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61. 发明授权

US08507858B2 Pattern measurement apparatus and pattern measurement method 有权
标题翻译：图案测量装置和图案测量方法
公开(公告)号：US08507858B2
公开(公告)日：2013-08-13
申请号：US13652110
申请日：2012-10-15
申请人： Advantest Corporation
发明人： Hiroshi Fukaya , Yoshiaki Ogiso
IPC分类号： H01J37/26 , H01J37/28 , H01J37/244
CPC分类号： G01N23/225 , G01N2223/611 , H01J2237/221 , H01J2237/24578 , H01J2237/248 , H01J2237/2817
摘要： Referring to design data for a sample, a measurement region is defined at a portion in the design data which has no step in an edge of a pattern. In addition, an edge as a characteristic portion is detected from the design data, and an edge as a characteristic portion corresponding to the characteristic portion of the design data is detected from a secondary electron image. Then, the measurement region is positioned and located in a secondary electron image based on a positional relationship between the edge of the design data and the edge of the secondary electron image. A width of the pattern is measured on the basis of a distance between the two edges included in the measurement region thus located.
摘要翻译：参考样本的设计数据，在图案边缘没有步骤的设计数据的部分定义测量区域。此外，从设计数据检测作为特征部分的边缘，并且从二次电子图像检测作为与设计数据的特征部分相对应的特征部分的边缘。然后，基于设计数据的边缘与二次电子图像的边缘之间的位置关系，将测量区域定位并位于二次电子图像中。基于包括在如此定位的测量区域中的两个边缘之间的距离来测量图案的宽度。

62. 发明授权

US08354638B2 Electron detection device and scanning electron microscope 有权
标题翻译：电子检测装置和扫描电子显微镜
公开(公告)号：US08354638B2
公开(公告)日：2013-01-15
申请号：US12931899
申请日：2011-02-14
申请人： Tsuguo Kurata
发明人： Tsuguo Kurata
IPC分类号： G01N23/00
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/24465 , H01J2237/2814
摘要： An electron detection device including: one scintillator 31 having an opening through which an electron beam emitted from an electron gun passes; a plurality of photoguides 22 of the same shape, which are bonded to the scintillator and disposed symmetrically about an optical axis; and a photomultiplier tube which is connected to one side of each of the photoguides 22, the side opposing to the optical axis side, and converts light into electrical signals, the light being emitted by the scintillator 31 receiving light through the photoguide 22. The photoguides 22 are joined so as to equally divide the scintillator 31 symmetrically about the optical axis. Moreover, a position and an area of a portion bonded to the scintillator 31, in each of the photoguides 22, are the same among the photoguides 22.
摘要翻译：一种电子检测装置，包括：一个具有开口的闪烁体31，从电子枪发射的电子束通过该开口; 多个相同形状的光导体22，其结合到闪烁体并且围绕光轴对称设置; 以及光电倍增管，其连接到每个光导22的与光轴侧相对的一侧，并将光转换为电信号，由闪烁体31发射的光通过光导22接收光。光导体 22相接合，以使闪烁体31相对于光轴对称地分开。此外，在光导22中，每个光导22中结合到闪烁体31的部分的位置和面积相同。

