein the upper cover of the inner pod is disposed with a plurality of retainers, and a plurality of supporters disposed on the outer pod of the EUV pod are used to press the plurality of retainers for the plurality of retainers to fasten and stabilize the reticle in the inner pod and thus ensure safety and stability of the reticle in the pod; by utilizing such design, risks of collisions of reticle in the pod due to vacillation of EUV pod during transportation can be reduced, and cost incurred by cracks and damages of reticles can also be greatly decreased.
摘要翻译：具有紧固结构的EUV荚包括外荚和内荚，其中内荚的上盖配置有多个保持器，并且设置在EUV荚的外荚上的多个支持物用于按压用于多个保持器的多个保持器用于将掩模版紧固并稳定在内部容器中，从而确保掩模版在荚壳中的安全性和稳定性; 通过利用这种设计，可以减少由于运输过程中的EUV舱的挥发而导致的掩模块碰撞的风险，并且还可以大大降低由于标线的裂纹和损坏造成的成本。

7. 发明申请

US20110174389A1 Sealing Apparatus with Interlocking Air Inflation Device for Wafer Carrier 有权
标题翻译：用于晶片载体的联锁空气充气装置的密封装置
公开(公告)号：US20110174389A1
公开(公告)日：2011-07-21
申请号：US13076417
申请日：2011-03-30
申请人： Chih-Ching Chiu , Pao-Yi Lu
发明人： Chih-Ching Chiu , Pao-Yi Lu
IPC分类号： F16K15/20
CPC分类号： F16J15/46 , H01L21/67373 , H01L21/67376 , Y10T137/3584
摘要： The present invention relates a sealing apparatus with interlocking air inflation device for wafer carrier and a sealing method thereof, wherein the sealing apparatus is disposed between a wafer container and a cover of a wafer carrier, used for sealing the cover and the wafer container when the cover is closed to the wafer container. The sealing apparatus comprises: at least one latch set, at least one interlocked cam, an air inflation sealing member, and at least one air intake/outtake valve, wherein the interlocked cam is adopted for connecting an interlocking device having an air inflation member, and the interlocking device can be used to drive the interlocked cam for making the latch set bolt the cover and the wafer container, and inflate the air inflation sealing member through the air inflation member thereof and the air intake/outtake valve in order to inflate and expand the air inflation sealing member.
摘要翻译：本发明涉及一种具有用于晶片载体的联锁空气充气装置的密封装置及其密封方法，其中密封装置设置在晶片容器和晶片载体的盖之间，用于密封盖和晶片容器盖子封闭到晶片容器。所述密封装置包括：至少一个闩锁组，至少一个互锁凸轮，充气密封构件和至少一个进气/排出阀，其中所述互锁凸轮用于连接具有空气充气构件的互锁装置，并且互锁装置可以用于驱动互锁的凸轮，以使闩锁组件螺栓盖住盖和晶片容器，并且通过其充气构件和进气/排气阀使空气充气密封构件膨胀以便膨胀和膨胀空气充气密封件。

8. 发明授权

US07950524B2 Wafer container having the purging valve 有权
标题翻译：具有清洗阀的晶片容器
公开(公告)号：US07950524B2
公开(公告)日：2011-05-31
申请号：US12431071
申请日：2009-04-28
申请人： Chin-Ming Lin , Pao-Yi Lu
发明人： Chin-Ming Lin , Pao-Yi Lu
IPC分类号： B65D85/90
CPC分类号： F16K15/147 , H01L21/67005 , H01L21/67393 , Y10T137/7882
摘要： A wafer container includes a container body, a door, and a purging valve, wherein the purging valve is disposed in the through hole of the container body. The purging valve includes a fixed sleeve body, a purging head, an elastic component, and a valve lid. The fixed sleeve body comprises a base, and a lower opening is formed at the center of the base for the purging head to be disposed therein. The purging head comprises a bottom portion and a hollow sleeve portion protruding upward from the bottom portion, wherein the hollow sleeve portion is surroundingly disposed with elastic component and with vent disposed on its circumference wall. The valve lid is disposed on top of the hollow sleeve portion so that the purging head can move from the first position to the second position inside the fixed sleeve body when being propped up by an upward force.
摘要翻译：晶片容器包括容器主体，门和清洗阀，其中清洗阀设置在容器主体的通孔中。清洗阀包括固定套筒体，清洗头，弹性部件和阀盖。固定套筒主体包括底座，下部开口形成在用于清洗头的基座的中心处以设置在其中。吹扫头包括底部和从底部向上突出的中空套筒部分，其中中空套筒部分围绕设置有弹性部件，并且排气口设置在其圆周壁上。阀盖设置在中空套筒部分的顶部，使得当由向上的力支撑时，清洗头可以从固定套筒主体内的第一位置移动到第二位置。

9. 发明申请

US20110005966A1 FOUP AND ROBOTIC FLANGE THEREOF 有权
标题翻译： FOUP和机器人法兰
公开(公告)号：US20110005966A1
公开(公告)日：2011-01-13
申请号：US12766103
申请日：2010-04-23
申请人： Ming-Chien Chiu , Pao-Yi Lu , Kuo Chun Hung
发明人： Ming-Chien Chiu , Pao-Yi Lu , Kuo Chun Hung
IPC分类号： H01L21/673 , B23P11/00
CPC分类号： H01L21/67379 , Y10T29/49826
摘要： A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.
摘要翻译：晶片容器包括容器主体，其包括多个侧壁，底部和顶部，以限定用于容纳晶片的空间，形成在一个侧壁上的开口，以及具有外表面和内表面的门。容器主体的顶部设置有机器人法兰，其包括防盗结构和半圆形卡扣钩部分，其设置在机器人法兰的下表面的中心并且其周边面向顶部。防盗结构具有用于插入容器主体顶部上的突出部分的几何孔。在突出部分插入几何孔中之后，机器人凸缘沿着容器主体进一步旋转约180度，用于半 - 圆形卡钩部分，以接合在容器主体的顶部上的半圆形支撑部分中。

10. 发明申请

US20080041759A1 Wafer pod and wafer holding device thereof 有权
标题翻译：晶圆片及其晶片保持装置
公开(公告)号：US20080041759A1
公开(公告)日：2008-02-21
申请号：US11541547
申请日：2006-10-03
申请人： Ming-Lung Chiu , Pao-Yi Lu
发明人： Ming-Lung Chiu , Pao-Yi Lu
IPC分类号： B65D85/00
CPC分类号： H01L21/67369
摘要： A wafer holding device for a wafer pod is disclosed. The disclosed wafer holding device includes a support frame mounted on one side of the housing of the wafer pod, an actuating frame, two rotating arms and two wafer retainers. When the housing and the base of a wafer pod are assembled, the actuating frame moves and forces the wafer retainers to rotate in a direction perpendicular to the edge surface of the wafers.
摘要翻译：公开了一种用于晶片盒的晶片保持装置。所公开的晶片保持装置包括安装在晶片盒的壳体的一侧的支撑框架，致动框架，两个旋转臂和两个晶片保持器。当晶片盒的壳体和基座组装时，致动框架移动并迫使晶片保持器沿垂直于晶片边缘表面的方向旋转。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式