63. 发明授权

US07944263B2 Timing generator and semiconductor test apparatus 失效
标题翻译：定时发生器和半导体测试装置
公开(公告)号：US07944263B2
公开(公告)日：2011-05-17
申请号：US11989714
申请日：2006-07-28
申请人： Masakatsu Suda
发明人： Masakatsu Suda
IPC分类号： H03H11/26
CPC分类号： G01R31/31922 , G01R31/31721 , H03K5/131 , H03K5/1504 , H03K2005/00026 , H03L7/0812
摘要： A timing generator reduces operation-dependent power consumption (AC component) and noises generated from a clock distribution circuit itself in distributing a clock, and further reduces a skew attributed to the clock distribution. A clock distribution circuit 20 for distributing the clock to timing generating sections 10-1 to 10-n has a clock main path 21 connected to a main path buffer 24 and a clock return path 26 connected to a return path buffer 27. A load capacity of the main path buffer 24 is equal to that of the return path buffer 27. Biases of the buffers are the same potential and are generated by a delay locked-loop circuit 30. A propagation delay time of the clock distribution circuit is controlled so as to be an integral multiple of a clock period.
摘要翻译：定时发生器在分配时钟时降低了与时钟分配电路本身产生的操作相关的功率消耗（AC分量）和由时钟分配电路产生的噪声，并且进一步减少了归因于时钟分布的偏差。用于将时钟分配给定时产生部分10-1至10-n的时钟分配电路20具有连接到连接到返回路径缓冲器27的主路径缓冲器24和时钟返回路径26的时钟主路径21.负载能力主路径缓冲器24等于返回路径缓冲器27的偏移。缓冲器的偏置是相同的电位，并由延迟锁定环电路30产生。时钟分配电路的传播延迟时间被控制为成为时钟周期的整数倍。

64. 发明授权

US07768332B2 Waveform generation apparatus, setup cycle correction method and semiconductor test apparatus 失效
标题翻译：波形发生装置，设置周期校正方法和半导体测试装置
公开(公告)号：US07768332B2
公开(公告)日：2010-08-03
申请号：US11811514
申请日：2007-06-11
申请人： Kenji Tamura
发明人： Kenji Tamura
IPC分类号： G06F1/04 , H03K3/00
CPC分类号： G01R31/31928
摘要： Spurious noise that occurs in the vicinity of a carrier can be removed even when a high-resolution cycle is set, thereby realizing low jitters in a high-precision variable clock signal. Cycle data that is set by a pattern generator in a waveform generation apparatus (a semiconductor test apparatus) is corrected in such a manner that spurious noise that occurs in a carrier of a high-precision variable clock is produced at a position far from the carrier in terms of frequency. As a result, the spurious noise can be assuredly removed by a phase-locked loop circuit, thereby realizing low jitters in the high-precision variable clock signal.
摘要翻译：即使设置高分辨率周期，也可以去除载波附近发生的伪噪声，从而在高精度可变时钟信号中实现低抖动。在波形生成装置（半导体测试装置）中由模式发生器设置的周期数据被校正为在远离载波的位置处产生在高精度可变时钟的载波中发生的杂散噪声在频率方面。结果，可以通过锁相环电路确实地消除杂散噪声，从而在高精度可变时钟信号中实现低抖动。

65. 发明授权

US07760344B2 Optical sampling apparatus 失效
标题翻译：光采样装置
公开(公告)号：US07760344B2
公开(公告)日：2010-07-20
申请号：US12036303
申请日：2008-02-25
申请人： Shigeki Nishina
发明人： Shigeki Nishina
IPC分类号： G01J11/00
CPC分类号： G01J11/00 , G02F1/3536
摘要： Provided is an optical sampling apparatus that samples light to be measured having a pulse waveform, including a sampling light output section that outputs a first sampling light and a second sampling light, both having pulse waveforms of a spectrum different from that of the light to be measured; a first sampling section that includes a first nonlinear optical medium, which causes a nonlinear optical effect by causing at least a portion of the light to be measured and the first sampling light to pass therethrough and outputs light generated by the nonlinear optical effect, and that outputs at least a portion of the light generated by the nonlinear optical effect as a first output light; and a second sampling section that includes a second nonlinear optical medium, which causes a nonlinear optical effect by causing at least a portion of the first output light and the second sampling light to pass therethrough with a temporal overlap in order to output light generated by the nonlinear optical effect, and that outputs at least a portion of the light generated by the nonlinear optical effect as a second output light.
摘要翻译：提供一种光采样装置，其对具有脉波波形的被测量光进行采样，该采样光输出部分输出具有不同于光的光谱的脉冲波形的第一采样光和第二采样光测量; 第一采样部分，其包括第一非线性光学介质，其通过使待测量的光的至少一部分和第一采样光通过并且输出由非线性光学效应产生的光而引起非线性光学效应，并且将由非线性光学效果产生的光的至少一部分输出为第一输出光; 以及第二采样部分，其包括第二非线性光学介质，其通过使第一输出光和第二采样光的至少一部分通过其中的时间重叠而引起非线性光学效应，以便输出由非线性光学效应，并且将由非线性光学效应产生的光的至少一部分输出为第二输出光。

66. 发明授权

US07663103B2 Line-width measurement adjusting method and scanning electron microscope 有权
标题翻译：线宽测量调整方法和扫描电子显微镜
公开(公告)号：US07663103B2
公开(公告)日：2010-02-16
申请号：US11726966
申请日：2007-03-23
申请人： Masayuki Kuribara , Jun Matsumoto
发明人： Masayuki Kuribara , Jun Matsumoto
IPC分类号： G01N23/225
CPC分类号： G01B15/04 , G01N23/225 , H01J2237/24535 , H01J2237/24578 , H01J2237/248 , H01J2237/2816 , H01J2237/2817
摘要： A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of secondary electrons obtained respectively by scanning a first irradiation distance with an electron beam at first magnification, and by scanning a second irradiation distance with an electron beam at second magnification, includes the step of adjusting the second electron beam intensity distribution of the electron beam at the second magnification such that the second electron beam intensity distribution is equal to the first electron beam intensity distribution of the electron beam at first magnification. The second electron beam intensity distribution may be adjusted by increasing or decreasing a second irradiation distance when producing the electron beam intensity distribution.
摘要翻译：线宽测量调整方法，用于当用于测量线宽度的第一和第二电子束强度分布由分别通过在第一放大倍率下用电子束扫描第一照射距离获得的二次电子的强度分布图像产生时，通过在第二倍率下用电子束扫描第二照射距离，包括以第二倍率调整电子束的第二电子束强度分布的步骤，使得第二电子束强度分布等于第一电子束强度分布的电子束。可以通过在产生电子束强度分布时增加或减少第二照射距离来调节第二电子束强度分布。

67. 发明授权

US07634370B2 Waveform input circuit, waveform observation unit and semiconductor test apparatus 失效
标题翻译：波形输入电路，波形观察单元和半导体测试仪
公开(公告)号：US07634370B2
公开(公告)日：2009-12-15
申请号：US11368208
申请日：2006-03-03
申请人： Masayuki Kawabata
发明人： Masayuki Kawabata
IPC分类号： G01R31/02
CPC分类号： G01R31/31926 , G01R31/31924
摘要： A waveform input circuit, waveform observation unit and semiconductor test apparatus allow to faithfully observe waveform of a device under test with high output impedance and low load driving capability. A waveform input circuit includes a high input impedance terminating resistance which receives an input signal from a transmission line, a relay which selects a terminating resistance, an input buffer which is connected when the high input impedance terminating resistance is selected. A reference potential switch is further provided to select a reference potential of the transmission line where one reference potential is controlled to be in phase with the input signal by an input buffer which is connected when the high input impedance terminating resistance is selected.
摘要翻译：波形输入电路，波形观察单元和半导体测试装置允许忠实地观察被测器件的波形，具有高输出阻抗和低负载驱动能力。波形输入电路包括接收来自传输线的输入信号的高输入阻抗终端电阻，选择终端电阻的继电器，当选择高输入阻抗终端电阻时连接的输入缓冲器。还提供参考电位开关，用于选择一个参考电位的参考电位，其中一个参考电位被控制为与当输入高阻抗终端电阻被选择时连接的输入缓冲器与输入信号同相。

68. 发明授权

US07518405B2 Impedance matching circuit, input-output circuit and semiconductor test apparatus 失效
标题翻译：阻抗匹配电路，输入输出电路和半导体测试装置
公开(公告)号：US07518405B2
公开(公告)日：2009-04-14
申请号：US11973547
申请日：2007-10-09
申请人： Shoji Kojima
发明人： Shoji Kojima
IPC分类号： H03K19/0175
CPC分类号： H04L25/0278
摘要： A characteristic test of a DUT having a low transmission line driving capability can be performed with a simple configuration and low cost. An impedance matching circuit is connected between a transmission line and a DUT in an input-output circuit of a semiconductor test apparatus. The impedance matching circuit includes: a resistance; an analog computing unit which multiplies a voltage from one end of the resistance by a predetermined number, subtracts a voltage from the other end of the resistance from the voltage multiplied by the predetermined number and outputs a resultant voltage; and a buffer which outputs a signal from the analog computing unit with low impedance. The impedance matching circuit produces an output signal from the DUT with low impedance, thereby sufficiently driving the transmission line.
摘要翻译：具有低传输线驱动能力的DUT的特性测试可以以简单的结构和低成本进行。阻抗匹配电路连接在半导体测试装置的输入 - 输出电路中的传输线和DUT之间。阻抗匹配电路包括：电阻; 将来自电阻的一端的电压乘以预定数量的模拟计算单元，从电压乘以预定数量的电阻的另一端减去电压，并输出合成电压; 以及缓冲器，其输出来自具有低阻抗的模拟计算单元的信号。阻抗匹配电路从DUT产生低阻抗的输出信号，从而充分驱动传输线。

69. 发明授权

US07423390B2 Electron beam generator for multiple columns 有权
标题翻译：多列电子束发生器
公开(公告)号：US07423390B2
公开(公告)日：2008-09-09
申请号：US11703848
申请日：2007-02-08
申请人： Takamasa Sato
发明人： Takamasa Sato
IPC分类号： H01J37/06
CPC分类号： H01J37/3177 , B82Y10/00 , B82Y40/00 , H01J37/06 , H01J37/304 , H01J2237/061
摘要： An electron beam generator for multiple columns includes: a plurality of cathodes, to which a single acceleration voltage supply applies a negative acceleration voltage, and which thus generates thermoelectrons; a grid for each of the plurality of cathodes, the grid converging the thermoelectrons emitted to form a beam of electrons; a grid voltage supply for giving the grid a potential which is negative relative to a potential of the cathode; and a control circuit for each cathode, for controlling the potential of the grid. The control circuit includes a current direction restricting element connected between a positive electrode of the grid voltage supply and the cathode, and a grid current supplied from the grid voltage supply is caused to flow to the cathode through the current direction restricting element.
摘要翻译：用于多列的电子束发生器包括：多个阴极，单个加速电压电源施加负加速电压，从而产生热电子; 用于多个阴极中的每一个的栅格，所述栅格会聚发射的热电子以形成电子束; 电网电压源，用于给予电网相对于阴极的电位为负的电位; 以及用于每个阴极的控制电路，用于控制电网的电位。控制电路包括连接在电网电源的正电极和阴极之间的电流方向限制元件，并且通过电流方向限制元件使从电网电源供给的电网电流流向阴极。

70. 发明授权

US07394640B2 Electrostatic chuck and substrate fixing method using the same 有权
标题翻译：静电吸盘和使用其的基板固定方法
公开(公告)号：US07394640B2
公开(公告)日：2008-07-01
申请号：US11089375
申请日：2005-03-23
申请人： Hirofumi Hayakawa
发明人： Hirofumi Hayakawa
IPC分类号： H02N13/00
CPC分类号： H01L21/6833 , Y10T279/23
摘要： The electrostatic chuck 101 where pairs of electrodes 3a/3b, 4a/4b and 5a/5b to which voltages are applied are embedded in the main body 1, and where a substrate 110 is placed and held on the surface of the main body 1, includes a first electrode group constituted of one pair or more of electrodes 3a/3b arranged in a center region 41 inside the main body 1, and a second electrode group constituted of one pair or more of electrodes 4a/4b and 5a/5b arranged in outer peripheral portions 42 and 43 surrounding the center region 41.
摘要翻译：将施加有电压的电极对a a，b b，a a，b b，a a，b 2的静电吸盘101嵌入在主体1中，并且将基板110放置并保持在表面主体1包括由主体1内的中心区域41配置的一对或多个电极3a，3b组成的第一电极组和由一对或多个电极4构成的第二电极组 a / 4b和5a / 5b布置在围绕中心区域41的外围部分42和43中。

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